• Title/Summary/Keyword: 두께비

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Metal 첨가물질에 따른 비정질 IGZO 투명전극 특성 연구

  • Sin, Han-Jae;Hwang, Do-Yeon;Lee, Jeong-Hwan;Lee, Dong-Ik;Park, Seong-Eun;Park, Jae-Seong;Kim, Seong-Jin;Lee, Yeong-Ju;Seo, Chang-Taek
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.368-370
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    • 2013
  • 투명 전극은 전기전도도를 갖는 동시에 가시광선을 투과하는 소재를 말하며, 구체적으로는 빛의 파장이 400~700 nm 영역대의 가시광선을 80% 이상 투과하며 전기전도도가 비저항으로 $10^{-3}{\Omega}cm$이하이거나 면저항이 $10^3{\Omega}$/${\Box}$소재를 의미한다. 투명 전극은 전기전도도에 따라 사용되는 용도가 다양하다. LCD, PDP, OLED 와 같은 평판디스플레이 및 3D 디스플레이의 투명전극으로 사용되는 핵심재료일 뿐만 아니라 터치스크린, 투명필름, 대전방지막, 열반사막, EMI 방지막, 태양전지 분야에 광범위하게 이용되고 있다. 일반적으로, 투명전극 박막에 가장 많이 사용되고 있는 소재는 ITO (indium tin oxide)이나, 주성분인 In의 사용량 증가로 상용 ITO 타겟 가격이 급등하고 있음으며, 고가의 ITO 타겟을 대체하기 위한 저가의 투명전극 소재 개발이 절대적으로 요구되며, 신규 소재 개발을 통한 기술력 우위 선점이 필수적으로 요구되는 상황이다. 본 연구에서는 기존에 디스플레이 분야에서 널리 활용되는 고가의 ITO를 대체하기 위한 다성분 금속산화물 투명전극 스퍼터링 타겟 제조기술을 개발하기 위한 연구로서, Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재를 조성설계, 고밀도 균질 타겟 제조 및 투명전극 박막을 형성하는 연구를 실시하였다. 고체산화물 산화인듐(In2O3)분말, 산화갈륨(Ga2O3) 분말그리고 산화아연(ZnO)분말과 Metal을 몰비로 칭량한 후 분말을 폴리에틸렌제 포트에 넣고 에탄올을 충분히 채운 후 지르코니아(ZrO2) 볼(ball)을 이용하여 24 h 동안 볼 밀링(ball milling) 방법으로 혼합한 뒤, $120^{\circ}C$의 플레이트위에서 마그네틱 바로 stirring하면서 건조하였다. 이 분말을 건조기에서 완전히 건조한 후 알루미나 유발을 이용해서 pulverizing한 후 sieving기를 이용하여 분말의 조립화를 하였다. 이 분말을 금형에 넣고 300 kg/$cm^2$의 압력으로 press하여 성형한 뒤 대기중에서 소결하였다 소결을 위한 승온 온도는 $10^{\circ}C$/min이었고 소결은 $1,450^{\circ}C$에서 6 h 동안 하였다. IGZO target의 조성 비율은 1:1:12 (mol%)를 사용하였으며, 첨가한 Metal은 Boron (B), Germanium (Ge), Barium (Ba)을 사용하여 타겟을 제작하였다. M-IGZO 박막은RF magnetron Sputter를 이용하여 증착하였으며, 앞선 실험에서 제작한 타겟을 사용하여 M-IGZO박막을 투명전극으로 사용하기 위한 각각의 특성을 파악하였다. 모든 박막은 상온에서 증착을 하였으며, 증착된 박막두께를 측정하기 위해 ${\alpha}$-step IQ를 사용하였고, 광학적 특성을 분석하기 위해 UV-Visible spectrophotometer 로 투과율을 측정하였다. 그리고 전기적 특성을 측정하기 위해 Hall effect measurement 및 4-probe를 사용하였으며, 결정성 분석을 위하여 XRD를 이용하여 분석하였다. 표1은 M-IGZO타겟을 사용하여 증착시간에 따른 면저항 특성을 나타내었다. Ge, B, Ba이 첨가된 IGZO 박막은 증착시간이 증가할수록 면저항이 낮아짐을 알 수 있었다. 또한, Ge이 첨가된 IGZO 박막이 다른 금속이 첨가된 IGZO 박막의 면저항보다 현저히 낮음을 알 수 있었다. Fig. 1(a), (b), (c)는 각 타겟을 동일한 조건으로 증착을 하여 광학적특성을 나타내는 그래프이다. GZO 박막의 광학적 특성을 보면 가시광 영역에서 평균 투과율은 모두 80% 이상으로 우수한 광투과 특성을 보여 투명전자소자로 사용가능하다. 특히, 자외선 영역을 모두 차단하는 UV cut 능력이 우수함을 알 수 있었다. 따라서, 금속이 첨가된 IGZO 박막을 태양전지용 투명전극으로 사용할 경우, 자외선에 의하여 수명이 단축되는 현상을 줄여줄 수 있음을 기대할 수 있으며 내구성 향상에 크게 기여할 것으로 보인다. Fig. 2는 Ge=0, 0.5, 5%인 IGZO 투명전극을 총 40회 반복하여 증착을 실시한 후 각각의 면저항을 측정한 결과이다. 실험결과에 따르면 Ge가 0%, 5%인 IGZO 투명전극은 증착을 거듭할수록 면저항이 증가하는 결과를 나타내었으며, 0.5%인 IGZO 투명전극은 점차 안정화되어가는 결과를 나타내었다. 따라서 안정화 되었을 때 평균 면저항은 26ohm/sq.로 나타났으며, 광투과율은 Fig. 3과 같이 가시광영역에서 평균 80%이상의 결과를 보였으며, 550 nm에서는 86.36%의 우수한 특성을 나타내었다. 본 연구에서는 Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재 target을 제작하여 RF magnetron sputter로 박막을 형성한 후 특성을 비교하였다. M-IGZO target 중 Ge (0.5%)을 첨가한 IGZO 타겟을 사용한 투명전극이 가장 우수한 특성을 보였으며, 제작된 M-target의 In 비율이 30% 정도로 기존의 ITO (90%) 대비하여 투명전극 제작 단가를 절감할 수 있다.

