• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.484-484
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• 2009

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노 (nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (chemical mechanical polishing) 공정이 요구되어지고 있다. 최근, 금속배선공정에서 높은 전도율과 재료의 값이 싸다는 이유로 Cu를 사용하였으나, 디바이스의 구조적 특성을 유지하기 위해 높은 압력으로 인한 새로운 다공성 막(low-k)의 파괴와, 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 이러한 문제점을 해결 하고자 본 논문에서는 Cu의 ECMP 적용을 위해 LSV (Linear sweep voltammetry)법을 통하여 알칼리 성문인 $NaNO_3$ 전해액과 산성성분인 $HNO_3$ 전해액의 전압 활성화에 의한 active, passive, transient, trans-passive 영역을 I-V 특성 곡선을 통해 알아보았고, 알칼리와 산성 성분의 전해액이 Cu 표면에 미치는 영향을 SEM (Scanning electron microscopy), EDS (Energy Dispersive Spectroscopy), XRD(X-ray Diffraction)를 통하여 전기화학적 특성을 비교 분석하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Journal of the Korean Society for Precision Engineering
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• v.33 no.4
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• pp.265-270
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• 2016

Recently, many studies have been conducted on the nano-scale fabrication technology using twophoton- absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing.

• Journal of Welding and Joining
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• v.21 no.4
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• pp.46-55
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• 2003

TiO$_2$-WO$_3$(8.2wt%) coatings were prepared by the APS (Atmospheric Plasma Spraying) process to clarify the relationship between the process parameters(H$_2$ gas flow rate of plasma 2nd gas and spraying distance) of the APS coating and photo-decomposition efficiency kinetics of the MB(methylene blue) aqueous solution decomposition and to understand the effect of addition of WO$_3$ on photocatalytic properties of TiO$_2$ sprayed coating. Further, the temperature and velocity of flying particles were measured by DPV-2000 to investigate the relationship between microstructure of coatings and process parameters. Properties of coatins were investigated by XRD, SEM, XPS, RAMAN, UV/VIS spectrometer. In case of the TiO$_2$-WO$_3$(8.2wt%) coating, it had a lower anatase fraction than that of pure-TiO$_2$ coatings because of flying in the higher temperature plasma plume by the heavy weight of TiO$_2$, WO$_3$. And, when WO$_3$ added powders were spayed, the doping effects of W ions substituted into the Ti ion sites was not occured during melting and solidification cycles of spraying. It was found that the addition of WO$_3$ was ineffective effective on increasing photo-decomposition efficiency of TiO$_2$ sprayed coating.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.46 no.1
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• pp.46-55
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• 2014

In this study, we modified the surface of nanofibrillated cellulose (NFC) through LbL (Layer-by-Layer) multilayering process with polyelectrolytes and investigated the effects of the NFC modification on the charge of NFC surface and the dewatering ability of NFC suspension. The multilayering process was done onto NFC fibers using polydiallyldimethylammonium chloride (PDADMAC) and poly-sodium 4-styrene sulfonate (PSS) under different dosage and washing conditions. When the washing was carried out in every adsorption stage, the modified NFC had strong cationic or anionic charge depending on the type of polyelectrolyte in the outermost layer and the dewatering ability was not affected. In the case of no washing treatment or washing in the final adsorption stage, however, the zeta potential of NFC was close to an isoelectric point so that the dewatering ability increased remarkably. Low addition level of polyelectrolytes also showed the similar results. The mixing of NFC suspensions with opposite charge resulted in higher network strength and improved dewatering ability due to the flocculation.

• Polymer(Korea)
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• v.29 no.3
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• pp.221-230
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• 2005

Interfacial interactions and interphases played a key role in multicomponent materials irrespectively of the number and type of their components or their actual structure. They were equally important in particulate filled polymer, polymer blends, fibers-reinforced advanced composites, nanocomposites or biomimetic materials. Recognition of the role of the main factors influencing interfacial adhesion and proper surface modification could lead to significant progress in many fields of research and development, as well as in related technologies. Although the role and importance of interfaces and interphases were the same for all multicomponent materials, the surface modification could be always selected according to the objectives targeted, as well as to the characteristics of the particular system. In this wort therefore, several types of surface modification were performed to improve the interfacial interactions between two components in composite system and their results for the composites were investigated.

• Journal of Ocean Engineering and Technology
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• v.25 no.6
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• pp.42-48
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• 2011

The present study makes three original contributions to nanoskinned Ti-6Al-4V materials. The nanoskins were fabricated on Ti-6Al-4V material using various surface treatments: deep rolling (DR), laser shot peening (LSP), and ultrasonic nanocrystal surface modification (UNSM). These surface treatments are newly developed techniques and are becoming more popular in industrial fields. A fatigue strength comparison at up to 106 cycles was conducted on these nanoskinned Ti-6Al-4V materials. Fatigue tests were carried out using MTS under axial loading tension-compression fatigue (R = -1, RT, 5 Hz, sinusoidal wave). The analysis of the crack initiation patterns in the nanoskinned Ti-6Al-4V materials found an interior originating crack pattern and surface originating crack type. Microscopic observation was mainly used to investigate the fatigue fractured sites. These surface modification techniques have been widely adopted, primarily because of the robust grade of their mechanical properties. These are mainly the result of the formation of a large-scale, deep, and useful compressive residual stress, the formation of nanocrystals by the severe plastic deformation (SPD) at the subsurface layer, and the increase in surface hardness.

• Journal of Ocean Engineering and Technology
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• v.25 no.6
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• pp.49-55
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• 2011

In order to analyze feasibility of replacing a conventional 6-mm Ti bar with a 5-mm bar, a series of rotating bending fatigue tests were carried out on Ti-6Al-4V bars by strengthening the fatigue performance using a special technique called UNSM (Ultrasonic Nanocrystal Surface Modification). The results of S-N curves clearly showed that the performance of the 5-mm titanium specimen was similar to that of the 6-mm specimen when the UNSM treatment was applied. The 5-mm treated specimen converged with small scattering band into the linear line of the non-treated 6-mm one. Below the fatigue life of $10^5$ cycles, the UNSM treatment did not show any significant superiority in the bending stress and fatigue life. However, over the fatigue life of $10^5$ cycles, the effect of UNSM was superior for each fatigue life, and the bending stress became longer and higher than that of the untreated one. In the case of 6-mm Ti-bar with UNSM, the fatigue limit was about 592 MPa, and there was fatigue strength increase of about 30.7% at the fatigue life of $10^4$ cycles compared to the untreated 6-mm bar. Therefore, the compressive residual stress made by the UNSM in Ti-6Al-4V increased the fatigue strength by more than 30%.