• Journal of the Korean Vacuum Society
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• v.21 no.1
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• pp.36-40
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• 2012

We have developed the detection method of the resonance frequency of micro/nano mechanical resonator using optical method. The optical interferometery method enabled us to detect the displacement change of resonators within several nm scale. The micro mechanical resonator was produced by attaching a micro mechanical cantilever to a piezo ceramic. The mass of cantilever was increased by evaporating Au using electron beam evaporator and the mass variation was estimated by detecting the resonance frequency changes.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.4
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• pp.12-18
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• 2002

Silicon on insulator(SOI) wafer is used in a variety of microsensor applications in which thermal deformations and other mechanical effects may dominate device Performance. One of major Problems associated with the manufacturing Processes of the microaccelerometer based on the tunneling current concept is thermal deformations and thermal stresses. This paper deals with finite element analysis(FEA) of residual thermal deformations causing popping up, which are induced in micrormaching processes of a microaccelerometer. The reason for this Popping up phenomenon in manufacturing processes of microaccelerometer may be the bending of the whole wafer or it may come from the way the underetching occurs. We want to seek after the real cause of this popping up phenomenon and diminish this by changing manufacturing processes of mic개accelerometer. In microaccelerometer manufacturing process, this paper intend to find thermal deformation change of the temperature distribution by tunnel gap and additional beams. The thermal behaviors analysis intend to use ANSYS V5.5.3.

• Korean Journal of Materials Research
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• v.6 no.9
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• pp.937-942
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• 1996

박막 공정 및 마이크로머시닝(micromachining)기술에 의해 제작되는 마이크로 가스 센서는 고온 동작이 필수불가결하며 이 때 안정된 출력을 얻기 위해서 센서 저항 변화에 영향을 줄 수 있는 응집화 현상이 발생하지 말아야 한다. 본 연구에서는 고온 동작시 응집화의 구동력으로 작용하는 여러 요소중의 하나인 응력(stress)을 줄이기 위해서 인가 전력 밀도, 기판온도, 증착 압력 등을 증착 변수로 하여 증착 조건이 (AI, SI)1-xOx박막과 Pt 박막의 제반 물성 및 응력변화에 미치는 영향에 대하여 연구하였다. (AI, SI)1-xOx박막의 증착 속도와 굴절율 값은 O2분압과 기판 온도가 증가할수록 감소하였으며 응력은 O2분압이 증가함에 따라 인장에서 압축으로 전환된 후 증가하였다. Pt 박막의 경우, 인가 전력이 증가할수록 공정 압력이 감소할수록, 기판 온도가 감소할수록 증착 속도는 증가하였으며 전기 비저항은 감소하였다. Pt 박막의 응력은 인가 전력이 증가할수록, 공정 압력이 증가할수록, 기판 온도가 증가할수록 압축에서 인장의 방향으로 전환된 후 증가하였으며 박막의 전기비저항 및 증착속도에 크게 의존하는 것으로 분석되었다.

• Journal of Sensor Science and Technology
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• v.12 no.4
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• pp.156-163
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• 2003

Polypyrrole microactuators have been fabricated by the standard surface micromachining method combined with the electropolymerization of polypyrrole. The fundamental structure to verify the feasibility of the fabrication process is polypyrrole cantilever. Based on these process, polypyrrole grippers and valves for the manipulation of the cell have been fabricated. Grippers have the structure of bone and muscle which are rigid polymers and polypyrrole, respectively. Valves have the assembled structure of channels with polypyrrole cantilevers. The proposed fabrication process and structures are expected to be used for bio-related applications, for example, the cell manipulation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• Journal of Advanced Navigation Technology
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• v.14 no.3
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• pp.343-350
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• 2010

Wireless Sensor Network is an event-driven system that a large number of micro sensor nodes are collected, giving and Wing information. Congestion can take place easily since a great number of sensor nodes are sensing data and transferring them to sink nodes when an event occurs, comparing to the existing wired network. Current internet transport protocol is TCP/UDP, however, this is not proper for wireless sensor network event-driven ESRT, STCP and CODA are being studied for reliable data transport in the wireless sensor network. Congestion are being detected local buffer and channel loading with these techniques. Broadcasting is mainly used and can avoid congestion when one happens. The way that combining local buffer and channel loading information and detecting congestion is being studied in this paper. When congestion occurs, buffering state is divided into three in order to lessen the broadcasting sending the message on congestion control to the node having frequent channel loading. Thus they have advantage of decreasing network's loading.

• KIPS Transactions on Computer and Communication Systems
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• v.5 no.10
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• pp.331-338
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• 2016

In this paper, we propose a system for transmitting army hand signals using motion sensors. The proposed system consists of a squad commander device, squad member devices, and a server. The squad command device and squad member device have been implemented using a micro arduino, an accelerometer sensor, and a gyroscope sensor, and the server has been implemented using a Rasberry Pi 3. Because the devices are made in the form of band, they are lightweight and portable. The proposed system can transmit the hand signals through vibration in conditions of poor visibility. We have designed and implemented the squad member device to be able to recognize four military hand signals. Through experiments, the proposed system have shown 88.82% of correct recognition. In conclusion, we expect to increase effectiveness of army operations and survival rate of soldiers.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.5
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• pp.395-400
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• 2008

Alternating magnetic field was used for detection of surface flaws on nonmagnetic and magnetic metallic specimens. The nondestructive sensor probe was composed of the planar coil with inductive magnetic thin film yoke as a sensing component and a single straight typed exciting coil. The planar inductive coil sensor with magnetic yoke was fabricated by sputtering, electroplating, dry etching and photolithography process. The alternative currents with the range of 0.1A to 1.0A (0.7 MHz to 1.8 MHz) were applied to the exciting coil. The specimens were prepared with the slit shaped artificial surface flaws (minimum depth and width; 0.5 mm) on metallic plate (Al; nonmagnetic metal and FeC; magnetic metal). The detected signal for the positions and shapes of surface flaws on specimens were obtained with high sensitivity and high signal to ratio. The measured output signals by the non-contacted scanning on surface of FeC specimen with micron-sized crack were converted to the images of the flaws. And these results were compared with the optical images, respectively.

• Journal of Sensor Science and Technology
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• v.7 no.5
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• pp.327-333
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• 1998

A new human sensibility (kansei) meter that can measure human sensibility at the indoor environment is developed in this paper. Four sensors that can measure temperature, humidity, $CO_2$ and $C_4H_{10}$ concentrations are used. Among these sensors, the first three are used to determine the human sensibility. And the last to protect human from the harmful gas. First of all, human sensibilities are defined for each sensor datum, and then those are linearly combined to make a final human sensibility (kansei). The efficiency and usefulness of the meter are verified using a simulator on Windows 95 and a stand-alone system constructed using a microprocessor.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.18 no.5
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• pp.223-228
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• 2018

In this paper the water sensor using a coaxial cavity resonator is designed and manufactured. The water sensor which can sense water drop linearly has been constructed with voltage controlled oscillator(VCO), coaxial cavity resonator, RF switch, RF detector, A/D converter, DAC and micro controller. The operating frequency range of the designed water sensor is from 2.5GHz to 3.2GHz and the input voltage and current source are 24[V/DC] and 1[A]. The designed sensor circuit includes VCO, RF switch, RF detector which varies the frequency characteristics of the devices in the high frequency of 3GHz. And so we should correct the error of the frequency characteristics of those devices in the sensor circuit. To do this, we make the reference path which switches the signals to the RF detector directly without sending it to the resonator. According to the result of simulation and measurement, we can see that there is 0-50MHz difference between simulated resonator frequency and manufactured resonator frequency.