Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
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- Pages.656-659
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- 2003
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- 2005-8446(pISSN)
Development of Micro-Nano Plotting Mechanism using Electrostrictive Polymer
Electrostrictive Polymer를 이용한 마이크로-나노 플로터 메커니즘 개발
Abstract
Although Hereafter a mass production will claim for patterning nano sized thickness or line in micro-nano industry. existent lithography fabrication has many usable fields, it has complex fabrication steps, expensive values and row work rates. Development of Dip-pen type nano plotter using polymer actuator can construct row cost mass production system because it will change existent lithography fabrication more simple and easy.