• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.254.1-254.1
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• 2013

현재의 나노기술 및 부품은 나노미터 이하의 초고분해능을 요구하면서도 나노미터 이하의 정확도로 가공할 수 있는 기술을 요구하고 있다. 이온현미경은 위 두 요구조건을 만족하는 차세대 현미경으로써 초고분해능 이미징과 함께 기존의 갈륨이온을 사용하는 집속이온빔 장치보다 네온가스등을 이용하여 더 정밀하게 에칭 및 스퍼터링을 할 수 있다. 이온현미경은 전자현미경에 비해 더 깊은 초점심도를 갖으며, 색수차와 구면수차에 비교적 둔감하고 전자에 비해 무거운 이온의 무게 때문에 짧은 파장을 갖는 특징을 가지고 있다. 이와 같은 특징을 이용하면 전자현미경과 다른 여러 특징과 장점을 갖는 고분해능의 현미경을 제작할 수 있다. 이와 같이 차세대 현미경으로 주목받는 이온현미경의 중요한 부분인 이온총은 현재 가스장 이온 소스 방법으로 대부분 개발되고 있다. 가스장 이온 소스는 1950년대에 E. W. Muller에 의해 개발된 전계 이온 현미경(Field Ion Microscope)에서 응용된 방법으로 뾰족한 탐침에서의 가스 이온화를 기반으로 한다. 가장 보편적으로 사용되는 재질은 텅스텐으로 수십 nm 정도의 곡률 반경을 갖도록 제작하고 초고진공에 설치하여 강한 양전압을 인가함과 동시에 가스를 팁 주변에 넣어주면 팁표면에서 이온빔이 발생하게 된다. 본 연구에서는 위와 같이 차세대 나노장비로써 주목받는 이온현미경의 특징에 대해 소개하고, 특히 이온현미경의 이온총 원천기술 개발을 위해 연구하고 있는 가스장 이온 소스의 특성에 대해 소개한다. 수소, 네온, 헬륨의 전계 이온현미경과 함께 생성된 이온빔의 안정도 및 각전류 밀도를 계산하여 실제 이온총으로의 적용 가능성에 대해 보여준다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1228-1231
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• 2005

This paper reports about the development of scanning probe microscopy (SPM) tip with multi-walled carbon nanotube (MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which causes the dielectrophoresis was used for alignment and deposition of CNTs to the metal coated SPM tip. By dropping the MWNT solution and applying an electric field between an SPM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the SPM tips due to the attraction by the dielectrophoretic force. In this paper, we investigate experimental conditions about the alignment of the CNT to tip axis according to the change of the angle between a tip and an electrode. Experimental results are presented, and then fabricated CNT tips are showed and measurement results for 15nm gold particles are compared with that of the conventional silicon tip.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.12
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• pp.977-984
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• 2014

Nanomaterial have grown from scientific interest to commercial products and the nanomaterial market has grown 19.1 % each year. As the nanomaterial market size increases, it is expected that nanomaterial production will increase and its contamination of outdoor environmental system will also increase in the form of industrial waste. Since most of nanomaterials are known as biologically non-degradable materials, nanomaterials will accumulate in the environment, and this will increase the potential threats to human health along the food chain. Recent studies have investigated the toxicity effect of nanomaterials due to their size, chemical composition and shape. For the development of nanomaterial while taking human health into consideration, a nanomaterial detecting sensor is required. In this paper, we have observed the trend of nanomaterial detecting sensor of mechanical, electrochemical, optical and kelvin probe force microscopy sensors and we believe that this trend will shed the light on the development of real-life nanomaterial detecting sensors.

• Tribology and Lubricants
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• v.27 no.6
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• pp.344-350
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• 2011

Friction and wear behavior of tungsten oxide nanorods (TONs) was investigated using friction force microscopy(FFM) employing colloidal probes instead of conventional sharp tips. Vertically well-ordered TONs with 40 nm diameter, 130 nm length and 100 nm pitch width were synthesized on an anodic aluminium oxide substrate using two step electrochemical anodizing processes. The colloidal probe (diameter 20 ${\mu}m$) attached at the free end of tipless cantilever was oscillated(scanned) against a stationary surface of vertically aligned TONs with various scan speeds (1.2 ${\mu}m/s$, 3.0 ${\mu}m/s$ and 6.0 ${\mu}m/s$) and sliding cycles (100, 200 and 400) under normal load of 800 nN. The friction force and wear depth decreased with the increase of the scan speed. Plastically deformed thin layers were formed and sparsely deposited on the worn nonorod surface. The lower wear rate of the TONs with the longer oscillating cycles was attributed to the decreased real contact pressure due to the increase of real contact area between the colloidal probe and the TONs.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.11
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• pp.228-233
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• 2002

In this work, a new non-photolithographic micro-fabrication technique is presented. The motivation of this work is to overcome the demerits of the most commonly used photolithographic techniques. The micro-fabrication technique presented in this work is a two-step process which consists of mechanical scribing followed by chemical etching. This method has many advantages over other micro-fabrication techniques since it is simple, cost-effective, rapid, and flexible. Also, the technique can be used to obtain a metal structure which has sub-micrometer width patterns. In this paper, the concept of this method and its application to microsystem technology are described.

