• Title/Summary/Keyword: 나노공정

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A Design of Digital CMOS X-ray Image Sensor with $32{\times}32$ Pixel Array Using Photon Counting Type (포톤 계수 방식의 $32{\times}32$ 픽셀 어레이를 갖는 디지털 CMOS X-ray 이미지 센서 설계)

  • Sung, Kwan-Young;Kim, Tae-Ho;Hwang, Yoon-Geum;Jeon, Sung-Chae;Jin, Seung-Oh;Huh, Young;Ha, Pan-Bong;Park, Mu-Hun;Kim, Young-Hee
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.12 no.7
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    • pp.1235-1242
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    • 2008
  • In this paper, x-ray image sensor of photon counting type having a $32{\times}32$ pixel array is designed with $0.18{\mu}m$ triple-well CMOS process. Each pixel of the designed image sensor has an area of loot $100{\times}100\;{\mu}m2$ and is composed of about 400 transistors. It has an open pad of an area of $50{\times}50{\mu}m2$ of CSA(charge Sensitive Amplifier) with x-ray detector through a bump bonding. To reduce layout size, self-biased folded cascode CMOS OP amp is used instead of folded cascode OP amp with voltage bias circuit at each single-pixel CSA, and 15-bit LFSR(Linear Feedback Shift Register) counter clock generator is proposed to remove short pulse which occurs from the clock before and after it enters the counting mode. And it is designed that sensor data can be read out of the sensor column by column using a column address decoder to reduce the maximum current of the CMOS x-ray image sensor in the readout mode.

The Effect of Crystallization by Heat Treatment on Electromagnetic Interference Shielding Efficiency of Carbon Fibers (열처리 온도에 의한 구조 결정성이 탄소섬유의 전자파 차폐 성능에 미치는 영향)

  • Kim, Jong Gu;Chung, Choul Ho;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.22 no.2
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    • pp.138-143
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    • 2011
  • To investigate the electromagnetic interference shielding efficiency (EMI SE) property based on heat treatment effects of carbon fibers in various temperatures, the polyacrilonitrle-based carbon fibers were prepared by electrospinning method and treated at 1073, 1323, 1873 and 2573 K. The surface morphology of carbon fibers was investigated by using FE-SEM and the carbon crystallization was studied by Raman spectroscopy based on effects of reaction temperatures. The electrical conductivity was obtained by measuring the surface resistance with four probe method on carbon crystallization. The permittivity, permeability and EMI SE were investigated by using S-parameter in the range of 800~4500 MHz. In case of carbon fibers treated at 2573 K, the improved carbon crystallization was confirmed by Raman spectrum and the enhanced electrical conductivity showing 54.7 S/cm was also observed. The permittivity was dramatically improved by factor of 4 based on effect of high reaction temperature. Eventually, the highly improved EMI SE value was obtained showing around 41.7 dB.

Fluoro-illite/polypropylene Composite Fiber Formation and Their Thermal and Mechanical Properties (불소화 일라이트/폴리프로필렌 복합섬유 형성 및 열 및 기계적 특성)

  • Jeong, Euigyung;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.22 no.5
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    • pp.467-472
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    • 2011
  • This study investigated illite/polypropylene (PP) composite filament formation via melt-spinning and evaluated their physical properties to prepare functional fibers using natural materials. When composite filaments were formed, the composite filaments exhibited smaller fiber diameters compared to that of neat PP filament because of the lubricant effect of illite induced by its layered structure. Moreover, fluorination effect increased interfacial affinity and dispersion in the polymer, resulting in smaller diameter of fluorinated illite/PP composite filament, which was 2/3 of the neat PP filament diameter. Addition of raw and fluorinated illite improved thermal stability of illite/PP composite filament. Raw illite/PP composite filament cannot be used for a practical application, because it broke during drawing process, whereas the fluorinated illite/PP composite filament can be used for a practical application, because it exhibited similar tensile strength of the neat PP filament and 50% increased modulus. Even with improved illite/PP interfacial affinity and illite dispersion in the polymer, illite/PP composite filament formed microcomposite, because non-expandable illite had strongly bound layers, resulting in only a little illite exfoliation and PP intercalation into illite.

Property of Nickel Silicides with 10 nm-thick Ni/Amorphous Silicon Layers using Low Temperature Process (10 nm-Ni 층과 비정질 실리콘층으로 제조된 저온공정 나노급 니켈실리사이드의 물성 변화)

