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Fabrication and Characteristics of Thermopneumatic-Actuated Polydimethylsiloxane Microvalve  

김진호 (명지대 전기공학과)
조주현 (명지대 전기공학과)
한경희 (명지대 전기공학과)
김영호 (수원대 전자재료공학과)
김한수 (두원공과대학 전기과)
김용상 (명지대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.53, no.4, 2004 , pp. 231-236 More about this Journal
Abstract
A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.
Keywords
microvalve; thermopneumatic-actuation; PDMS; ITO heater; membrane;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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