• Title/Summary/Keyword: 나노 공정법

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A Study on the Filling Process and Residual Layer Formation in Nanoimprint Lithography Process (나노임프린트 공정에서의 충전과정과 잔류층 형성에 관한 연구)

  • Lee, Ki-Yeon;Kim, Kug-Weon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.9
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    • pp.3835-3840
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    • 2012
  • Nanoimprint lithography (NIL) is an emerging technology enabling cost-effective and high-throughput nanofabrication. Recently a lot of research for the nanoimprint have been carried out, but almost are about merely experimental result relating to the material operation and the imprint fabrication, and numerical analysis relating to the understanding of the imprint process with R&D level. In this paper, the viscoelasticity analysis model is developed using the finite element method. With this model, the filling process and residual layer formation in nanoimprint are analyzed, which is evaluated by a nanoimprint experiment.

Bi 주입량에 따른 MOCVD 법을 이용한 Tellurium 박막 증착

  • Lee, Hong-Gyu;Jeong, Su-Hwan;Kim, Yong-Gyu;Gang, Sang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.180-180
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    • 2011
  • 재료의 양단간에 온도차를 주어 전압 또는 전류가 발생하는 지벡효과와 반대로 전위차를 주어 온도차를 유도하는 펠티에 효과를 열전효과로 일컫는다. 이 열전효과에 관한 연구는 그 특수성 때문에 1950년대 이후로부터 많은 관심을 받아왔다. 최근 들어 석유자원의 고갈 및 신재생에너지에 대한 관심의 고조와 맞물리면서 열전재료 및 소자에 연구는 더욱 활발히 이루어지고 있다. 전도성이 있는 모든 물질은 열전효과를 가지는 데, 그 중 Bi-Te 합금계의 열전 물질은 상온에서 가장 우수한 열전성능지수를 가지는 것으로 보고되어, 이를 이용한 열전 재료에 대한 많은 연구가 이루어져 왔다. 현재 상용화된 열전소자는 Bi-Te bulk를 이용하여 제조되고 있으나 열전성능지수의 한계를 극복하기 위해 나노구조화, 박막화시키는 연구가 활발히 진행되고 있다. 특히 박막화를 통해 열전소자의 상용화 및 양산화에 일조할 수 있을 것으로 예상된다. 하지만 열전소자의 양산화를 위해서는 대량생산에 용이한 증착공정이 개발되어야 한다. 증착공정 중 가장 양산화에 유리한 공정이 MOCVD (metal organic chemical vapor deposition)라고 생각되지만 이를 위해선 전구체의 특성 평가 및 공정개발이 필요하다. 따라서 본 연구팀은 MOCVD 공정을 이용하여 저온, 저압에서 Bi-Te 합금계의 박막 성장에 관한 연구를 수행하였다. 또한 적외선 분광 시스템을 활용하여 여러 전구체 중 최적의 Bi, Te 전구체 조합을 선별해내었다. 이 과정 속에서 Te 전구체의 독특한 분해특성 및 증착특성을 확인하였고, 이러한 특성을 조절하기 위해 Bi 전구체가 중요한 역할을 한다는 것을 확인하였다.

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Formation of Mesoporous Membrane by Reverse Thermally induced Phase Separation (RTIPS) Process Using Flash Freezing (Mesoporous 막 제조를 위한 급냉법에 의한 역 열유도상전이공정)

  • Yeom, Choongkyun;Kim, Jiwon;Park, Heeyoung;Park, Seong Eun;Lee, Kee Yoon;Lee, Kew-Ho
    • Membrane Journal
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    • v.31 no.1
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    • pp.67-79
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    • 2021
  • Mesoporous polystyrene (PS) and polyethersulfone (PES) membranes have been fabricated by reverse-thermally induced phase separation (RTIPS) process, using flash freezing. The mesoporous pores can be created by the nano-scaled phase separation induced by the formation and growth of solvent crystals in the dope solution in RTIPS process. RTIPS process has been characterized through analysis on the enthalpy change in the solvent of the dope solution, the morphology of the membrane fabricated with different polymer content, and the pore size distribution and its standard deviation of pore size of the membrane with polymer content via DSC, SEM, and BET, respectively. It is found that the kinetic aspect of the dope solution, i.e., the crystallization of solvent is a crucial factor to determine the structure of membrane fabricated in RTIPS rather than the thermodynamic aspect of the dope solution.

