• 한국전기전자재료학회논문지
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• 제22권7호
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• pp.612-615
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• 2009

We need to control the growth orientation of CNTs on a substrate for applications to various electric devices. Generally, the flow direction of feed gases and electric field between two electrode affect to growth orientations of CNTs. In this paper, we varied tilt degrees $(0^{\circ},\;20^{\circ},\;35^{\circ},\;50^{\circ},\;65^{\circ},\;90^{\circ})$ of substrates on a cathode and DC bias voltages (0, 500, 700 V) applied between two electrodes in order to change growth orientations of CNTs. We confirmed that tilt degrees of the substrate and variation of DC bias voltages affected to the shape and orientation of the grown CNTs on the substrate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.596-596
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• 2013

본 연구에서는 Carbon nanotube 용액을 brush-painting 시스템을 이용하여 유연성 있는 PET 기판 위에 고품위의 플렉시블 투명전극을 제작하였다. CNT 박막의 두께에 따른 특성을 알아보기 위해 brushing 횟수를 증가시켜 UV/Vis Spectrometry, four-point probe 및 Hall measurement를 이용하여 전기적, 광학적특성을 알아보았다. 최적조건인 bilayer의 CNT 박막은 244 Ohm/sq.의 면 저항과 550 nm에서 68％의 투과도를 얻을 수 있었다. CNT 박막의 기계적 응력에 따른 전기적 안정성을 알아보기 위해 bending test를 진행하였다. 10,000번 구부려도 저항의 변화가 거의 없어 이 박막이 플렉시블한 소자에 적합하다는 것을 알았다. 유기태양전지의 적용 가능성을 알아보기 위해 CNT 박막을 유기태양전지의 anode 층으로 적용하여 1.6％ (VOC: 0.566(V), $J_{SC}$: 7.118(mA/$cm^2$), Fill Factor: 40.49(％))의 효율을 얻어 유기태양전지 소자의 적용 가능성을 알았다. 최종적으로 실험에서 성막된 CNT 박막은 기존의 CVD공정과 같은 복잡한 공정 대신에 쉽고 간편하게 고품위의 flexible brush-painting Carbon nanotube (CNT) 투명전극을 제작 하여 플렉시블한 유기태양전지 소자의 가능성을 알아보았다.

• 한국연소학회지
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• 제8권2호
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• pp.50-55
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• 2003

Synthesis of carbon nanofibers on a metal substrate by an ethylene fueled inverse diffusion flame was observed. Stainless steel plates were used for the catalytic metal substrate. The effects of radial distance and residence time of the substrate were investigated. The role of hydrocarbon composition in the fuel was also viewed. Nanofibers with a diameter range of 30-70nm were found on the substrate. The carbon nanofibers were formed and grown in the region from 4 to 5.5mm from the central axis of a flame outside of the visible flame front in the radial direction. The minimum residence time required for the formation of carbon nanofibers were about 20 seconds, and over 60 seconds were required for the full-scale growth. The characteristic time of the formation of carbon nanofibers was much shorter than that of the substrate temperature growth. In this study, the variation in hydrocarbon composition had no significant effect on the formation and growth of the carbon nanofibers.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.93-94
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• 2006

나노급 CMOS 기술에서 high-k 물질을 이용하여 게이트 유전막을 형성하고자 하는 연구가 활발히 진행되고 있다. 본 논문에서는 high-k 물질인 $TiO_2$의 특성에 대한 연구를 수행하였다. $TiO_2$를 APCVD법으로 p-type 실리콘 기판에 $50{\AA}{\sim}300{\AA}$ 두께로 증착하였고, evaporator를 이용하여 $TiO_2$ 박막위에 Al을 증착하여 MIS소자를 제작하였다. 두께를 가변 하여 Capacitance-Voltage (C-V) 특성을 측정, 분석하였다.