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Anti-Inflammatory Effect of Chondrus ocellatus Holmes Ethanol Extract on Lipopolysaccharide-induced Inflammatory Responses in RAW 264.7 Cells (Lipopolysaccharide로 유도된 RAW 264.7 세포와 마우스모델에 대한 진두발 에탄올 추출물의 항염증 효과)

  • Bae, Nan-Young;Kim, Min-Ji;Kim, Koth-Bong-Woo-Ri;Park, Ji-Hye;Park, Sun-Hee;Sung, Nak-Yun;Byun, Eui-Hong;Ahn, Dong-Hyun
    • Microbiology and Biotechnology Letters
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    • v.44 no.3
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    • pp.268-277
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    • 2016
  • This study aimed to investigate the anti-inflammatory effect of the ethanol extract from Chondrus ocellatus Holmes (COHEE) in RAW 264.7 cells and in a mouse ear edema model, by measuring the production of lipopolysaccharide-induced inflammatory response mediators. There were no cytotoxic effects on the proliferation of macrophages treated with COHEE compared with the control. COHEE inhibited the production of nitric oxide and pro-inflammatory cytokines [interleukin (IL)-6, tumor necrosis factor-α, and IL-1β]. The extract also reduced the expression of inducible nitric oxide synthase, cyclooxygenase-2, nuclear factor-κB p65, and phosphorylated mitogen-activated protein kinase in a dose-dependent manner. In the croton-oil-induced ear edema model, COHEE decreased the formation of mouse ear edema at the highest dose compared with the control, and histological analysis revealed that the epidermal/dermal tissue thickness and mast cell numbers were reduced. Therefore, these results suggest that COHEE may be a promising topical anti-inflammatory therapeutic material through its action of modulating NF-κB and the MAPK signaling pathway.