$CO_2$ Sensing Characteristics of Carbon-nanofibers Based on Effects of Porosity and Amine Functional Group (다공성 및 아민 작용기에 따른 탄소나노섬유의 $CO_2$ 감응특성)

  • Kim, Jong Gu;Kang, Seok Chang;Shin, Eunjeong;Kim, Da Young;Lee, Jin Hee;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.23 no.1
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    • pp.47-52
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    • 2012
  • Porous carbon nanofibers were prepared as a gas sensor electrode to study the $CO_2$ sensing property based on effects of porosity and introduced amine functional groups. Electrospun fibers were obtained by using electrospinning method with polyacrylonitrile precursor and they were treated by the thermal treatment and chemical activation. Amine functional groups were introduced by the liquid state treatment using diethylenetriamine. The specific surface area increased up to $2000m^2/g$ by the chemical activation. The Introduced amine functional group was identified using FT-IR spectroscopy. $CO_2$ gas sensing property was improved as four folds via introduced amine functional groups on the activated carbon nanofiber. In conclusion, the gas sensing property was improved based on the developed porosity by the chemical activation and the chemical attraction of $CO_2$ gas by introduced functional groups.

The control of TiO2 nanofiber diameters using fabrication variables in electrospinning method (전기 방사 공정의 제조 변수를 이용한 TiO2 나노섬유의 직경 제어)

  • Yoon, Han-Sol;Kim, Bo-Sung;Kim, Wan-Tae;Na, Kyeong-Han;Lee, Jung-Woo;Yang, Wan-Hee;Park, Dong-Cheol;Choi, Won-Youl
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.1
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    • pp.8-15
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    • 2021
  • TiO2 has been used in various fields such as solar cells, dental implants, and photocatalysis, because it has high physical and chemical stability and is harmless to the body. TiO2 nanofibers which have a large specific surface area also show a good reactivity in bio-friendly products and excellent photocatalysis in air and water purification. To fabricate TiO2 nanofibers, an electrospinning method was used. To observe the diameter of TiO2 nanofibers with fabrication variables, the fabrication variables was divided into precursor composition variables and process variables and microstructure was analyzed. The concentrations of PVP (Polyvinylpyrrolidone) and TTIP (Titanium(IV) isopropoxide) were selected as precursor composition variables, and inflow velocity and voltage were also selected as process variables. Microstructure and crystal structure of TiO2 nanofibers were analyzed using FE-SEM (Field emission scanning electron microscope) and XRD (X-ray diffraction), respectively. As-spun TiO2 nanofibers with an average diameter of about 0.27 ㎛ to 1.31 ㎛ were transformed to anatase TiO2 nanofibers with an average diameter of about 0.22 ㎛ to 0.78 ㎛ after heat treatment of 3 hours at 450℃. Anatase TiO2 nanofibers with an average diameter of 0.22 ㎛ can be expected to improve the photocatalytic properties by increasing the specific surface area. To change the average diameter of TiO2 nanofibers, the control of precursor composition variables such as concentrations of PVP and TTIP is more efficient than the control of electrospinning process variables such as inflow velocity and voltage.

The synthesis of atomically thin TiOx nanosheets with large size (원자층 두께를 갖는 대면적 TiOx 나노쉬트 합성)

  • Lee, Sang Eun;Won, Jonghan;Park, Hee Jung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.6
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    • pp.289-294
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    • 2017
  • Films fabricated using atomic layer 2-dimensional nanosheets exhibit various physical properties depending on the size of the nanosheet. This is because the physical properties of the film depend on the interfacial properties between the sheets. Therefore, the synthesis of large-sized nanosheets is very important because it can reduce the dependency of the film on the interfacial properties. In this study, we succeeded in fabricating $TiO_x$ nanosheets with atomic layer thickness over micrometer size by using single-crystallized starting material and its chemical exfoliation. In addition, it was revealed that the mechanical agitation speed (the stirring speed of a magnetic bar) during the exfoliation step using the organic material is closely related to the nanosheet size and the colloidal concentration of the nanosheets.

Synthesis of Pd-decorated SiO2 layers with superhydrophobic and oleophilic micro-nano hierarchical (초소수성 및 친유성을 갖는 마이크로-나노 계층구조의 Pd 금속입자 기능화된 SiO2층 합성)

  • Kim, Jae-Hun;Lee, Jae-Hyeong;Kim, Jin-Yeong;Kim, Sang-Seop
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.67.2-67.2
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    • 2017
  • 본 연구에서는 $SiO_2$ 미세구조 상에 Pd 나노입자(NPs)를 증착하여, 불소화된 마이크로-나노 계층구조를 갖는 Pd-decorated $SiO_2$($Pd/SiO_2$)를 제작하였다. 마이크로 크기의 거칠기를 갖는 $SiO_2$ 층은 졸-겔 공정을 사용해서 제조된 용액을 전기분사함으로써 제조되었다. 이어서, 자외선(UV)을 이용한 광 환원법을 이용해 Pd 나노입자를 $SiO_2$ 층에 형성했다. 생성된 표면은 마이크로-나노의 계층구조 형태를 보여주었다. 해당 시편의 불소화 처리 후, 마이크로-나노의 계층구조 표면은 $170^{\circ}$ 이상의 물 접촉각(water contact angle; WCA) 및 $5^{\circ}$ 이하의 슬라이딩 각(sliding angle)을 보여줌으로써 물에 대해 탁월한 소수성을 나타내었다. 또한, 커피($CA=161^{\circ}$), 우유($CA=162^{\circ}$), 쥬스($CA=163^{\circ}$), 그리고 글리세롤($CA=165^{\circ}$)에 대해서도 우수한 소수 특성을 보여주었다. 또한, 이들 $Pd/SiO_2$ 층은 우수한 장기내구성 및 자외선 저항성을 보여주었다. 그리고 이어진 기름에 대한 접촉각 측정을 통해 해당 시편이 소유 특성이 아닌 친유 특성을 보여준다는 것을 확인할 수 있었고, 기름에 대한 CA는 약 ${\sim}10^{\circ}$로 매우 우수한 친유 특성을 나타내었다. 이와 같은 결과는 자체세정이 가능한 표면 및 지능형 물/기름 분리 시스템과 같은 스마트 장치에서 초소수성-친유성 특성을 갖는 계층구조의 $Pd/SiO_2$ 층을 사용할 가능성을 명확하게 보여준다고 판단된다.

