Browse > Article

Application of Laser Interferometry Technique to Micro/Nano-mechanical Properties Measurement  

Huh Yong-Hak (한국표준과학연구원 삶의질표준부 안전그룹)
Kim Dong-Iel (한국표준과학연구원 삶의질표준부 안전그룹)
Kim Dong-Jin (한국표준과학연구원 삶의질표준부 안전그룹)
Choi Man-Yong (한국표준과학연구원 삶의질표준부 안전그룹)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.4, 2006 , pp. 14-21 More about this Journal
Keywords
Micro-ESPI; Laser Interferometry; Micro/Nano-Mechanical Properties; Micro-Tensile Test;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Kim, DJ, Huh, Y. H. and Kee, C. D., 'Out-of-Plane Micro-ESPI System for Measurement of Mechanical Properties of Film Materials,' to be published in Key engineering Materials, 2006   DOI
2 Espinosa, H. D. and Prorok, B. C., 'A Novel Experimental Technique for Testing Thin Films and MEMS Materials,' Proc. of the SEM Annual Conf. On Exp. And Applied Mech., Portland, pp. 446-449, 2001
3 Tsuchiya, T, Tabato, O., Sakata, J. and Taga, Y., 'Specimen Size Effect on Tensile Strength of Surface micromachined Polycrystalline Silicon Thin Films,' J. Microelectromech. Syst., Vol. 7, pp. 106-113, 1998   DOI   ScienceOn
4 Sato, K., Shikida, M., Yoshoka, T., Ando, T and Kawabata, T, 'Micro Tensile Test of Silicon Film having Different Crystallographic Orientations,' Proc. Int. Conf. Solid-State Sensors and Actuators, Chicago, pp. 595-598, 1996   DOI
5 Sharpe, W. N. Jr., Yuan, B., Vaidyanathan, R., Edwards, R. L., 'New Test Structures and Techniques for Measurement of Mechanical Properties of MEMS Materials,' Proceedings of the SPlE Symposium on Microlithography and Metrology in Micromachining II, pp. 78-91,1996
6 Huh, Y. H., Kim, D. I, Yoon, K. J., Kim, K., Oh, C. S., 'Measurement of Micro-Tensile Properties using ESPI technique,' J. of the KSPE, Vol. 18, pp. 90-97, 2001   과학기술학회마을
7 Sutton, M. A., Wolters, W J., Peters, W H., Ranson, W.F., McNeil, S. R., 'Determination of Displacements Using an Improved Digital Image Correlation Method,' Image Vision Computing, Vol. 1, pp. 133-139, 1983   DOI   ScienceOn
8 Chasiotis, I. and Knauss, W.G,. 'A New Microtensile Tester for the Study of MEMS Materials with the Aid of Atomic Force Microscopy,' Experimental Mechanics, Vol. 42, pp. 51-57, 2002   DOI