• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.152-152
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• 2000

차세대 평판 디스플레이로 주목박고 있는 FED는 현재 저전압 환경에서 기존의 CRT와 비슷한 해상도와 밝기를 얻지 못하고 있다. 이는 형광체 입자의 표면에 존재하는 결함, 오염, band - bonding과 같은 비발광층과 제조공정 중에 산화되거나 공기중에 노출되어 막 표면이 쉽게 오염되기 때문이다. 따라서 본 연구에서는 전기영동법으로 제작된 형광체의 효율 향상을 위해 레이저 표면 처리효과를 연구하였다. 실험에 사용한 레이저 표면처리 방법은 Nd:YAG pulse(355nm), continuous laser를 이용하였으며 레이저 power와 처리 시간을 변화시키면서 실시하였다. 형광체 막의 표면 두께 측정을 위해 Scanning Electron Microscopy(SEM), 처리된 막의 발광세기를 비교 분석하기 위해 Photoluminescence(PL), Cathodoluminescence(CL) intensity를 측정하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.10
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• pp.6925-6931
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• 2015

LED(Light Emitting Diode) is used in various filed like a display because of low power consuming, long life span, high brightness, rapid response time and environmental-friendly characteristic. General fabrication method is combination blue light LED chip with yellow fluorescent substance. Because this way is suitable for industry field in terms of convenience, economic, efficiency. In white light LED packaging process, encapsulation process that is dispensing fluorescent substance with silicon to blue light LED chip is most important. So, in this paper we develop EHD pump system using voice coil motor and electrostatic pump for dispensing fluorescent substance. For these things we conduct basic test about liquid surface profiles by voltage and process time. Through this data we decide optimal process condition and verify the optimal condition using design of experiment method. And to confirm uniformity of the condition, we conduct repeat dispensing test.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.321-323
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• 2012

유기 발광 다이오우드는(OLEDs) 자체 발광 소자로써 높은 시야각, 높은 효율, 그리고 빠른 응답속도 등의 장점을 가지고 있어 차세대 디스플레이 및 조명 소자로서 많은 연구가 진행되고 있다. 특히 유기 발광 다이오우드는 차세대 반도체 조명 소자로서 조명의 패러다임을 바꿀 수 있는 기술로 인식되고 있다. 하지만, 유기 발광 다이오우드 조명의 상용화를 위해서는 가격 경쟁력을 갖추는 것이 시급하며, 이를 위해 저가 공정 개발이 필요하다. 본 연구에서는 유기발광 다이오우드 조명 제작에 필수적인 전면 전극 및 절연막 증착 공정을 기존의 노광 공정이 아닌 shadow mask 기술을 적용하여 형성하였다. 먼저 유리 기판 상에 150 nm 두께의 ITO 막을 shadow mask를 이용하여 증착하였다. 기존 공정에서는 노광 및 식각 공정을 이용하여 증착하는 것이 일반적이며, 광학적, 전기적 특성 또한 타 공정 방법에 비해 우수하다. 하지만 일련의 복잡한 공정으로 인해 제조 원가를 상승 시키는 단점이 있다. Fig. 1은 shadow mask를 이용하여 ITO를 증착을 수행한 공정의 모식도이다. ITO 박막 증착 후 표면 거칠기 제어 및 면저항 제어를 위해 O2 plasma 처리와 RTA 공정을 추가 수행하였다. Fig. 2(a)는 플라즈마 처리 및 열처리 공정 수행 후에 측정한 표면 AFM 사진이다. 열처리 및 플라즈마 처리 후에 ITO 박막의 표면 거칠기는 10배 이상 향상되었으며, 이는 유기 발광 다이오우드 조명 소자의 전면 투명 전극으로 사용되기에 적합한 값이다. 또한 전기적 특성 중 하나인 면저항 값은 열처리 및 플라즈마 처리 전/후의 값에서 많은 차이를 보인다. 표면 거칠기가 향상됨에 따라 면저항 값 역시 향상되는 결과를 보여주는데, 표면 처리전후의 면저항 값은 각각 28.17, 13.18 ${\Omega}/{\Box}$이다. 일반적으로 유기 발광 다이오우드의 전면 투명 전극으로 사용되기 위해서는 15 ${\Omega}/{\Box}$이하의 면저항 값이 필요한데, 표면 처리 후의 면저항값들은 이로한 조건을 만족한다. Fig. 3은 shadow mask 기술을 이용하여 절연막까지 형성한 유기 발광 다이오우드 소자의 전자 현미경 사진으로, 기존의 공정을 이용한 경우와 큰 차이는 없으며, 다만 shadow tail이 약 $30{\mu}m$ 정도 발생함을 확인할 수 있다. 절연막의 특성 평가 기준인 누설 전류 밀도는 $10-5A/cm^2$으로 기존의 공정을 이용한 경우에 비해 95% 수준으로서 shadow mask를 이용한 공정이 기존의 노광 및 식각 공정을 이용한 경우에 비해 공정 수는 9개가 단축됨에도 불구하고, 각 증착 박막의 특성에는 큰 차이가 없음을 알 수 있다.

• The Journal of the Korea Contents Association
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• v.8 no.11
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• pp.18-24
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• 2008

An organic light-emitting diode(OLED) has advantages of low power driving, self light-emitting, wide viewing angle, excellent high resolution, full color, high reproduction, fast response speed, simple manufacturing process, or the like. However, there are still a number of challenges to get over in order to put it to practical use as a high performance display. First of all, the most important thing is to improve the efficiency of the OLED element in order to commercialize it. To this end, its efficiency can be improved by lowering the driving voltage through the improvement of structure of the OLED element and the application of new organic substance. Therefore, in this study, we have manufactured a red OLED element by applying fluorescent dyes to the emitting layer of the element having the structure of ITO/TPD/ Znq2+DCJTB /Znq2/Al and the structure of ITO/CuPc/NPB/ Alq3+DCJTB/Alq3/Al, in order to light-emitting various colors or improve the brightness and the efficiency, and then we have evaluated its electrical and optical characteristics.

