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http://dx.doi.org/10.5762/KAIS.2010.11.11.4095

Precision-structural Design for Scanning Probe Microscopes  

Lee, Moo-Yeon (School of Mechanical Engineering, Korea University)
Shim, Jae-Sool (School of Mechanical Engineering, Yeungnam University)
Lee, Dong-Yeon (School of Mechanical Engineering, Yeungnam University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.11, no.11, 2010 , pp. 4095-4099 More about this Journal
Abstract
Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.
Keywords
Structural frame design; Scanning probe microscope; Vibration isolator; Transmissibility;
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Times Cited By KSCI : 1  (Citation Analysis)
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