Anti-inflammatory Effect of Sargassum coreanum Ethanolic Extract through Suppression of NF-κB Pathway in LPS Induced RAW264.7 Cells in Mice (LPS로 유도된 RAW 264.7 cell로부터 NF-κB 조절 억제와 마우스 모델을 통한 큰잎모자반 에탄올 추출물의 항염증 효과)

  • Kang, Bo-Kyeong;Kim, Koth-Bong-Woo-Ri;Kim, Min-Ji;Bark, Si-Woo;Pak, Won-Min;Ahn, Na-Kyung;Choi, Yeon-Uk;Bae, Nan-Young;Park, Ji-Hye;Ahn, Dong-Hyun
    • Microbiology and Biotechnology Letters
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    • v.43 no.2
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    • pp.112-119
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    • 2015
  • The anti-inflammatory effect of Sargassum coreanum ethanolic extract (SCEE) was investigated using lipopolysaccharide (LPS)-induced inflammatory responses in this study. It was shown that there was no cytotoxicity in the viability of macrophages treated with SCEE when compared to the control. The production of NO was considerably suppressed by SCEE, approximately up to 50% at 100 μg/ml. This significantly decreased levels of IL-6, TNF-α, and IL-1β. In addition, the expression of iNOS, COX-2, NF-κB was suppressed by SCEE treatment. In in vivo testing, the croton oil-induced mouse ear edema was attenuated by SCEE and there were no mortalities in mice administered with 5000 mg/kg body weight of SCEE over a 2 week observation period. From these results, SCEE inhibits the release of LPS-induced pro-inflammatory cytokines and mediators, suggesting that SCEE could be a potential agent for anti-inflammatory therapies.

Efficiency Evaluation of CT Simulator QA Phantom (전산화 단층촬영 모의치료기 정도관리 팬텀의 유용성 평가)

  • Hwang, Se-Ha;Min, Je-Sun;Lee, Jae-Hee;Park, Heung-Deuk
    • The Journal of Korean Society for Radiation Therapy
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    • v.21 no.2
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    • pp.89-95
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    • 2009
  • Purpose: The purpose is to evaluate efficiency of the CT simulator QA phantom manufactured for daily QA. Materials and Methods: We made holes ($1{\times}100{\times}1\;mm$) to verify accuracy between image and real measurement in polystyrene phantom and made 1 mm holes to verify table movement accuracy at superior and inferior 100 mm to the center of the phantom and inserted radiopacity material. To evaluate laser alignment, we made cross mark on the right and left side at phantom and to evaluate CT number accuracy we made 3 cylindrical holes and inserted equivalence material of bone, water, air in them. After CT scanning the phantom, We evaluated accuracy between image and real measurement, accuracy of table movement, laser, and CT number using exposed image. Results: It was measured that the accuracy between image and real measurement was ${\pm}0.3\;mm$, table movement accuracy was ${\pm}0.3\;mm$, laser accuracy was ${\pm}0.5\;mm$ from 7th January to 7th March in 2008 as within the reference point ${\pm}1\;mm$. In the CT number accuracy of bone was ${\pm}10\;HU$, air was ${\pm}5\;HU$, water was ${\pm}5\;HU$ as within the reference point is ${\pm}10\;HU$. Conclusion: We was able to perform CT simulator QA and laser equipment QA more conveniently and fast using manufactured phantom at the same time. We will be able to make more accurate treatment plan that added to QA procedures using images at previous daily QA.

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Growth, Body shape and Carcass cutting yield traits of Duroc and Crossbred(Duroc×Pietrain×Pietrain)pigs (두록과 교잡돈(두록×피어트레인×피어트레인)의 성장, 체형형질 및 도체 부분육 생산량 비교)

