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Effect of DC Bias on the Growth of Nanocrystalline Diamond Film over Poly-Silicon Substrate (DC Bias가 다결정 실리콘 기판 위 나노결정 다이아몬드 박막의 성장에 미치는 영향)

  • Kim, Seon-Tae;Gang, Chan-Hyeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.180-180
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    • 2016
  • 보론이 도핑된 $3{\times}3cm$ 크기의 p 형 다결정 실리콘 기판의 표면을 경면연마한 후, 다이아몬드 입자의 seeding을 위해 슬러리 중 다이아몬드 분말의 입도를 5 nm로 고정하고 초음파 전처리 공정을 진행한 후, 다이아몬드 박막을 증착하였다. 다이아몬드 증착은 Microwave Plasma Chemical Vapor Deposition 장비를 이용하였으며, 공정 조건은 초기 진공 $10{\times}10^{-3}Torr$, 공정 가스 비율 $Ar:CH_4=200:2$, 가스 유량 202 sccm, 공정압력 90 Torr, 마이크로웨이브 파워 600 W, 기판 온도 $600^{\circ}C$이었다. 기판에 DC bias 전압을 인가하는 것을 공정 변수로 하여 0, -50, -100, -150, -200 V로 변화시켜가며, 0.5, 1, 2, 4 h 동안 증착을 진행하였다. 주사전자현미경과 XRD, AFM, 접촉각 측정 장비를 이용하여 증착된 다이아몬드 입자와 막의 특성을 분석하였다. 각 bias 조건에서 초기에는 다이아몬드 입자가 형성되어 성장되었다가 시간이 증가될수록 연속적인 다이아몬드 막이 형성되었다. Table 1은 각 bias 조건에서 증착 시간을 4 h까지 변화시키면서 얻은 다이아몬드 입자 또는 박막의 높이(두께)를 나타낸 것이다. 2 h까지의 공정 초기에는 bias 조건의 영향을 파악하기 어려운데, 이는 bias에 의한 과도한 이온포격으로 입자가 박막으로의 성장에 저해를 받는 것으로 사료된다. 증착시간이 4 h가 경과하면서 -150 V 조건에서 가장 두꺼운 막이 성장되었다. 이는 기판 표면을 덮은 다이아몬드 박막 위에서 이차 핵생성이 bias에 의해 촉진되기 때문으로 해석된다. -200 V의 조건에서는 오히려 막의 성장이 더 느렸는데, 이는 Fig. 1에 보이듯이 과도한 이온포격으로 Si/diamond 계면에서 기공이 형성된 것과 연관이 있는 것으로 보인다.

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A Study on Cast Structure and Mechanical Properties of Al-10% Mg Alloy Solidified Under High Hydraulic Pressure (고압주조한 Al-10% Mg 합금의 주조조직 및 기계적 성질에 관한 연구)

  • Jeong, Woo-Hyon;Jeong, Jong-Yeon;Lee, Jong-Nam
    • Journal of Korea Foundry Society
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    • v.3 no.1
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    • pp.28-36
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    • 1983
  • In order to study the cast structure and mechanical properties of Al-10 % Mg alloy solidified under the various high hydraulic pressure, ranging from $0kgf/cm^2$ to $2000㎏f/cm^2$ , the relationship between the cooling rate and the cast structure was observed, and also the mechanical test and the measurement of the specific gravity were carried out. From this experiment, results were summerized as follows; 1. The cooling rate of the alloy increased with increase of the applied pressure. 2. The formation of the piping and the porosity in the castings was surpressed by applying the high hydraulic pressure. 3. The dendrite arm spacing decreased with increase of the applied pressure. 4. Mechanical properties and specific gravity increased with the increase of the applied pressure.