• Applied Chemistry for Engineering
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• v.10 no.8
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• pp.1114-1118
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• 1999

Barrier rib for the plasma display panel(PDP) was made by photolithographic process utilizing photosensitive barrier rib paste. The barrier rib paste was prepared by first dissolving ethylcellulose(binder polymer) in butyl carbitol(BC)/butyl carbitol acetate(BCA) =30/70 wt % mixture solvent at 15 wt % concentration. To this solution a mixture of functional monomers consisted of tripropyleneglycol diacrylate/ pentaerythritol triacrylate = 50/50 wt %, Irgacur 651 photoinitiator, and barrier rib powder were added and then the whole mixture was mixed in the three roll mill for 2 hr. The effect of component and concentration of photosensitive barrier paste on the photolithographic process was studied. After optimization of the paste formulation and photolithographic process, barrier rib could be obtained with good resolution up to $100{\mu}m$ height.

• Proceedings of the Korea Contents Association Conference
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• 2008.05a
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• pp.301-305
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• 2008

An organic light-emitting diode(OLED) has advantages of low power driving, self light-emitting, wide viewing angle, excellent high resolution, full color, high reproduction, fast response speed, simple manufacturing process, or the like. However, there are still a number of challenges to get over in order to put it to practical use as a high performance display. First of all, the most important thing is to improve the efficiency of the OLED element in order to commercialize it. To this end, its efficiency can be improved by lowering the driving voltage through the improvement of structure of the OLED element and the application of new organic substance. Therefore, in this study, we have manufactured a red OLED element by applying fluorescent dyes to the emitting layer of the element having the structure of ITO/TPD/Znq2+DCJTB/Znq2/Al and the structure of ITO/CuPc/NPB/Alq3+DCJTB/Alq3/Al, in order to light-emitting various colors or improve the brightness and the efficiency, and then we have evaluated its electrical and optical characteristics.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.22 no.2
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• pp.134-138
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• 2021

Various types of precision plastic thin films are used widely in high-performance displays, such as smartphones. For plastic thin-films manufactured by the Roll-to-Roll process, the film thickness must be measured and managed while moving. In the Roll-to-Roll process, wrinkles are generated when tension is applied to the film, which causes an inclination on the optical axis of the thickness gauge, resulting in a loss of accuracy. Therefore, this study attempted to develop an optical interference tomography measurement system. In this study, the tilt angle of the film was measured to correct the measurement value error in the thickness gauge caused by the tilt of the film. The system was constructed so that the laser was irradiated on the tilted film, and the laser reflected from the film was formed on the PSD. The relationship between the tilt angle of the film and the output value of the PSD was obtained experimentally. Using this, a device to measure the tilt angle of the film was constructed, and angle measurements were taken at a speed of 250,000Hz.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.10-17
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• 2018

POU (point of use) scrubbers were applied for the treatment of waste gases including PFCs (perfluorocompounds) exhausted from the CVD (chemical vapor deposition), etching, and cleaning processes of semiconductor and display manufacturing plant. The GWP (global warming potential) and atmosphere lifetime of PFCs are known to be a few thousands higher than that of $CO_2$, and extremely high temperature more than 3,000 K is required to thermally decompose PFCs. Therefore, POU gas scrubbers based on the thermal plasma technology were developed for the effective control of PFCs and industrial application of the technology. The thermal plasma technology encompasses the generation of powerful plasma via the optimization of the plasma torch, a highly stable power supply, and the matching technique between two components. In addition, the effective mixture of the high temperature plasma and waste gases was also necessary for the highly efficient abatement of PFCs. The purpose of this paper was to provide not only a useful technical information of the post-treatment process for the waste gas scrubbing but also a short perspective on R&D of POU plasma gas scrubbers.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.28 no.6
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• pp.263-270
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• 2018

Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of $10^8-10^{10}$ ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.27 no.2
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• pp.75-79
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• 2017

Honeycomb-shaped Ag-grid transparent conductive electrodes (TCEs) were fabricated using two different processes, high density plasma etching and lift-off, and the optical and electrical properties were compared according to the fabrication method. For the fabrication of the Ag-grid TCEs by plasma etching, etch characteristics of the Ag thin film in $10CF_4/5Ar$ inductively coupled plasma (ICP) discharges were studied. The Ag etch rate increased as the power increased at relatively low ICP source power or rf chuck power conditions, and then decreased at higher powers due to either decrease in $Ar^+$ ion energy or $Ar^+$ ion-assisted removal of the reactive F radicals. The Ag-grid TCEs fabricated by the $10CF_4/5Ar$ ICP etching process showed better grid pattern transfer efficiency without any distortion or breakage in the grid pattern and higher optical transmittance values of average 83.3 % (pixel size $30{\mu}m/line$ width $5{\mu}m$) and 71 % (pixel size $26{\mu}m/line$ width $8{\mu}m$) in the visible range of spectrum, respectively. On the other hand, the Ag-grid TCEs fabricated by the lift-off process showed lower sheet resistance values of $2.163{\Omega}/{\square}$ (pixel size $26{\mu}m/line$ width $18{\mu}m$) and $4.932{\Omega}/{\square}$ (pixel size $30{\mu}m/line$ width $5{\mu}m$), respectively.