  • Kim, Young Sin;Kim, JeongA;Jeong, Yong Dae;Choi, Yo Han;Cho, Eun Seok;Chung, Hak Jae;Sa, Soo Jin;Beak, Sun Young;Hong, Joon Ki
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.7
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    • pp.255-261
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    • 2020
  • This study was undertaken to evaluate the growth, body shape and carcass cutting yield traits of Duroc (D) and crossbred (Duroc×Pietrain×Pietrain; DPP) pigs. A total of 147 D and 101 DPP pigs were used for analyzing the growth trait, whereas 16 D and 16 DPP pigs were evaluated for carcass yields. Backfat thickness (BF) and average daily feed intake (ADFI) were significantly higher in D (14.07±0.24 mm, 2,101 g) than in DPP (12.69±3.25 mm, 1,909 g) (p <0.001). Moreover, D exhibited significantly higher body shape traits including body height (BH), chest depth (CD) and chest width (CW), as compared to DPP pigs (p <0.001). No differences were observed for body length (BL) between the two strains. Analysis of the carcass cutting yield traits determined for D and DPP were in the order: ham (HM; 31.17% and 33.43%), belly (BY; 23.40% and 19.55%), and picnic shoulder (PS; 16.54% and 16.87%), respectively. Then, HM showed a difference of 2.26% P with D(31.17%) and DPP(33.43%), while BY showed a difference of 3.85% P with D(23.40%) and DPP(19.55%). Taken together, our results indicate that DPP has a better feed efficiency than D, and therefore has the potential to increase the production of low-fat pork, targeting consumers having a high preference who have opted for a healthy lifestyle. These results can be used as basic data for developing an ideal pig breed.

The Effects of the Fermentation Broth of Fruits and Vegetables on Antimicrobial Activity and Egg Quality with its Supplementation in Feed (과채발효액의 항균 및 탈취력 효과와 사료 첨가시 계란 품질에 미치는 영향)

  • So, Kwang-Seob;Park, Young-Ho;Joung, II-Yong;Ko, Byoung-Seob;Hong, Sang-Mee;Park, Sun-Min
    • Journal of Applied Biological Chemistry
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    • v.52 no.2
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    • pp.77-83
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    • 2009
  • This study was conducted to investigate the effect of the fermentation broth of fruits and vegetables and various kinds of lactobacillus containing in the broth on anti-microbial activity, anti-acidity, its organic acid concentrations and deorderization. In addition, the quality of eggs laid from the hens supplemented with the fermentation broth was determined. The fermentation broth contained over 8 kinds of lactobacillus and other microbes. Lactobacillus (L.) hilgardii, L. reuteri, L. nagelii, L. plantarum, and Zygosaccharomyces bisporus were survived especially in pH 2.0 among them. The concentrations of acetic acid and lactic acid in the broth were higher than minimum inhibitory concentration values (MIC) to Escherichia (E.) coli and Salmonella sp. Overall the broth contained sufficient organic acid to inhibit the growth of E. coli and Salmonella sp. In addition, L. nagelii and L. plantarum had the greatest anti-microbial activity against E. coli, Salmonella (S.) typhimurium, Staphylococcus aureus and S. gallinarium among lactobacillus in the broth. The broth had greater anti-microbial activity than individual lactobacillus. The fermentation broth had deodorization capacity of ammonia and hydrogen sulfate and the 50% of their concentrations were removed after 30 min treatment. Egg production rates, egg weight, and feed efficiency were increased in eggs laid from hens that supplemented with 0.1 % fermented broth compared to the control. The supplementation also increased the thickness and strength of egg shell to reduce broken eggs and decreased cholesterol levels in egg yolk. In conclusion, the fermentation broth of fruits and vegetables can be a natural alternative supplementation of feed in laying hens.

Effect of Activated Carbon, Orpar or Zeolite on Leaching Loss of Fenitrothion, Triadimefon and Diniconazole in Model Green of Golf Course (골프장 모형그린에서 활성탄, Orpar또는 Zeolite의 처리가 Fenitrothion, Triadimefon, Diniconazole의 용탈에 미치는 영향)

