• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.4
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• pp.231-236
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• 2004

A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1526-1527
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• 2007

This paper presents the design, fabrication and experimental results of an electromagnetic microvalve for drug delivery systems. The microvalve consists of two silicon substrates with a silicone rubber diaphragm and a flow channel, a PDMS layer, and an electromagnetic actuator. Each substrate is fabricated by using the silicon wet etch, SU-8 mold process and $O_2$ plasma bonding.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.285-290
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• 2005

Micro On-Off valves are currently recognized as the core technology in the fields of the micro fluid chip fur medical applications and production lines of semi-conduct chip. Micro valves that operate by compressed air need the high-speed responsibility, repeatability, the absorbability and the uniform pressure by the poppet. In this study, Micro On-Off valves that posses the high-speed responsibility and the high rate of flow have designed and analyzed through the law of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, Flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.04a
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• pp.139-143
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• 2011

금속분말을 청정 에너지원으로 이용하기 위해 금속분말 소형 연소기의 구현이 필요하다. 이를 위한 기초 연구로서 점화성이 뛰어나면서도 경제적인 수십 마이크로 크기의 마그네슘(Mg) 분말을 대상으로 고온 증기(steam)와의 연소 현상 대해 연구하였다. 본 연구에서는 연소실 내 체류시간 및 혼합 효율을 증가시키기 위해 와류 유동을 연소기에 적용하였고 아르곤(Ar) 이송가스를 이용해 마그네슘 분말을 공급하였다. 안정한 화염을 유지시키기 위하여 이송가스의 유량을 변화시켜 공급되는 마그네슘의 양을 조절하였고, 고온 증기의 공급량은 니들 밸브의 개도를 조정하거나 우회시킨 관로로 증기의 일부를 배출함으로써 조절하였다. 고온의 점화원을 사용하여 증기 분위기 내 마그네슘 분말을 점화시켜, 대기압 환경에서 마그네슘/증기/아르곤의 지속적인 화염을 구현하였다.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.5
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• pp.421-426
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• 2008

The magnetic bio-sensor used the PHR (planar hall resistance) effect generated by the free layer in spin-valve giant magnetoresistance structure of Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta. The PHR element with micrometer size was fabricated through the photolithograph and dry etching process. The PHR signal with magnetic field was measured under the conditions of with and without single magnetic bead. A single magnetic bead of diameter $2.8\;{\mu}m$ was successfully detected using the PHR sensor. Therefore, the high resolution PHR sensor can be applied to bio-sensor application utilizing the output voltage variation of the PHR signals in the presence and absence of a single magnetic bead.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.5
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• pp.567-573
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• 2014

Since the development of microelectromechanical systems (MEMS) technology for the medical field, various micro-fluid transfer systems have been studied. This paper proposes a micro-piezoelectric pump that imitates a stomach's peristalsis by using two separate piezoelectric elements, in contrast to existing micro-pumps. This piezoelectric pump is operated by using the valve-less traveling wave of peristalsis movement. If the piezoelectric plates at the two separated plates are actuated at the input voltage, a traveling wave occurs between the two plates. Then, the fluid migrates by the pressure difference generated by the traveling wave. Finite element analysis was performed to understand the mechanics of the combined system with piezoelectric elements, elastic structures, and fluids. The effects of design variables such as the chamber height and number of ceramics on the flow rate of the fluid were examined.

• Journal of Convergence for Information Technology
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• v.9 no.5
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• pp.158-164
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• 2019

Recently many studies to reduce the noise of dental hand piece which generate inevitably mechanical sound to offend to the ear of a patient have been spotlighted. Generally, methods of adding a sound absorbing material inside the exhaust valve, air pump of machine or automobile are widely reported as optimal way to reduce the mechanical noise. In this paper we studied a new UV laser aided manufacturing of micro-porous structure of EPP substrate and applied dental hand piece to improve the efficiency of sound absorption. A lot of micro-sized pores were fabricated with UV laser processing on the surface of sliced EPP substrate. From fundamental experiments, more high-performance of micro-porous EPP substrate has finally demonstrated for sound-absorbing structure of the micro muffler inside dental hand piece, which actually has the excellent potential to apply a lot of potable machine.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.