• Title/Summary/Keyword: 마이크로 기둥

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Formation of Indium Bumps on Micro-pillar Structures through BCB Planarization (BCB 평탄화를 활용한 마이크로 기둥 구조물 위의 인듐 범프 형성 공정)

  • Park, Min-Su
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.4
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    • pp.57-61
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    • 2021
  • A formation process of indium bump arrays on micro-pillar structures is proposed. The space to form indium bump on the narrow structures can be secured applying the benzocyclobutene (BCB) planarization and its etch-back process. We exhibit a detailed overview of the process steps involved in the fabrication of 320×256 hybrid camera sensor for short-wavelength infrared (SWIR) detection. The shear strength of the BCB, which has undergone the different processes, is extracted by quartz crystal microbalance measurement. The shear strength of the BCB is three orders of magnitude higher than that of the indium bump itself. The measured dark current distribution of the fabricated SWIR camera sensor indicates the suggested process of indium bumps can be useful for embodying highly sensitive infared camera sensors.

Electro-spray Micro-Thruster Using Nozzle with Pole-Type Electrode (기둥 구조 전극을 내재하는 노즐을 이용한 정전 분무 마이크로 추진기관)

  • Lee, Young-Jong;Yang, Ji-Hye;Lee, Suk-Han;Kim, Yong-Jae;Koh, Han-Seo;Byun, Do-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.35 no.12
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    • pp.1115-1120
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    • 2007
  • This paper presents a novel mechanism of electro-spray micro-thruster featured by a nozzle with a conductive pole inside, referred to here as a pole type nozzle. And the effects of the pole type nozzle on the efficiency of the jetting are numerically and experimentally investigated. The electric voltage signal applied to the upper electrode plate, against the pole as the ground, allows a ejection of spray to take place. It is verified experimentally that the use of the pole type nozzle allows a stable and sustainable jetting mode of ejection for a wider range of applied voltages because it can concentrate the electric field more on the centre of the meniscus. According to results about size effect, experiments indicates that the proposed mechanism allows that operation of micro thruster at less than 500 volts through nanoscale nozzle.

The Effect of Dimensions of Micro-post on Oleophobic Property (마이크로 기둥 구조의 크기가 소유성 특성 발현에 미치는 영향)

  • Kim, Nam-Kyung;Kim, Hae-Ji
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.17 no.5
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    • pp.91-96
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    • 2018
  • The oleophobic property of surfaces modified with micro-post structures are investigated for a range of micro-post diameter ($11-23{\mu}m$) and pitch ($20-40{\mu}m$). The contact angle of an oil droplet on surfaces with various micro-post dimensions was calculated using the Cassie-Baxter model and did not show a good agreement with the measured contact angle. From measurement, the micro-post with diameter of $23{\mu}m$ and pitch of $32{\mu}m$ was found to have the highest contact angle ($134.3^{\circ}$).

Experimental study of spreading phenomena on hydrophilic micro-textured surfaces depending on surface geometrical features (친수성 마이크로 기둥 구조 표면에서의 표면 지형적 특성에 따른 퍼짐성 현상에 대한 실험적 연구)

  • Jang, Munyoung;Park, Sehyeon;Yu, Dong In
    • Journal of the Korean Society of Visualization
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    • v.16 no.3
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    • pp.35-39
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    • 2018
  • In multiphase systems, surface wettability is one of dominant design parameters to enhance system performance. Since surface wettability can be maximized and minimized with micro-textured surfaces, therefore micro-textured surfaces are widely countered in various research and engineering fields. In this study, for better understanding of micrometer scaled surface wettability, spreading phenomena is experimentally investigated on the hydrophilic micro-textured surfaces. By photolithography and conventional dry etching method, there are prepared the surfaces with uniformly arrayed micro-pillars. The interfacial motions of a water droplet on the test sections are visualized by high speed camera in top view. On the basis of visualization data, it is analyzed the relation between dynamic coefficient and geometrical features on micro-textured surfaces.

Natural Frequency Characteristics of GFRP Pole Structures for Civil Structures with Different Fiber-Volume Fraction (모재-섬유 함침 비율에 따른 건설용 GFRP 기둥구조의 고유진동 특성)

  • Lee, Sang-Youl
    • Composites Research
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    • v.27 no.2
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    • pp.66-71
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    • 2014
  • This study carried out finite element vibration analysis of pole structures made of GFRP, which is based on the micro-mechanical approach for different fiber-volume fractions. The finite element (FE) models for composite structures using multi-scale approaches described in this paper is attractive not only because it shows excellent accuracy in analysis but also it shows the effect of the material combination. The FE model is used for studying free vibrations of laminated composite poles for various fiber-volume fractions. In particular, new results reported in this paper are focused on the significant effects of the fiber-volume fraction for various parameters, such as fiber angles, layup sequences, and length-thickness ratios. It may be concluded from this study that the combination effect of fiber and matrix, largely governing the dynamic characteristics of composite structures, should not be neglected and thus the optimal combination could be used to design such civil structures for better dynamic performance.