  • Oh, Sang-Sil;Koh, Yong-Ku;Chung, Jong-Bae;Hyun, Hae-Nam
    • Applied Biological Chemistry
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    • v.44 no.2
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    • pp.97-102
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    • 2001
  • Cheju island depends on a hydrogeologically vulnerable aquifer system as its principle source of drinking water. Most of golf courses are located in the area which is important for the ground water recharge, and pesticides are applied to golf courses often at relatively high rates. Therefore, turf pesticides in golf course should be applied without adversely impacting ground water. In this experiment, downward movement of pesticides was monitored in model greens of golf course, where different adsorbents were layered in 3-cm thickness at 35-cm depth, and effect of the adsorption layer on the leaching loss of pesticides was investigated. Major leachings were observed in the periods of heavy rain and very limited leaching was observed under artificial irrigation. Fenitrothion and triadimefon, which have relatively short persistence and high adsorption coefficient, were found in the leachate in low concentrations only at the first rainfall event, around 20 days after the pesticide application. However, diniconazole, which has a relatively long half-life (97 days), was detected in the leachate during the whole period of experiment and concentration was much higher than those of the other pesticides. Maximum leachate concentrations were 1.9, 10.3, and 84.5 ${\mu}l^{-1}$ for fenitrothion, triadimefon, and diniconazole, respectively. Therefore, in golf course green which allows rapid water percolation and has extremely low adsorption capacity, persistence in soil could be more important factor in determination of leaching potential of pesticides. Total quantity of pesticides leached from the model green was <0.2% for fenitrothion and triadimefon and 1.8% for diniconazole. Adsorption layers significantly reduced pesticide leaching, and active carbon and Orpar were more effective than zeolite. In the model green having adsorption layer of active carbon or Orpar, leaching loss of pesticides was reduced below 0.01% of the initial application.

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Radiotherapic Valuation of Paraffin Wax for Patients with Oral Cancer (구강암 환자 치료시 치과용 기초상 왁스(Paraffin Wax)의 유용성 평가)

  • Na, Kyoung-Su;Seo, Seuk-Jin;Lee, Je-Hee;Yoo, Sook-Heun
    • The Journal of Korean Society for Radiation Therapy
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    • v.23 no.1
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    • pp.41-49
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    • 2011
  • Purpose: This study is designed to investigate radiotherapic valuation of Paraffin Wax, which is newly formed for this study and generally utilized in dentistry, and Mouth Piece and Putty impression, which are commonly used in radiotherapy, for oral cavity as a compensator. Materials and Methods: Each compensator was formed by $10{\times}10{\times}1cm$ and measured radiation dose attenuation ratio with reference of water phantom which is made of tissue-equivalent materials. Two patients with oral cancer underwent DRR (Digitally Reconstructed Radiogrph) of Offline Review Program of Aria System and Portal vision for 5 times for each material to evaluate reproducibility by each filling materials. Moreover, MU (monitor unit) changes by dose absorption were considered in the case of inevitable implication of an filling materials in the range for radiotherapy. Results: Radiation dose attenuation ratios were shown -0.7~+3.7% for Mouth Piece, +0.21~+0.39% for Paraffin Wax and -2.71~-1.76% for Putty impression. Error ranges of reproducibility of positions were measured ${\pm}3mm$ for Mouth Piece, ${\pm}2mm$ for Paraffin Wax and ${\pm}2mm$ mm for Putty impression. Difference of prescription MU from dose absorption with an filling material increased +7.8% (250 MU) in Putty impression and -0.9% (230 MU) in Paraffin Wax as converted into a percentage from the standard phantom, Water 232 MU. Conclusion: Dose reduction of boundary between cavity and tissue was observed for Mouth Piece. Mouth Piece also had low reproducibility of positions as it had no reflection of anatomy of oral cavity even though it was a proper material to separate Maxilla and Mandible during therapy. On the other hand, Putty impression was a suitable material to correctly re-position oral cavity as before. However, it risked normal tissues getting unnecessary over irradiation and it caused radiation dose decrease by -2.5% for 1cm volume in comparison of it of water phantom. Dose reduction in Paraffin Wax, Fat Tissue-Equivalent Material, was smaller than other impressions and position reproducibility of it was remarkable as it was possible to make an anatomy reflected impression. It was also well fitted to oral cavity to transfer radiation dose planned in radiotherapy. Thus, Paraffin Wax will be an ideal material in radiotherapy for patients with oral cancer.