• 한국진공학회지
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• 제11권4호
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• pp.256-260
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• 2002

Carbon nanotubes on metal(SUS304) substrates were synthesized by using micro-wave plasma-enhanced chemical vapor deposition at $650^{\circ}C$ with gas mixture CH$_4$(11%) and H$_2$(89%). Their structure was investigated by scanning electron microscopy and transmission electron microscopy. Raman spectroscopy was also used to justify the structure and crystallinity of graphite sheets. High-resolution transmission electron microscopy images clearly showed carbon nanotubes to be multwalled. The measured turn-on field and current density obtained from I-V measurement were 4.4 V/$\mu \textrm{m}$ and $8.4\times10^1\mu\textrm{A}/\textrm{cm}^2$, respectively.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2006년도 춘계학술대회 논문집
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• pp.188-190
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• 2006

본 연구에서는 Anodic Aluminum Oxide(AAO) 템플레이트를 이용하여 전기도금법으로 일정한 길이와 고밀도 대면적의 Nickel nanorod를 제작하였다. 전기도금법으로 AAO-템플레이트내를 채우는 방법으로 제작되었다. 그 결과 직경 $80{\sim}100$ nm, 길이 $0.5{\mu}m$ 가량의 균일한 nanorod를 직경 40mm, 두께 $0.8{\mu}m$의 대면적 원형 AAO-템플레이트에 가득 채우는데 성공 하였으며 AAO 템플레이트는 제거되어 기판 위에 free-standing 되는 구조로 제작 되었다

• 한국세라믹학회지
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• 제47권6호
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• pp.479-484
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• 2010

Microstructural and mechanical properties of the TiN films deposited on Si substrates under various substrate bias voltages by a reactive magnetron sputtering have been studied. It was found that the crystallographic texture, microstructural morphology and mechanical property of the TiN films were strongly depended on the substrate bias voltage. TiN films deposited without bias exhibited a mixed (200)-(111) texture with a strong (200) texture, which subsequently changed to a strong (111) texture with increasing bias voltage. It is also observed that the crystallite size decreases with increasing bias voltage, which corresponds to the increasing diffraction peak width of XRD patterns. The average surface roughness was calculated from AFM images of the films; these results indicated that the average surface roughness was increased with an increase in the bias voltage of the coatings.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 디스플레이 광소자 분야
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• pp.89-92
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• 2002

Carbon nano tubes(CNTs) have been reported as field emission source because has a sharp tip, a high aspect tip, high chemical stability, high mechanical strength and low work function properties. In this study, we fabricated successfully the back-lamp of the I-inch flat type using CNTs, which was grown directly on cathode substrate of sodalime glass at low temperature. The brightness of CNT back-lamp is measured to $14 Kcd/m^{2}$ at $2000V_{dc}$ in spacing of $500{\mu}m$. And, the emission properties of packaged CNT back-lamp was analyzed as function of applying voltage and times.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.281-281
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• 2010

In this study, ZnO nanorod arrays are grown on organic substrates by hydrothermal method which requires a low temperature, simple process, and no vacuum. The structure properties of ZnO nanorods were examined by field emission scanning electron microscopy and X-ray diffraction. To detect the optical transmission, ultraviolet visible spectrophotometer was also used. From results, the ZnO nanorods were grown the horizontal growth on the organic substrates had the length of over $10\;{\mu}m$. After deposition of ZnO seed layer, the ZnO nanorod arrays had uniformity orientation and length.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 하계종합학술대회 논문집
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• pp.954-957
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• 1999

We have synthesized carbon nanotubes by thermal chemical vapor deposition of $C_2$H$_2$ on transition metal-coated silicon substrates. Carbon nanotubes are uniformly synthesized on a large area of the plain Si substrates, different from previously reported porous Si substrates. It is observed that surface modification of transition metals deposited on substrates by either etching with dipping in a HF solution and/or NH$_3$ pretreatment is a crucial step for the nanotube growth prior to the reaction of $C_2$H$_2$gas. We will demonstrate that the diameters of carbon naotubes can be controlled by applying the different transition metals.