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Friction Characteristics of Oil-impregnated Sintered-Metal Bearing (유체동압 함유소결베어링의 마찰특성)

  • Jung, Gwang-Sub;Kim, Byung-Joo;Jung, Dae-Hyun;Park, Wang-Sik;Lee, Ho;Lee, Young-Je
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.04a
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    • pp.62-68
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    • 1997
  • 현재 널리 보급되어 있는 볼베어링은 몇개의 볼에 의해 작동하기에 회전이 불균일하며 진동과 소음이 크다. 이는 고속에서 한계를 갖는 주된 원인이 되고 있다. 또한 그리스의 손실로 인한 수명의 단축이나, 유출된 그리스로 인한 손상은 제품의 내구성에 치명적인 결과를 초래한다. 더욱이 기존에 사용하는 소형 정밀 베어링은 전량 수입에 의존하고 있으며, 기술 선진국의 기술이전 회피로 개발이 어려우며, 수입물량도 확보하기 어려운 상황이다. 이를 극복하기 위한 하나의 방법이 볼과 그리스를 대신해서 유체의 압력을 이용한 유체동압베어링의 개발이다. 유체동압을 이용한 베어링의 장점은 그리스의 누유가 없고, 이로 인한 설계상의 제약이 없으며, 볼베어링으로는 불가능한 고속회전에 적합하고, 안전성이 뛰어나며 회전이 균일하여 제품의 신뢰성을 향상시킬 수 있다. 유체동압 함유소결함유베어링은 진동과 소음이 적고, 저렴하며 구조가 간단하고, 급유기를 필요로 하지 않는 자기윤활(self-lubrication)특성과 생산성 등 많은 장점을 가지고 그 사용범위가 점차 광범위하게 넓어지고 있지만, 저속상태에서의 유막형성, 고속상태에서 기름의 누유, 고하중상태에서 강도와 기공의 눌어붙음과 출발과 정지 시에 발생하는 두 금속간의 직접 접촉을 피할 수 없는 것과 같은 해결해야 하는 문제를 가지고 있다. 본 연구에서는 이러한 단점을 해결하기 위하여 유체동압 함유소결베어링이 마찰특성을 알아보고자 한다.

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Extended Unmixing-Mixing Scheme for Prediction of 3D Behavior of Porous Composites (다공성 복합재료의 삼차원 거동 예측을 위한 분리-혼합 기법의 확장)

  • Choi, Hoi Kil;Shin, Eui Sup
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.41 no.2
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    • pp.91-97
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    • 2013
  • Pyrolysis and surface recession of charring composites are progressed primarily in the thickness direction. The unmixing-mixing scheme is applied to describe the in-plane and through-thickness behaviors of porous composites. The extended unmixing-mixing equations are based on transverse isotropy of unidirectionally fiber-reinforced composites. The strain components of gas pressure in pores, thermal expansion, and chemical shrinkage are included in the constitutive model. By analyzing micromechanical representative volume elements of porous composites, the validity of the derived equations are examined.

A Numerical Study on the Flow Characteristics in the Catalytic Muffler with Different Inlet and Outlet Configurations (입구 및 출구 형상 변화에 따른 촉매 삽입형 머플러 내부의 유동 해석)

  • An, Tae Hyun;Lee, Seung Yeop;Park, Yun Beom;Kim, Man Young
    • Transactions of the Korean Society of Automotive Engineers
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    • v.21 no.5
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    • pp.59-66
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    • 2013
  • Lack of the space in many diesel vehicles make it difficult to design and install the catalytic muffler to reduce emissions. For this reason, inlet part of the catalytic muffler is made of L-type which has lower flow uniformity than conventional I-type, and catalytic muffler has complex internal structure by various insertions, which affect the flow uniformity and pressure drop of the systems. In this work, the flow characteristics such as flow uniformity and pressure drop have been numerically investigated by changing such various geometries as inlet shape, porosity, and outlet shape inside the muffler with the three-dimensional turbulent incompressible flow solver. Total 4 different cases are considered in order to find optimal configurations of the catalytic muffler in view of high flow uniformity and low pressure drop. The results show that Case 2 which has no induction cone and outlet perforated pipe has higher uniformity index and lower pressure drop than others considered in this work.

Preparation of the Large Size Polybutadiene Latexes by Membrane Emulsification Process (막유화법을 이용한 대구경 폴리쿠타디엔 라텍스의 제조에 관한 연구)

  • 이해준;김중현
    • Membrane Journal
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    • v.6 no.3
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    • pp.166-172
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    • 1996
  • For the preparation of polybutadiene latexes with suitable particle size, membrane e$$\mu$sification, which is capable of easy and uniform control of particle size, was used in this study. The parameters were the type and amount of surfactants, amount of additive and pressure. Particle size and distribution of prepared latexes were measured and compared with those of e$$\mu$sion prepared by homogenizer. To investigate the membrane e$$\mu$sification mechanism, theoretical drop size was calculated by Harkins-Brown equation. When the amount of surfactant with more than 0.2 wt%(based on DDI water) was added in the continuous phase, the stable e$$\mu$sion was prepared. Other parameters showed little relationship with particle size and distribution. In this membrane e$$\mu$sification, the essential factor for determining the particle size was the pore size of the membrane.

