• Title/Summary/Keyword: 누출검출기

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Development of Comparative Calibration System for Helium Leak Standard by Using Mass Spectrometer Type Leak Detector (질량분석기형 누출검출기를 이용한 헬륨투과형 표준 누출 비교 교정 장치 개발)

  • Hong, Seung-Soo;Lim, In-Tae;Kim, Jin-Tae;Shin, Yong-Hyeon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.2
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    • pp.151-156
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    • 2008
  • Many kinds of mass spectrometer type leak detectors have been widely used for detecting leak of vacuum processes in semiconductor and display industries etc. The leak detectors should be often calibrated by the permeation type standard leak in order to ensure accurate and reproducible leak measurement. We have developed a comparative calibration system for permeation type standard leak by using mass spectrometer type leak detector and specification of the calibration method. Following this technique the reliable calibration for leak standard ran be performed even in fields.

Introduction to HELIUM Mass Spectrometry(I) (헬륨 질량 분석법 소개 (I))

  • 주승환
    • Journal of the Korean Professional Engineers Association
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    • v.31 no.1
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    • pp.17-28
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    • 1998
  • 누설 검출기들 중에서 검출 감도가 가장 민감한 것은 '헬륨 양이온 질량 분석계 누설 검출기(줄인 이름, '헬륨 누설검출기')'이다. 이 글은 헬륨 누설 검출기의 주요 부분을 이루고 있는 질량 분석계의 측정 원리를 요약하여 소개한 것이다. 누설 검사의 항목들은 검사의 필요에 따라 대개 시험 물체에서 누설의 크기와 시험 방법을 바탕으로 하여 대규모 누설, 총량 누설, 소규모 누설 그리고 미세 누설 등으로 나뉘어지며, 미세 누설들은 누설 검출기의 최소 검출 가능 누출률이 $10^{-8}$ std ㎤ s$^{-1}$ 보다 작은 범위에 있는 것들로서, 그들의 누설 시험은 헬륨 누설 검출기를 써서 하게 된다. 따라서, 헬륨 누설 검출기의 심장은 바로 질량 분석계이며, 질량 분석계의 원리를 이해하는 것은 곧, 헬륨 누설 검출기를 다루는 기술의 바탕을 다지는 것이라고 말할 수 있을 것이다. 여기서는 헬륨 질량 분석계의 원리를 쉽게 풀이하고, 그런 검출기를 써서 누설검사를 하는 데 바탕이 될 모습들을 함께 요약한다.약한다.

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Controller for Gas Leakage Protection in Semiconductor Process Chamber (반도체 제조장비용 챔버 가스누출 방지를 위한 제어모듈 개발)

  • Park Sung-Jin;Lee Eui-Yong;Sul Yong-Tae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.5
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    • pp.373-377
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    • 2005
  • In this paper the gas leakage controller in processing chamber for semiconductor manufacturing is proposed. A pressure sensor is connected between the final valve and the numeric valve. A pressure sensor signal and a numeric valve signal are controlled by a proposed digital circuit module. Gas leakage condition, producing by 2nd plasticity in semiconductor process, display at LED. The proposed controller module is useful for monitoring the gas flow for preventing the critical process gas leakage.

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Thruster Fault Detection of the Launch Vehicle Upper Stage Attitude Control System (발사체 상단 자세제어 시스템의 추력기 고장 검출)

  • Lee, Soo-Jin;Kwon, Hyuk-Hoon;Hwang, Tae-Won;Tahk, Min-Jea
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.32 no.9
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    • pp.72-79
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    • 2004
  • A method for thruster fault diagnosis for launch vehicle upper stage was developed. In order to protect the launch vehicle against the occurrence of faults, it is necessary to detect and identify the fault, as well as to reconfigure the controller of the vehicle. Considering the upper stage launch vehicle using reaction control system, an analytical method was adopted in order to detect the fault occurred in thruster. The fault detection scheme can be applied to the system regardless of the form of thruster fault occurred - leakage or lock-out. Results from processor-in-the-loop simulation are provided to demonstrate the validity of this fault detection and isolation scheme for the upper stage launch vehicle.

Implementation of Sensor Controller and Monitering System Using Film Type (필름형 센서를 이용한 센서 제어기 및 모니터링 시스템 구현)

  • Park, No-Jin;Lee, Ho-Woong;Yu, Hong-Kyeun
    • The Journal of The Korea Institute of Intelligent Transport Systems
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    • v.12 no.1
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    • pp.51-57
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    • 2013
  • Leak detection, the system is controlled by humanity's precious water resources, prepare for natural disasters and prevent damage to buildings and various industrial facilities. Especially because it causes serious environmental pollution, chemicals or oil spills, leak detection of various liquid(oil, water), the point at which the liquid leak is detected early on, and minimize environmental pollution, prevent damage of the equipment due to the leak, and the country's precious water resources to be used safely. In this paper, we solve these problems by using specialized film sensor, any person who is not a skilled technician, equipment or walls anywhere can be easily installed. also reduce unnecessary circuit, If film sensor is connected to operate, have a big competitive price, the detection of liquid and the surrounding environment according to, the sensor film that can set the sensitivity control, and monitoring system was implemented.