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Golf activity after total knee arthroplasty (슬관절 전치환술 후 골프활동)

  • Kim, Hyung-Jun;Cha, Seung-Han;Nam, Kyoung-Mo;Kim, Dong-Heon
    • Journal of Korean Orthopaedic Sports Medicine
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    • v.11 no.1
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    • pp.51-56
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    • 2012
  • Purpose: Golf is a popular sports activity after total knee arthroplasty in old age patients. We evaluated golf and implant loosening through the radiologic method. We also evaluated correlation of patterns of golf activity and clinical outcome to suggest guidelines to the patients. Materials and Methods: We carried out a retrospective case-control study of 80 patients (80 knees) who underwent TKR between 2005 and 2008, and followed up more than 3 years. We divided patients who played golf after TKR as a study group and who did not participate sports activities as a control group. We calculated the sum of width of radiolucent line in 7 sections around femoral component, 7 sections around tibial components and 5 sections in patella component using American Knee Society Roentgenographic Evaluation and Scoring system respectively. The inclusion criteria, was BMI (body mass index) was between 25 and $30kg/m^2$, and UCLA activity-level rating System score was between 5 and 8. We also got the information of patients' patterns of golf activities such as 1. the interval from surgery to return to golf activity. 2. the frequency of golf activities 3. using spike or cart. We obtained the information from patient's questionnaire and telephone interview. We compared with the VAS (visual analogue scale) respectively. And handicaps and driving distance was evaluated as well. Results: The study group's mean sum of radiologic score was 0.84 mm and 0.69 mm in control group. This is not statistically significant (p=0.22). Too early returning to golf (p=0.01) and left knee replacement (p<0.01) were statistically significant factors affecting clinical outcomes of golf activities after total knee arthroplasty. Conclusion: We concluded that golf activities after total knee arthroplasty is not correlated with radiographic loosening, and we need to give an explanation to the patients about increased pain when returing to golf too early and left side arthroplasties.

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A Study on the Necessary Number of Bolus Treatments in Radiotherapy after Modified Radical Mastectomy (변형 근치적 유방절제술 후 방사선치료에서 볼루스 적용횟수에 대한 고찰)

  • Hong, Chae-Seon;Kim, Jong-Sik;Kim, Young-Kon;Park, Young-Hwan
    • The Journal of Korean Society for Radiation Therapy
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    • v.18 no.2
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    • pp.113-117
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    • 2006
  • Purpose: Post-mastectomy radiotherapy (PMR) is known to decrease loco-regional recurrence. Adequate skin and dermal dose are achieved by adding bolus. The more difficult clinical issue is determining the necessary number of bolus treatment, given the limits of normal skin tolerance. The aim of this study is to evaluate the necessary number of bolus treatment after PMR in patients with breast cancer. Materials and Methods: Four female breast cancer patients were included in the study. The median age was 53 years(range, $38{\sim}74$), tumor were left sided in 2 patients and right sided in 2patients. All patients were treated with postoperative radiotherapy after MRM. Radiotherapy was delivered to the chest wall (C.W) and supraclavicular lymph nodes (SCL) using 4 MV X-ray. The total dose was 50 Gy, in 2 Gy fractions (with 5 times a week). CT was peformed for treatment planning, treatment planning was peformed using $ADAC-Pinnacles^3$ (Phillips, USA) for all patients without and with bolus. Bolus treatment plans were generated using image tool (0.5 cm of thickness and 6 cm of width). Dose distribution was analyzed and the increased skin dose rate in the build-up region was computed and the skin dose using TLD-100 chips (Harshaw, USA) was measured. Results: No significant difference was found in dose distribution without and with bolus; C.W coverage was $95{\sim}100%$ of the prescribed dose in both. But, there was remarkable difference in the skin dose to the scar. The skin dose to the scar without and with bolus were $100{\sim}105%\;and\;50{\sim}75%$. The increased skin dose rates in the build-up region for Pt. 1, Pt. 2. Pt. 3 and Pt. 4 were 23.3%, 35.6%, 34.9%, and 41.7%. The results of measured skin dose using TLD-100 chips in the cases without and with bolus were 209.3 cGy and 161.1 cGy, 200 cGy and 150.2 cGy, 211.4 cGy and 160.5 cGy, 198.6 cGy and 155.5 cGy for Pt. 1, Pt. 2, Pt. 3, and Pt. 4. Conclusion: It was concludes through this analysis that the adequate number of bolus treatments is 50-60% of the treatment program. Further, clinical trial is needed to evaluate the benefit and toxicity associated with the use of bolus in PMR.

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