• Title/Summary/Keyword: 레이저간섭계

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The Research on the Vibration of the Circular Plate for Varying Free Arc Angles by Time-Average Holographic Interferometry (시간평균 홀로그래픽 간섭계를 이용한 경계조건의 변화에 따른 원형평판의 진동에 관한 연구)

  • 이기백;양장식;나종문
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.10
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    • pp.1900-1907
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    • 1992
  • This paper presents the vibration mode, natural frequencies and amplitudes of the circular plate due to the changes of the boundary conditions by varying free arc angles. The vibration mode, amplitudes and natural frequencies of the circular plate are obtained by time-average holographic interferometry and laser doppler vibrometer. The vibration modes of the circular plate with the mixed boundary conditions are found from the 1st mode to the 4th mode. The curve shapes of the natural frequency ratios obtained from this study are in a good agreement with other results obtained by numerical analysis. The displacement curves obtained from time average holographic interferometry and laser doppler vibrometer agree well in case of large amplitude, but show a little difference in case of small amplitude.

Principles and Prospects of Sagnac Interferometer Gyroscopes (사냑간섭계 원리를 이용한 자이로의 원리와 발전 전망)

  • Shim, Kyu-Min
    • Korean Journal of Optics and Photonics
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    • v.23 no.5
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    • pp.203-210
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    • 2012
  • Sagnac interferometer gyroscopes can be divided into three large generations using starting points of time or highlights of their research. As the first generational Sagnac interferometer, the ring laser gyroscopes have been studied since the 1960s by laser invention, and as the second generational Sagnac interferometer, the fiber optic gyroscopes have been studied since the 1970s by invention of optical fiber for communication. In the latter half of the 1990s, after having confirmed the wave theory of the atom, studies of atomic interferometers were started for a next generation gyroscope application. This paper discusses the operation principles, application, and future prospects of these three generations of Sagnac gyroscopes.

이중광속을 이용한 레이저 도플러 속도 측정계(Fiber optic sensors 시스템 기술 개발연구)

  • 이형종
    • Proceedings of the Optical Society of Korea Conference
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    • 1989.02a
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    • pp.134-139
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    • 1989
  • 레이저 도플러 효과를 써서 유체 또는 작은 입자의 속도를 잴수 있는 레이저 도플러 속도측정 장치를 만들었다. 광학계는 레이저 광속을 두 갈래로 나누어 다시 마주치게 하여 두 광속이 겹치는 곳에, 평행한 삼차원 간섭무늬가 생기도록 꾸몄다. 분무기로 작은 물방울을 만들어 두 광속이 겹치는 곳을 지나게 했더니 도플러 신호를 얻을 수 있었다.

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A Study on the Portable Micro Displacement Measurement Using Laser Interferometer (레이저 간섭계를 이용한 이동형 미세 변위 측정에 관한 연구)

  • Choi, K.H.;Yang, H.C.
    • Journal of Power System Engineering
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    • v.10 no.2
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    • pp.99-103
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    • 2006
  • The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

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Sub-${\AA}$ surface roughness measurement using phase-measuring interferometer (위상측정 간섭계를 이용한 sub-${\AA}$급 표면거칠기 측정)

  • 조민식;정태호;오문수;이수상;이재철
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.176-177
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    • 2000
  • 고분해능 분광학, 레이저 주파수 안정화, 단원자 레이저, 레이저 자이로 등의 다양한 분야에서 널리 응용되는 저손실, 고반사율 반사경 제작은 고품질의 반사경 기판 사용을 전제로 하고 있다. 1$\AA$이하의 표면거칠기(surface roughness)를 요구하는 반사경 기판의 초연마(super-polishing) 기술과 저손실 반사경 박막코팅 기술은 최근 수 년 사이에 상당한 발전이 이루어졌으며, 이와 함께 초연마 반사경 기판의 표면거칠기 측정기술이 중요한 분야로 주목받고 있다. 표면거칠기 측정기법은 현재까지 여러 가지 방법이 연구, 발전되어 왔는데, 접촉식 측정방법으로 stylus 방법과 비접촉식 측정방법으로 광학 간섭계 방법, 스캔닝 전자현미경(SEM, Scanning Electron Microscopes) 등이 있다. 이들 중 광학 간섭계 방법은 표면형상을 직접 측정 가능하다는 점에서 유망한 비접촉 표면측정 기법으로 알려져 있다. (중략)