Microfluidic Array for Simultaneous Detection of Antigen-antibody Bindings (항원-항체 결합의 동시 검출을 위한 미세 유체 어레이)

  • Bae, Young-Min
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.48 no.4
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    • pp.102-107
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    • 2011
  • In this paper, a microfluidic array biochip for simultaneously detecting multiple antigen-antibody bindings was designed and implemented. The biochip has the single channel in which microreaction chambers are serially connected, and the antibody-coated microbeads are packed in each microreaction chamber. In addition, the weir structure was fabricated in the microchannel using the gray-scale photolithography in order to trap the microbeads in the microreaction chamber. Three kinds of antibodies were chosen, and the antibodies were immobilized onto the microbeads by the streptavidin-biotin conjugation. In the experiment, as the fluorescence-labeled antigens were injected into the microchannel, the antigen-antibody bindings were completed in 10 minutes. When the solution with multiple antigens was injected into the microchannel, it was observed that the fluorescence intensity increased in only the corresponding microreaction chambers with few non-specific binding. The microfluidic array biochip implemented in this study provides, even with the consumption of tiny amount of sample and fast reaction time to simultaneously detect multiple immunoreactions.

Development of Methane Gas Leak Detector by Short Infrared Laser (단적외선 레이저를 이용한 메탄가스 누출 검지 장비 개발)

  • Young Sam Baek;Jung Wan Hong
    • Journal of the Korean Institute of Gas
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    • v.28 no.1
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    • pp.53-58
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    • 2024
  • Due to the development of industry and improvement of living standards, the amount of natural gas used in the world is constantly increasing, and related industrial facilities such as power plants, storage facilities, and supply pipelines are constantly increasing. Natural gas is a convenient and clean fuel that does not pollute the environment, but in the event of an accident due to leakage, it can cause human casualties, large-scale property damage, and negative effects on the global warming effect. In addition to the severe penalties under the Severe Disaster Punishment Act, it is necessary to ensure safety. Therefore, by applying the principle of laser-based absorption spectroscopy, we developed a long-range portable methane leakage gas detection system that can detect the concentration of methane leaking from a distance of up to 30 meters and verified its effectiveness.

A New Key Protection Technique of AES Core against Scan-based Side Channel Attack (스캔 기반 사이드 채널 공격에 대한 새로운 AES 코아 키 보호 기술)

  • Song, Jae-Hoon;Jung, Tae-Jin;Park, Sung-Ju
    • Journal of KIISE:Computer Systems and Theory
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    • v.36 no.1
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    • pp.33-39
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    • 2009
  • This paper presents a new secure scan design technique to protect secret key from scan-based side channel attack for an Advanced Encryption Standard(AES) core embedded on an System-on-a-Chip(SoC). Our proposed secure scan design technique can be applied to crypto IF core which is optimized for applications without the IP core modification. The IEEE1149.1 standard is kept, and low area and power consumption overheads and high fault coverage can be achieved compared to the existing methods.

Analysis on the contamination and source of VOCs in groundwaters of Gwangju area (광주광역시의 지하수 중 휘발성유기화합물(VOCs)의 오염과 오염원 분석)

  • Yun, Uk;Cho, Byong-Wook;Eum, Chul-Hun;Sung, Ik-Hwan
    • The Journal of Engineering Geology
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    • v.13 no.4
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    • pp.389-404
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    • 2003
  • VOCs were detected in the 21 groundwaters out of 37 groundwaters sampled from around the Hanam Industrial Complex and the Gwangju stream. Ten components of chlorinated aliphatic hydrocarbons of VOCs were detected in the 18 groundwater samples. Among them, total trihalomethanes (TTHM) concentration is in the range of $0.1~36.2{\;}\mu\textrm{g}/L$, CECs concentration is $2.3~190{\;}\mu\textrm{g}/L$, and chlorinated solvents concentration containing PCE, TCE, etc. is $0.1~124.2{\;}\mu\textrm{g}/L$ respectively. Ten components of the aromatic hydrocarbons of VOCs were detected in the 5 groundwater samples, but their concentration are less than $1{\;}\mu\textrm{g}/L$. Detection frequency and concentration of the chlorinated aliphatic hydrocarbons components from the groundwaters in the Hanam Industrial Complex are higher than those of nearby downtown Gwangju stream. VOCs components except for TCE are lower than the MCL of USGS drinking water standard. TCE concentration of the 2 groundwater samples is over MCL, whose concentrations are 5 and 25 times higher than MCL, respectively. TCE is detected from the H8 and H10 groundwater samples and CFCs is detected H8 and H11 groundwater samples in the Hanam Industrial Complex. TTHM in study area is estimated from leakage of the main waters or sewage waters. Because most of the studied groundwater is under an aerobic condition, aromatic hydrocarbons are well degraded. But chlorinated aliphatic hydrocarbons are degraded very slowly.

Simulation of Counting Efficiencies of Portable NaI Detector for Rapid Screening of Internal Exposure in Radiation Emergencies (방사선비상시 내부피폭 신속 분류를 위한 휴대용 NaI 검출기의 계측효율 전산모사)

  • Ha, Wi-Ho;Yoo, Jaeryong;Yoon, Seokwon;Pak, Min Jung;Kim, Jong Kyoung
    • Journal of Radiation Protection and Research
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    • v.40 no.4
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    • pp.211-215
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    • 2015
  • In case of radiation emergencies, radioactive materials released into environments can cause internal exposure of members of the public. Even though whole body counters are widely used for direct measurement of internally deposited radionuclides, those are not likely to be used at the field to rapidly screen internal exposure. In this study, we estimated the counting efficiencies of portable NaI detector for different size BOMAB phantoms using Monte Carlo transport code to apply handheld gamma spectrometers for rapid screening of internal exposure following radiological accidents. As a result of comparison for two counting geometries, counting efficiencies for sitting model were about 1.1 times higher than those for standing model. We found, however, that differences of counting efficiencies according to different size are higher than those according to counting geometry. Therefore, we concluded that when we assess internal exposure of small size people compared to the reference male, the body size should be considered to estimate more accurate radioactivity in the human body because counting efficiencies of 4-year old BOMAB phantom were about 2.4~3.1 times higher than those of reference male BOMAB phantom.