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http://dx.doi.org/10.3807/KJOP.2017.28.2.075

Design and Analysis of a Receiver-Transmitter Optical System for a Displacement-Measuring Laser Interferometer  

Yun, Seok-Jae (Department of Computer, Communications, and Unmanned Technology, Hannam University)
Rim, Cheon-Seog (Department of Computer, Communications, and Unmanned Technology, Hannam University)
Publication Information
Korean Journal of Optics and Photonics / v.28, no.2, 2017 , pp. 75-82 More about this Journal
Abstract
We present a new type of receiver-transmitter optical system that can be adapted to the sensor head of a displacement-measuring interferometer. The interferometer is utilized to control positioning error and repetition accuracy of a wafer, down to the order of 1 nm, in a semiconductor manufacturing process. Currently, according to the tendency of scale-up of wafers, an interferometer is demanded to measure a wider range of displacement. To solve this technical problem, we suggest a new type of receiver-transmitter optical system consisting of a GRIN lens-Collimating lens-Afocal lens system, compared to conventional receiver-transmitter using a single collimating lens. By adapting this new technological optical structure, we can improve coupling efficiency up to about 100 times that of a single conventional collimating lens.
Keywords
Receiver-Transmitter optical system; GRIN lens; Collimating lens; Afocal optical system;
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Times Cited By KSCI : 1  (Citation Analysis)
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