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Removal of Humic Acid Using Titanium Dioxide Nanotube Thin Film Fabricated by Anodization (양극산화로 제작된 이산화티타늄 나노튜브 박막을 이용한 휴믹산 제거)

  • Yun, Dong-Min;Jang, Jun-Won;Park, Jae-Woo
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.3
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    • pp.339-344
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    • 2008
  • Titanium dioxide nanotubes were fabricated by self-organized electrochemical potentiostatic anodization of titanium thin film with an electrolyte solution of sodium sulfate 1M and sodium flouride 0.5wt% aqueous solution at 20$^{\circ}C$ for 20min. Field Emmision Scanning Electron Microscopy(FE-SEM) and X-ray Diffractometer(XRD) were used to evaluate the micromorphology and crystalline structure of the titanium dioxide nanotube thin film. Titanium dioxide nanotube were fabricated with diameters approx. 100nm and tube length from appox. 1 $\mu$m. Titanium dioxide films formed through anodization and annealing process at 450$^{\circ}C$ contained a phase of anatase. Also, this study was performed to evaluate the application of titanium dioxide thin film for treating humic acid dissolved in water. The reaction tended to follow the Langmuir-Hinshelwood kinetics with zero order. Comparative experiments with thin film and anatase powder showed the same zero order kinetics when 0.3g of powder had been used.

Characteristics and Biocompatibility of Electrospun Nanofibers with Poly(L-lactide-co-ε-caprolactone)/Marine Collagen (전기 방사법을 통해 제조된 Poly(L-lactide-co-ε-caprolactone)/Marine Collagen 나노파이버의 특성 및 세포친화력 평가)

  • Kim, Woo-Jin;Shin, Young-Min;Park, Jong-Seok;Gwon, Hui-Jeong;Kim, Yong-Soo;Shin, Heung-Soo;Nho, Young-Chang;Lim, Youn-Mook;Chong, Moo-Sang
    • Polymer(Korea)
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    • v.36 no.2
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    • pp.124-130
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    • 2012
  • The uniform nanofibers of poly(L-lactide-$co$-${\varepsilon}$-caprolactone) (PLCL) with different contents of marine collagen (MC) were successfully prepared by electrospinning method. The effects of the major parameters in electrospinning process such as tip to target distance (TTD), voltage, nozzle size and flow rate on the average diameter of the electrospun nanofiber were investigated in generating composite nanofiber. The diameter and morphology of the nanofibers were confirmed by a scanning electron microscopy (SEM). Also, we measured a water contact angle to determine the surface wettability of the nanofibers. The average diameter of the nanofibers decreased as the value of TTD, MC contents, and voltages increased in comparison with that of pristine PLCL nanofiber. In contrast, the diameter of the nanofibers increased as the flow rate and inner diameter of nozzle increased in comparison with that of pristine PLCL. In addition, the hydrophilicity of the nanofiber and attachment of MG-63 cells on the sheets increased as incorporated collagen contents increased. Therefore, the marine collagen would be a potential material to enhance cellular interactivity of synthetic materials by mimicking the natural tissue.

Studies on Membrane Fouling Monitoring by Fluorescence Nano Particle and Fluorescent Spectrometry (형광 나노 입자 및 형광 분광 분석을 이용한 막오염 측정법 연구)

  • Seo, Mi-Rae;Nam, Mi-Yeon;Kim, Beom-Sik;Nam, Seung-Eun;Kim, In-Chul;Park, You-In
    • Membrane Journal
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    • v.21 no.2
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    • pp.163-170
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    • 2011
  • Membrane fouling control in water treatment may be the main obstacle for wider implementation and lower cost. A novel fluorescent spectroscope sensor device for membrane fouling integrity monitoring has been developed and evaluated in this study. PSf membranes for water treatment has been fabricated with three types of organic fluorescent materials, OB, FP, KCB. The fluorescent signal from membrane surface was analyzed throughout the filtration process. It was found that the fluorescent signal due to the membrane fouling decreased and the developed device is reliable for membrane fouling monitoring.