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Radiation Conductance Determination of Ultrasonic Transducer using the Laser Interferometry (레이저 간섭계를 이용한 초음파 변환기의 방사 컨덕턴스 결정)

  • 조문재
    • Proceedings of the Acoustical Society of Korea Conference
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    • 1993.06a
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    • pp.174-178
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    • 1993
  • 초음파 변환기의 방사 컨덕턴스를 결정하기 위해서는 변환기로부터 방사된 음향파워와 입력전압의 정밀측정을 요구하게 된다. 음\ulcorner파워는 초음파를 거의 완전 반사시킬 수 있는 표적을 사용하여 변환기로부터 방사된 음압에 의해 표적에 가해진 힘을 수동맞저울과 레이저 간섭계로 측정하여 구하였으며, 입력전압을 열 변환기와 전압계를 한 시스템으로 하여 정밀 측정하였다. 방사 컨덕턴스의 최대 측정오차는 $\pm$4% 이내로 평가되었다.

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The Spatial Coherence Characteristics of Wavefront of NBUR Nd:YAG Laser Output Beam (NBUR Nd:YAG 레이저 위상파면의 공간적 가간섭성 특성)

  • 박대윤;최승호;이승걸
    • Korean Journal of Optics and Photonics
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    • v.6 no.4
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    • pp.288-295
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    • 1995
  • We have studied about spatial wavefront analysis of a pulsed laser output beam by means of an imaging unstable ring resonator with an infinite Fresnel number. We have constructed a Newtonian telescope type NBUR (Negative Branch Unstable Ring) Nd:YAG laser with 4 plane mirrors. Provided that the NBUR resonator is under self imaging condition, the resonator could be reduced diffraction effects which were occuring to the beam transmitting through the circular aperture of scraper mirror in the resonator. We have observed enhancement in the spatial coherence of wavefronts of laser beam due to the iterative round trips of the self imaging beam inside the ring resonator. The information on the spatial wavefronts was determined by the fringe patterns from Mach-Zehnder interferometer and the fringe analysis by means of the Fourier transform method showed the distortion of wavefronts of less than 0.2), In comparison with a standing wave type resonator, we have confirmed that the spatial coherence of the NBUR Nd:YAG laser output beam was enhanced as much as 75%. s 75%.

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Absolute Measurement of the Refractive Index of Air Using the Heterodyne Interferometer (Heterodyne 간섭계를 이용한 공기굴절율의 절대측정)

  • 엄태봉;엄천일;정명세;양준묵
    • Korean Journal of Optics and Photonics
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    • v.7 no.1
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    • pp.37-43
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    • 1996
  • Two type interference air refractometers have been developed by using a frequency stabilized He-Ne laser in a transverse magnetic field. The refractometers were based on symmetric multiple pass interferometer. In this system, One part of the beams passed through air whose refractivity is to be measured and the other part of the beams passed through a vacuum champer to be used as a reference. Several measurements were performed under normal air condition. Maximum difference between two interference refractometers was ${\pm}2{\times}10^{-8}$.

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Design and Analysis of a Receiver-Transmitter Optical System for a Displacement-Measuring Laser Interferometer (위치변위 레이저 간섭계용 송수신 광학계의 설계 및 분석)

  • Yun, Seok-Jae;Rim, Cheon-Seog
    • Korean Journal of Optics and Photonics
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    • v.28 no.2
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    • pp.75-82
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    • 2017
  • We present a new type of receiver-transmitter optical system that can be adapted to the sensor head of a displacement-measuring interferometer. The interferometer is utilized to control positioning error and repetition accuracy of a wafer, down to the order of 1 nm, in a semiconductor manufacturing process. Currently, according to the tendency of scale-up of wafers, an interferometer is demanded to measure a wider range of displacement. To solve this technical problem, we suggest a new type of receiver-transmitter optical system consisting of a GRIN lens-Collimating lens-Afocal lens system, compared to conventional receiver-transmitter using a single collimating lens. By adapting this new technological optical structure, we can improve coupling efficiency up to about 100 times that of a single conventional collimating lens.