Apparent Contact Angle on the Hydrophilic/Hydrophobic Surfaces with Micro-pillars (마이크로 기둥 구조가 있는 친수성/소수성 표면에서의 겉보기 접촉 각에 대한 연구)

  • Yu, Dong In;Doh, Seung Woo;Kwak, Ho Jae;Ahn, Ho Seon;Kim, Moo Hwan;Park, Hyun Sun
    • Journal of the Korean Society for Precision Engineering
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    • v.31 no.2
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    • pp.171-178
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    • 2014
  • In this study, the apparent contact angle on the hydrophilic/hydrophobic surfaces with micropillars was studied. The previous researches showed that the Wenzel equation and the Cassie-Baxter equation were thermodynamically derived for the rough hydrophilic/hydrophobic surfaces and generally referenced on the field of wetting phenomena. For the verification of both equations, the apparent contact angle on the hydrophilic/hydrophobic surfaces with micro-pillars was measured. In the comparison between the measured and estimated apparent contact angles with the equations, the differences between the apparent contact angles were analyzed. Conclusively, the available range and limitation of theoretical equations were investigated and further researches about the apparent contact angle on the rough surfaces were proposed.

Simulation for a microfabricated transformer on the LTCC substrate (LTCC 기판 위에 제작된 마이크로 트랜스포머의 시뮬레이션)

  • Kim, Sung-Tae;Cha, Doo-Yeol;Kang, Min-Suck;Cho, Se-Jun;Jang, Sung-Pil
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.166-167
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    • 2008
  • 현재 Passive component 중의 하나인 트랜스포머의 소형화가 큰 이슈로 대두되고 있다. 본 논문에서는 기판의 와전류 효과의 영향을 줄이기 위해 LTCC기판을 이용하여 트랜스포머를 설계하고, 1:1 및 1:n의 권선 수를 갖는 두 코일의 인덕턴스 및 상호 인덕턴스를 시뮬레이션 하였다. 트랜스포머의 최대 크기는 2.55mm $\times$ 1.1 mm 이고 선폭은 50um 선간 간격은 50um이고, 기둥의 높이는 40um이다. MEMS 기술을 사용하여 기판 커플링과 저항손을 줄임으로서 8.5GHz 에서 0.33dB의 낮은 삽입 손실을 나타냈다.

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Discrete Optimum Design of Semi-rigid Steel Frames Using Refined Plastic Hinge Analysis and Genetic Algorithm (개선소성힌지해석과 유전자 알고리즘을 이용한 반강접 강골조의 이산최적설계)

  • Lee, Mal Suk;Yun, Young Mook;Kang, Moon Myoung
    • Journal of Korean Society of Steel Construction
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    • v.16 no.2 s.69
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    • pp.201-213
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    • 2004
  • A GA-based optimum design algorithm and a program for plane steel frame structures with semi-rigid connections are presented. The algorithm is incorporated with the refined plastic hinge analysis method wherein geometric nonlinearity is considered by using the stability functions of beam-column members, and material nonlinearity, by using the gradual stiffness degradation model that includes the effects of residual stresses, moment redistribution through the occurrence of plastic hinges, semi-rigid connections, and geometric imperfection of members. In the genetic algorithm, the tournament selection method and micro-GAs are employed. The fitness function for the genetic algorithm is expressed as an unconstrained function composed of objective and penalty functions. The objective and penalty functions are expressed as the weight of steel frames and the constraint functions, respectively. In particular, the constraint functions fulfill the requirements of load-carrying capacity, serviceability, ductility, and construction workability. To verify the appropriateness of the present method, the optimal design results of two plane steel frames with rigid and semi-rigid connections are compared.

Characterization of GaN epitaxial layer grown on nano-patterned Si(111) substrate using Pt metal-mask (Pt 금속마스크를 이용하여 제작한 나노패턴 Si(111) 기판위에 성장한 GaN 박막 특성)

  • Kim, Jong-Ock;Lim, Kee-Young
    • Journal of the Microelectronics and Packaging Society
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    • v.21 no.3
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    • pp.67-71
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    • 2014
  • An attempt to grow high quality GaN on silicon substrate using metal organic chemical vapor deposition (MOCVD), herein GaN epitaxial layers were grown on various Si(111) substrates. Thin Platinum layer was deposited on Si(111) substrate using sputtering, followed by thermal annealing to form Pt nano-clusters which act as masking layer during dry-etched with inductively coupled plasma-reactive ion etching to generate nano-patterned Si(111) substrate. In addition, micro-patterned Si(111) substrate with circle shape was also fabricated by using conventional photo-lithography technique. GaN epitaxial layers were subsequently grown on micro-, nano-patterned and conventional Si (111) substrate under identical growth conditions for comparison. The GaN layer grown on nano-patterned Si (111) substrate shows the lowest crack density with mirror-like surface morphology. The FWHM values of XRD rocking curve measured from symmetry (002) and asymmetry (102) planes are 576 arcsec and 828 arcsec, respectively. To corroborate an enhancement of the growth quality, the FWHM value achieved from the photoluminescence spectra also shows the lowest value (46.5 meV) as compare to other grown samples.