  • Choi, Youngyoun;Park, Jongsung;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.47 no.5
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    • pp.322-329
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    • 2009
  • 60 nm- and 20 nm-thick hydrogenated amorphous silicon (a-Si:H) layers were deposited on 200 nm $SiO_2/Si$ substrates using ICP-CVD (inductively coupled plasma chemical vapor deposition). A 10 nm-Ni layer was then deposited by e-beam evaporation. Finally, 10 nm-Ni/60 nm a-Si:H/200 nm-$SiO_2/Si$ and 10 nm-Ni/20 nm a-Si:H/200 nm-$SiO_2/Si$ structures were prepared. The samples were annealed by rapid thermal annealing for 40 seconds at $200{\sim}500^{\circ}C$ to produce $NiSi_x$. The resulting changes in sheet resistance, microstructure, phase, chemical composition and surface roughness were examined. The nickel silicide on a 60 nm a-Si:H substrate showed a low sheet resistance at T (temperatures) >$450^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate showed a low sheet resistance at T > $300^{\circ}C$. HRXRD analysis revealed a phase transformation of the nickel silicide on a 60 nm a-Si:H substrate (${\delta}-Ni_2Si{\rightarrow}{\zeta}-Ni_2Si{\rightarrow}(NiSi+{\zeta}-Ni_2Si)$) at annealing temperatures of $300^{\circ}C{\rightarrow}400^{\circ}C{\rightarrow}500^{\circ}C$. The nickel silicide on the 20 nm a-Si:H substrate had a composition of ${\delta}-Ni_2Si$ with no secondary phases. Through FE-SEM and TEM analysis, the nickel silicide layer on the 60 nm a-Si:H substrate showed a 60 nm-thick silicide layer with a columnar shape, which contained both residual a-Si:H and $Ni_2Si$ layers, regardless of annealing temperatures. The nickel silicide on the 20 nm a-Si:H substrate had a uniform thickness of 40 nm with a columnar shape and no residual silicon. SPM analysis shows that the surface roughness was < 1.8 nm regardless of the a-Si:H-thickness. It was confirmed that the low temperature silicide process using a 20 nm a-Si:H substrate is more suitable for thin film transistor (TFT) active layer applications.

Laser Fabrication of Graphene-based Materials and Their Application in Electronic Devices (레이저 유도에 의한 그래핀 합성 및 전기/전자 소자 제조 기술)

  • Jeon, Sangheon;Park, Rowoon;Jeong, Jeonghwa;Hong, Suck Won
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.1
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    • pp.1-12
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    • 2021
  • Here, we introduce a laser-induced graphene synthesis technology and its applications for the electric/electronic device manufacturing process. Recently, the micro/nanopatterning technique of graphene has received great attention for the utilization of these new graphene structures, which shows progress developments at present with a variety of uses in electronic devices. Some examples of practical applications suggested a great potential for the tunable graphene synthetic manners through the control of the laser set-up, such as a selection of the wavelength, power adjustment, and optical techniques. This emerging technology has expandability to electric/electronic devices combined together with existed micro-packaging technology and can be integrated with the new processing steps to be applied for the operation in the fields of biosensors, supercapacitors, electrochemical sensors, etc. We believe that the laser-induced graphene technology introduced in this paper can be easily applied to portable small electronic devices and wearable electronics in the near future.

Synthesis and Optical Property of (GaN)1-x(ZnO)x Nanoparticles Using an Ultrasonic Spray Pyrolysis Process and Subsequent Chemical Transformation (초음파 분무 열분해와 화학적 변환 공정을 이용한 (GaN)1-x(ZnO)x 나노입자의 합성과 광학적 성질)

  • Kim, Jeong Hyun;Ryu, Cheol-Hui;Ji, Myungjun;Choi, Yomin;Lee, Young-In
    • Journal of Powder Materials
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    • v.28 no.2
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    • pp.143-149
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    • 2021
  • In this study, (GaN)1-x(ZnO)x solid solution nanoparticles with a high zinc content are prepared by ultrasonic spray pyrolysis and subsequent nitridation. The structure and morphology of the samples are investigated by X-ray diffraction (XRD), field-emission scanning electron microscopy, and energy-dispersive X-ray spectroscopy. The characterization results show a phase transition from the Zn and Ga-based oxides (ZnO or ZnGa2O4) to a (GaN)1-x(ZnO)x solid solution under an NH3 atmosphere. The effect of the precursor solution concentration and nitridation temperature on the final products are systematically investigated to obtain (GaN)1-x(ZnO)x nanoparticles with a high Zn concentration. It is confirmed that the powder synthesized from the solution in which the ratio of Zn and Ga was set to 0.8:0.2, as the initial precursor composition was composed of about 0.8-mole fraction of Zn, similar to the initially set one, through nitriding treatment at 700℃. Besides, the synthesized nanoparticles exhibited the typical XRD pattern of (GaN)1-x(ZnO)x, and a strong absorption of visible light with a bandgap energy of approximately 2.78 eV, confirming their potential use as a hydrogen production photocatalyst.

