• 한국정밀공학회지
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• 제23권3호
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• pp.56-60
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• 2006

A high-resolution shadow mask, or called a nanostencil was fabricated for high resolution lithography. This high-resolution shadowmask was fabricated by a combination or MEMS processes and focused ion beam (FIB) milling. 500 nm thick and $2{\times}2mm$ large membranes wore made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane. By local deposition through the apertures of nanostencil, nanoscale patterns down to 70 nm could be achieved.

• 한국정밀공학회지
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• 제23권3호
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• pp.179-186
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• 2006

Single-walled carbon nanotubes (SWNT) exhibit strong Raman signals as well as fluorescence emissions in the near infrared regions where most biomolecules are transparent. Such signals do not blink or photobleach under prolonged excitation. which is advantageous to optical nano-bio marker applications. In this paper, single walled carbon nanotubes are conjugated with specific types of single-stranded DNA in order to detect oligonucleotides of corresponding complimentary sequences. Dot blotting experiments and comparative Raman spectroscopy observations demonstrated excellent sensitivity and specificity of carbon nanotube-DNA probes. The results show the possibility of using SWNT as generic nano-bio markers for the precise detection of specific kinds of genes.

• 한국정밀공학회지
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• 제32권8호
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• pp.673-680
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• 2015

A roll-to-roll (R2R) continuous manufacturing system for a carbon-nanotube (CNT)-/silver-nanowire (AgNW)- based large-area transparent conductive film was introduced in this study. The systemic guidelines of the R2R slot-die coating process including roll eccentricity, wrap angle, pump accuracy, and blower influence were discussed. To simulate the coating phenomenon, we investigated the governing parameters of the coating process by incorporating the estimated relative thickness that was defined by combining the viscocapillary model and volume model. By using experimental and mathematical approaches, an excellent transparent conductive layer with a $40{\Omega}/{\Box}$ sheet resistance and 88 % transmittance was obtained; moreover, a dimensionless number identifies the correlation between the transparent conductive film and the anti-reflection film.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.146-150
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• 2004

We researched carbon nanotube(CNT) cartridge as a CNT sample for the fabrication of nanotweezer which is composed of a couple of single CNT tip. Our CNT cartridge was made by dielectrophoretic methods, a kind of micromanipulation technique using electric field. Therein we intended to fabricate the CNT cartridge with just conventional function generators and a set of simple electrode. A knife edge and a flat metal electrode were employed as a couple of electrode, and these electrode pair faced each other with the gap. When the gap is filled with CNT suspension, we induced AC electric field into the gap. Then CNTs was attached on the sharp edge in knife edge by dielectrophoresis. This knife edge with attached CNTs is called as the CNT cartridge.

• 한국정밀공학회지
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• 제24권11호
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• pp.108-115
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• 2007

We have designed a high transmission C-shaped aperture using finite differential time domain (FDTD) technique. The C-shaped aperture was fabricated in the aluminum thin film on a glass substrate using a focused ion beam (FIB) milling. Nano-size patterning was demonstrated with a vacuum contact device to keep tight contact between the Al mask and the photoresist. Using 405 nm laser, we recorded a 50 nm-size dot pattern on the photoresist with the aperture and analyzed the spot size dependent on the dose illuminated on the aperture.

• 한국정밀공학회지
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• 제28권11호
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• pp.1251-1258
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• 2011

With the help of nanoscale materials like carbon nanotube (CNT), there is the potential to develop new actuators that will provide higher work per cycle than previous actuator technologies, and generate much higher mechanical strength. In this study, the electrochemical actuation characteristics of nano carbon materials were experimentally studied to develop electrochemical actuators. The electrochemical actuators were composed of aqueous NaCl electrolyte and their actuating electrodes were made of multi-walled carbon nanotube (MWCNT)/polystyrene composite and graphene respectably. Actuation is proportional to charging transfer rate, and the electrolysis with an AC voltage input has very complex characteristics. To quantify the actuation property, the strain responses and output model were studied based on electrochemical effects between the nano carbon films and the electrolyte.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.628-631
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• 2003

This study describes a new mastless nano-fabrication technique of Pyrex 7740 glass using the combination of nanomachining by nano-indenter XP and HF wet etching. First, the surface of a Pyrex 7740 glass specimen was machined by using the nano-machining system, which utilizes the mechanism of the nano-indenter XP. Next, the specimen was etched by HF solution. After the etching process, the convex structure or deeper hole is made because of masking or promotion effect of the affected layer generated by nano-machining. On the basis of this interesting fact. some sample structures were fabricated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.27-32
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• 2003

Nanotechnology is the creation and utilization of materials, devices, and systems through the control of matter on the nanometer-length scale, that is, at the level of atoms, molecules, and supramolecular structures. The essence of nanotechnology is the ability to work at these levels to generate larger structures with fundamentally new molecular organization. These nanostructures, made with building blocks understood from first principles, are the smallest human-made objects, and they exhibit novel physical, chemical, and biological properties and phenomena. The aim of nanotechnology is to loam to exploit these properties and efficiently manufacture and employ the structures. Control of matter on the nanoscale already plays an important role in scientific disciplines as diverse as physics, chemistry, materials science, biology, medicine, engineering, and computer simulation. This paper describes the superprecision nano separator to productive particle size of nano powder. this separator system is very important in the industrial area for other high technology parts.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.14-14
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• 2004

전자 공학 분야의 발전으로 인해 작은 구조물을 제작할 수 있는 리소그라피 (lithography) 기술이 급속하게 발전하고 있으며, 보다 작은 구조물에 대한 수요도 빠르게 증가하고 있다. 지난 수십 년간 반도체 분야에 적용 되어온 Moore's law에 의하면, 수년 내에 수십 나노 미터 크기의 특성 길이 (Critical Dimension)를 지닌 구조물을 이용하여 소자가 제작될 것 이 예견되고 있다. 반도체 공정을 응용하여 작은 구조물을 제작하는 기술은, 전자 공학 분야뿐만 아니라 광전자공학(optoelectronics) 분야, 양자 계산(quantum computing) 분야, 양자 계산(quantum computing) 분야, MEMS/NEMS, 바이오 센서(biosensor)분야 등에 다양한 응용성을 가질 것으로 예상된다.(중략)

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.237-237
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• 2004

최근 산업의 급속한 발전과 가공기계의 초정밀화로 인한 초정밀가공품의 수요가 꾸준한 증가를 보이고 있으며, 특히 렌즈 산업에서 초정밀가공기술의 적용이 급속히 증가되고 있는 추세이다. 초정밀가공에서는 공구의 가공물on 대한 상대운동이 그대로 가공물에 전사되므로 생성되는 가공데이터의 정확도가 중요하다. 고정도의 렌즈와 렌즈금형들은 형상정밀도가 수십 나노미터에 이르는 초정밀 제품으로써 가격이 고가이다. 따라서 잘못 생성된 공구 경로는 시간적인 손실뿐만 아니라 고가의 장비를 훼손시킬 수 있으므로 공구경로 보정을 행할 필요가 있다.(중략)