• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.378-391
• /
• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
• /
• 2005.05a
• /
• pp.426-430
• /
• 2005

The fiber-optic interferometer which is a powerful application for nondestructive measurement techniques has many advantages such as capability of making portable system, easy optical arrangement, low optical loss. In spite of these advantages, this system has an environmental sensitivity of thermal drifts and vibrations. Against environmental perturbations and nonlinear characteristic of phase modulator, the accurate and fast ${\pi}/2$ phase stepping has been achieved by using zero-crossing detection. CCD camera trigger signal is generated at the 4 zero-crossing points. Our System has achieved up to 100 Hz of image capture speed and 0.6 mrad of accuracy of phase stepping, accuracy.

• Proceedings of the KIEE Conference
• /
• 2006.07d
• /
• pp.1783-1784
• /
• 2006

A laser interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano resolution and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The laser interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. The output of the laser interferometer is assumed to be the sum of a real displacement and a Markov process noise. The purpose of this paper is to develop Kalman filter algorithms to reduce the laser interferometer measurement errors by exploiting the information of displacements in position-servo systems.

• Proceedings of the KIEE Conference
• /
• 2006.10c
• /
• pp.597-599
• /
• 2006

In this paper, we propose an artificial intelligence method to compensate the nonlinearity error which occurs in the heterodyne laser interferometer. Some superior properties such as long measurement range, ultra-precise resolution and various system set-up lead the laser interferometer to be a practical displacement measurement apparatus in various industry and research area. In ultra-precise measurement such as nanometer or subnanometer scale, however, the accuracy is limited by the nonlinearity error caused by the optical parts. The feedforward neural network trained by back-propagation with a capacitive sensor as a reference signal minimizes the nonlinearity error and we demonstrate the effectiveness of our proppsed algorithm through some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.911-914
• /
• 2003

The non-contact laser measurement system what can be used for the vibration analysis of structures is discussed. There are few systems using laser speckle interferometer for vibration analysis. One of these systems is the Electronic Speckle Pattern Interferometer (ESPI). With ESPI system, one can obtain the vibration mode shape qualitatively and the maximum vibration amplitude quantitatively of the structure at each resonance frequency. In this paper, the phase-shifting ESPI system with stroboscopic illumination for measuring vibration mode shapes is constructed and the operating software is programmed. The results are compared with that of commercial ESPI system.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.13 no.6
• /
• pp.41-47
• /
• 2004

This study is aimed to measure the deflection of loaded table on machine tool. The deflection rate is measured then the table is in a stationary state and is moved. In conclusion we have found that the more load increases, the more the table deflections. Also, we have found that the deflection rate increases in accordance with the speed of movement. Therefore, we have concluded that inspection of machine tool should be done considering the weight of load and the speed of movement. However, since the condition of accuracy test for domestic brand of machine tool is defined as unloaded case, measures should be explored only for loaded case.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.10
• /
• pp.60-65
• /
• 2002

For optimal design of micro stage, we measured the displacement of piezoelectric transducer that was based on voltage value. And the micro stage was analyzed using FEM with displacement data including voltage value of piezoelectric transducer. For verification of analysis results, the displacements were measured by using Laser-interferometer. And researchers confirmed to propriety on design of micro stage with FEM, we obtained 3.5% error rate between measurement results and analyzing results.

• Proceedings of the KIEE Conference
• /
• 2006.04a
• /
• pp.234-236
• /
• 2006

Because of its long measurement range and ultra-precise resolution. the heterodyne laser interferometer systems are very common in various industry area such as semiconductor manufacturing. However the periodical nonlinearity property caused from frequency mixing is an obstacle to improve the high measurement accuracy in nanometer scale. In this paper to minimize the effect of nonlinearity, we propose an adaptive nonlinearity compensation algorithm. We first compute compensation parameters using least square (LS) with the capacitance displacement sensor as a reference input. We then update the parameters with recursive LS (RLS) while the values are optimized to modify the elliptical phase into circular one. Through comparison with some experimental results of laser system, we demonstrate the effectiveness of our proposed algorithm.

• Proceedings of the KIEE Conference
• /
• 2006.04a
• /
• pp.345-347
• /
• 2006

An interferometer is the unique measurement device that can measure the range up to a few meters with sub-nano accuracy and this characteristic makes it as the important sensing device for the emerging nano-mechatronics technologies. The interferometer, however, is very sensitive to the environments such as temperature, humidity, sound noises, vibrations and air turbulences and these factors result in a few hundred nano meter errors. There have been many efforts to reduce these environmental errors. These efforts are mainly focused in reducing the errors inside the interferometer and improving the environments physically. The purpose of this paper is to improve accuracy of the interferometer by using measurement noise models and the Kalman filter algorithm.

• Proceedings of the KIEE Conference
• /
• 2008.07a
• /
• pp.1751-1752
• /
• 2008

The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.