• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.1 s.244
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• Proceeding of EDISON Challenge
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• 2015.03a
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• pp.111-116
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• 2015

우리는 딥펜나노리소그래피에서 일어나는 박막 성장에 관한 잉크 확산 모형을 랜덤 워크 방법을 사용해 구현하였다. 분자동역학 연구를 바탕으로 제안된 hopping down, serial pushing, 단일 밀림 길이를 고려한 모형에 따른 박막 성장 특성을 비교하였다. 모형에 따라 그 박막 성장 특성에 확연한 차이가 있음을 발견하였으며, 잉크 분자와 기판 사이의 결합력이 중요한 변수임을 확인할 수 있었다. 그리고 원자힘현미경 탐침에서 떨어지는 잉크 분자의 속도와 단일 밀림 길이에 따른 박막 성장 차이를 알아보았다. 단일 밀림 길이가 커질수록, 탐침에서 떨어지는 잉크 분자의 속도가 빨라질수록 가지 모양의 박막이 형성됨을 알 수 있었다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.05a
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• pp.30-30
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• 2002

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.05a
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• pp.67-67
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• 2002

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.226-227
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• 2004

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.12
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• pp.1198-1204
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• 2013

As a microwave near field probe for near field scanning optical microscope(NSOM) system, H-shaped(ridge type) small aperture is proposed and its performances from the viewpoints of the transmission efficiency(transmission cross section) and spatial confinement(beam spot size) are compared with those of the previous narrow rectangular aperture type. While the transmission efficiencies are comparable to each other for the two structures, the transmitted beam spot size for the proposed H-shaped aperture is much smaller than that for the previous rectangular aperture. This strong point of the H-shaped aperture is expected to significantly improve near-field optical applications such as optical data storage, nanolithography and nanomicroscopy. It is also observed that the transmission efficiency can be improved if the coupling aperture is implemented in the type of the transmission cavity.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.40-40
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• 2003

최근 나노기술의 발달과 더불어 나노재료에 대한 특성평가 요구가 높아지고 있고, 따라서 나노스케일에서 재료의 기계적 거동을 분석할 수 있는 나노인덴테이션 기법이 심도있게 연구되고 있다. 본 연구에서는 나노인덴테이션, 주사탐침현미경(SPM), 투과전자현미경(TEM) 기법을 이용하여 여러가지 재료의 탄성 소성 변형 거동과 팝인/괍아웃 현상을 조사하고 해석하였다. 나노인덴테이션 기법으로는 50 마이크로뉴턴 (5 mg) 이하의 매우 작은 하중 하에서는 접촉 응력조건이라도 인장시험에서 관찰되는 영구변형이 제로인 완전탄성 변형 거동을 관찰할 수 있었다. 또한, 50-250 마이크로 뉴턴의 하중 범위에서 재료는 탄성변형 이후에 갑작스런 항복거동과 더불어 수십-수백 나노미터를 미끌어지듯 변형하는 팝인(pop-in), 또는 탈선(excursion) 현상을 관찰할 수 있었다. 이 현상은 하중을 가하는 동안에 여러 번 발생하였으며 재료의 표면상태와 전위밀도와 밀접한 상관관계를 보였다. 반복 압입 시험에서는 전형적인 가공경화 현상으로 항복점이 높아지고 새로운 항복점 이후에야 다시 팝인 발생함을 보였다. 한편, 하중을 가할 때 발생하는 팝인과는 달리 하중을 제거할 때 급격히 회복하는 팝아웃 현상 또한 관찰되었다.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1963-1966
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• 2008

We fabricate and evaluate the metal-oxide-semiconductor (MOS) transistor probe with the focused-ionbeam (FIB) for surface electric properties. The probes are designed with the rectangular and V-shaped structures, and their dimensions are determined considering the contact mode operation. The conductive nano tip is grown with FIB system, and deposition condition is controlled for the sharp tip. The fabricated device is applied to the various test patterns like the metal lines and PZT poling regions, and the results show the well defined measurement patterns.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4095-4099
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• 2010

Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.656-659
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• 2003

Although Hereafter a mass production will claim for patterning nano sized thickness or line in micro-nano industry. existent lithography fabrication has many usable fields, it has complex fabrication steps, expensive values and row work rates. Development of Dip-pen type nano plotter using polymer actuator can construct row cost mass production system because it will change existent lithography fabrication more simple and easy.