Resistive E-band Textile Strain Sensor Signal Processing and Analysis Using Programming Noise Filtering Methods (프로그래밍 노이즈 필터링 방법에 의한 저항 방식 E-밴드 텍스타일 스트레인 센서 신호해석)

  • Kim, Seung-Jeon;Kim, Sang-Un;Kim, Joo-yong
    • Science of Emotion and Sensibility
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    • v.25 no.1
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    • pp.67-78
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    • 2022
  • Interest in bio-signal monitoring of wearable devices is increasing significantly as the next generation needs to develop new devices to dominate the global market of the information and communication technology industry. Accordingly, this research developed a resistive textile strain sensor through a wetting process in a single-wall carbon nanotube dispersion solution using an E-Band with low hysteresis. To measure the resistance signal in the E-Band to which electrical conductivity is applied, a universal material tester, an Arduino, and LCR meters that are microcontroller units were used to measure the resistance change according to the tensile change. To effectively handle various noises generated due to the characteristics of the fabric textile strain sensor, the filter performance of the sensor was evaluated using the moving average filter, Savitsky-Golay filter, and intermediate filters of signal processing. As a result, the reliability of the filtering result of the moving average filter was at least 89.82% with a maximum of 97.87%, and moving average filtering was suitable as the noise filtering method of the textile strain sensor.

Effect of sintering temperature on microstructure and dielectric properties in (Dy, Mg)-doped BaTiO3 (Dy 및 Mg가 첨가된 BaTiO3에서 소결 온도가 미세구조와 유전특성에 미치는 영향)

  • Woo, Jong-Won;Kim, Sung-Hyun;Choi, Moon-Hee;Jeon, Sang-Chae
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.5
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    • pp.175-182
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    • 2022
  • Rare-earth elements were doped with Mg to enhance the temperature stability of dielectric properties of BaTiO3 for its application to MLCC (Multi-Layer Ceramic Capacitor). The additives strongly affect both grain growth and densification behaviors during sintering, and hence dielectric properties. The additive effects therefore should be examined in each system with different additives. This study investigated the crystal structure, grain growth and densification behaviors and related variations in dielectric constant with respect to sintering temperature. Dielectric constant appears to be varied with grain size in a temperature range between 1200 and 1300℃, suggesting the importance of grain size control. The temperature dependence of grain size variation was well explained by an established theory correlating the grain growth behavior with grain boundary structure. This accordance provides a basis for sintering technique to control grain growth thus to improve dielectric constant in rare-earth doped BaTiO3.

Recycling of Hardmetal Tool through Alkali Leaching Process and Fabrication Process of Nano-sized Tungsten Carbide Powder using Self-propagation High-temperature Synthesis (알칼리 침출법을 통한 초경 공구의 재활용 및 자전연소합성법을 통해 제조된 나노급 탄화텅스텐 제조공정 연구)

  • Kang, Hee-Nam;Jeong, Dong Il;Kim, Young Il;Kim, In Yeong;Park, Sang Cheol;Nam, Cheol Woo;Seo, Seok-Jun;Lee, Jin Yeong;Lee, Bin
    • Journal of Powder Materials
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    • v.29 no.1
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    • pp.47-55
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    • 2022
  • Tungsten carbide is widely used in carbide tools. However, its production process generates a significant number of end-of-life products and by-products. Therefore, it is necessary to develop efficient recycling methods and investigate the remanufacturing of tungsten carbide using recycled materials. Herein, we have recovered 99.9% of the tungsten in cemented carbide hard scrap as tungsten oxide via an alkali leaching process. Subsequently, using the recovered tungsten oxide as a starting material, tungsten carbide has been produced by employing a self-propagating high-temperature synthesis (SHS) method. SHS is advantageous as it reduces the reaction time and is energy-efficient. Tungsten carbide with a carbon content of 6.18 wt % and a particle size of 116 nm has been successfully synthesized by optimizing the SHS process parameters, pulverization, and mixing. In this study, a series of processes for the high-efficiency recycling and quality improvement of tungsten-based materials have been developed.

A Study on the Control of Hygroscopicity and Hardness in Polymer Surfaces (고분자 표면의 흡습성 및 경도 제어 연구)

  • Jinil Kim;Young Nam Jung;Doa Kim;Myung Yung Jeong
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.4
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    • pp.86-90
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    • 2023
  • The packaging of electronic devices performs a protective function to ensure that their durability and reliability are not affected by changes in the operating environment caused by external factors. Recent advances in materials have led to ongoing research into bonded packaging of heterogeneous materials such as polymers and inorganic materials in electronic devices. In this packaging process, it is important to have a binding that joins the materials and ensures the operating environment, which includes adhesion to the substrate, corrosion and oxidation resistance through moisture removal, and durability. In this study, the hygroscopicity of the coating layer by modifying the polymer surface based on PVA was evaluated by controlling and measuring the contact angle, and the adhesion was confirmed by applying water-based ink and testing according to ASTM_D3363. For the durability of the polymer surface, the IPL post-treatment process was used to improve the hardness and toughness against applied voltage, and the pencil hardness test and nanoindentation test were conducted. Through this, we analyzed and proposed solutions to ensure the reliability and durability of polymer devices in polymer microfabrication against environmental factors such as moisture, temperature fluctuations and adhesion, and surface abrasion.