• Proceeding of EDISON Challenge
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• 2014.03a
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• pp.325-335
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• 2014

원자 힘 현미경 (Atomic Force Microscopy, AFM) 탐침과 표면 사이의 좁은 공간에서 형성되는 나노미터 크기의 메니스커스는 AFM으로 측정하는 표면 이미지에 영향을 주는 것으로 알려져 있다. 본 연구에서는 격자 기체 기반의 몬테카를로 방법을 이용하여 계의 상대습도 변화에 따른 시스템의 크기와 표면의 곡률이 메니스커스의 모양 및 이로 인해 발생하는 모세관 힘에 미치는 영향을 알아 보았다. 일반적으로 시스템의 크기가 작을수록, 표면의 곡률이 클수록 (표면이 거칠수록), 메니스커스 폭은 좁아지고 모세관 힘이 줄어드는 것을 확인 하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.586-586
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• 2013

저밀도 플라즈마는 반도체 공정, 나노 신소재 분야 및 우주 항공 분야 등 여러 분야에 이용되며, 플라즈마 진단 및 분석을 통해 효과적인 플라즈마 제어가 가능하다. 특히, 전자 에너지 분포 함수(Electron Energy Distribution Function, EEDF)는 전자 온도, 플라즈마 밀도 및 플라즈마 전위 등의 플라즈마 변수를 측정하거나 전자 가열 매커니즘 등을 이해하는데 있어서 매우 중요하므로 정밀한 측정이 필요하다. 그러나 RF fluctuation에 의해 낮은 전자 에너지 부분에서 EEDF가 왜곡되어 측정된 데이터 및 분석의 신뢰도가 떨어지게 된다. 이러한 문제점을 해결하기 위해 RF fluctuation 보상을 위한 쵸크 필터가 사용되며, 쉬스 임피던스에 비해 쵸크필터의 임피던스가 클수록 보상 효과는 높아진다. 하지만 플라즈마의 밀도가 낮아지면 쉬스 확장에 의해 쉬스 임피던스가 증가하므로 쵸크 필터에 의한 보상만으로는 충분한 개선 효과를 얻기 힘들다. 따라서 본 연구에서는 효과적인 RF fluctuation 보상을 위해 임피던스가 높은 쵸크 필터를 설계하고 추가적으로 레퍼런스링에 전압을 걸어 쉬스의 임피던스를 줄이는 방법도 적용하였다. 유도결합방식으로 $10^{-8}cm^{-3}$ 대의 저밀도 아르곤플라즈마 방전시켰으며, 단일 랑뮤어 탐침법으로 EEDF를 측정한 결과 낮은 전자 에너지 부분의 왜곡이 개선됨을 확인하였다.

• Journal of the Semiconductor & Display Technology
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• v.11 no.2
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• pp.81-84
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• 2012

Cantilevered carbon-nanotube-resonator was investigated via classical molecular dynamics simulations. The resonator system is including the attached nanocluster. A nanocluster with a finite length was modeling by some atomic rings. The mass of the nanocluster was equally distributed on the carbon atoms, composed of the atomic rings. The effective density factor, which could be considered as the single parameter affecting the resonance frequency shift, was significantly influenced by the mass, the position, and the linear density of the attached nanocluster. The linear density of the attached nanocluster was an important parameter to analyze the vibrational behavior of the CNT-resonator, including the attached nanocluster.

• Tribology and Lubricants
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• v.35 no.5
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• pp.286-293
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• 2019

In friction and wear tests that use friction force microscopy (FFM), the wear debris transfer to the tip apex that changes tip radius is a crucial issue that influences the friction and wear performances of films and coatings with nanoscale thicknesses. In this study, FFM tests are performed for bilayer $MoS_2$ film to obtain a better understanding of how geometrical and chemical changes of tip apex influence the friction and wear properties of nanoscale molecular layers. The critical load can be estimated from the test results based on the clear distinction of the failure area. Scanning electron microscopy and energy-dispersive spectroscopy are employed to measure and observe the geometrical and chemical changes of the tip apex. Under normal loads lower than 1000 nN, the reuse of tips enhances the friction and wear performance at the tip-sample interface as the contact pair changes with the increase of tip radius. Therefore, the reduction of contact pressure due to the increase of tip radius by the transfer of $MoS_2$ or Mo-dominant wear debris and the change of contact pairs from diamond/$MoS_2$ to partial $MoS_2$ or Mo/$MoS_2$ can explain the critical load increase that results from tip reuse. We suggest that the wear debris transfer to the tip apex should be considered when used tips are repeatedly employed to identify the tribological properties of ultra-thin films using FFM.

• Journal of the Korean Vacuum Society
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• v.19 no.5
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• pp.360-364
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• 2010

Most research groups used two analysis methods (spectroscopy and nanotribology) to measure the mechanical properties of nano-materials: NMR (Nuclear Magnetic Resonance), IR (Infrared Spectroscopy), Raman Spectroscopy as the spectroscopy method and AFM (Atomic Force MicroScope), EFM (Electrostatic Force Microscope), KFM (Kelvin Force Microscope), Nanoindenter as the nanotribological one. Among these, the nano-indentation technique particularly has been recognized as a powerful method to measure the elastic modulus and the hardness. However, this technique are prone to considerable measurement errors with pressure conditions during measurement. In this paper, we measured the change of elastic modulus and hardness of an Al single crystal with the change of load, hold, and unload time, respectively. We found that elastic modulus and hardness significantly depend on load, hold, and unload time, etc. As the indent time was shortened, the elastic modulus value decreased while the hardness value increased. In addition, we found that elastic modulus value was more sensitive to indent load, hold, and unload time than the hardness value. We speculate that measurement errors of the elastic modulus and the hardness originate from the residual stress during indenting test. From our results, the elastic modulus was more susceptible to the residual stress than the hardness. Thus, we find that the residual stress should be controlled for the minimum measurement errors during the indenting test.