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Comparison of the Heat transport Limitations for Screen Mesh Wick and Sintered Metal Wick Heat Pipes by Theoretical Analysis (이론적 해석에 의한 스크린 메쉬윅과 소결윅 히트파이프의 열수송 한계 비교)

  • Kim Keun-Bae;Kim Yoo
    • Journal of Energy Engineering
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    • v.13 no.4
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    • pp.267-274
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    • 2004
  • Theoretical analysis for predicting the heat transport limitations of screen mesh wick and sintered wick heat pipes was performed. The heat pipe diameter was 8mm and water was used for working fluid. For the 250 mesh, each capillary pressures and heat transport limitations, thermal resistances were analyzed according to the operating temperatures, wick thicknesses and inclination angles, based on the effective capillary radius (r$\_$c/), porosity ($\varepsilon$) and permeability (K). The wick capillary limitation was increased as the operating temperature and the wick thickness were increased, and generally the sintered wick showed higher heat transport limitations than that of the screen wick. The thermal resistance of the screen wick was higher than that of the sintered wick and both thermal resistances were linearly increased as the wick thickness was increased.

Structure direct agent-assisted hydrothermal synthesis and small gases adsorption behavior of pure RHO zeolite (구조유도물질 18-crown-6 ether를 이용한 순수한 RHO 제올라이트 수열합성과 작은 가스 흡착 거동)

  • Kim, Beom-Ju;Sharma, Pankaj;Han, Moon-Hee;Cho, Churl-Hee
    • Journal of Energy Engineering
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    • v.23 no.4
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    • pp.141-149
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    • 2014
  • In the present study, pure RHO zeolite was hydrothermally synthesized by using 18-crown-6 ether as a structure directing agent(SDA), and the small gases adsorption was investigated. Synthesized RHO zeolite was a cube shape particle of which average edge length was around $1.2{\mu}m$ and composed of primary crystallites having a diameter of around 100 to 200 nm. RHO zeolite structure was stable under 3h calcination at $600^{\circ}C$. Water adsorption data announced that RHO zeolite has a specific surface area of 483.32 m2/g and its micropore diameter was about 4 A. Gas adsorption was studied in the pressure range of 50 to 500 kPa for $CO_2$, $N_2$, $O_2$ and $H_2$. It was evident that RHO zeolite showed a strong $CO_2$ adsorption behavior. Especially, RHO zeolite showed a transient $CO_2$ adsorption behavior. The 3h $CO_2$ up-take at 50 kPa and 500 kPa was 1.283 and 3.357 mmol/g, respectively. The $CO_2/H_2$ selectivity was around 16 at 500 kPa. Compared with gas adsorption data for some representative microporous adsorbents, it was certain that RHO zeolite is a beneficial adsorbent for $CO_2/H_2$ separation.

Apparent Densification Rate and Initial Permeability of NiCuZn Ferrite Depended on Relative Packing Density (NiCuZn Ferrite의 겉보기 고화속도와 초기투자율의 충진율 의존성에 관한 연구)

  • 류병환;이정민;고재천
    • Resources Recycling
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    • v.7 no.4
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    • pp.27-34
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    • 1998
  • In this research, the processing control of NiCuZn Ferrite (NCZF) had been studied. NiCuZn Ferrite, which calcined at $700^{\circ}C$ for 3 bours, was ball milled for about 60 hours to ill김ke a size of $0.5\mu\;extrm{m}$ followed by granulation using spray dryer Apparent densincatioo rate and initial permeability of NiCuZn Ferrite with an initial packing density had been investigated as f follows. 1.The relative packing density of NCZF green body increas$\xi$d in the range of 48.6-56.8% with an increased forming pressure of 20-170 MPa. 2. The higher the relative pac퍼ng density of NCZF and the sintering temperature are, the higher the initial densification rate. The increased bulk rlcnsity of NCZF was attributed to the densification rate with decreased open pore and increased closed pore as the relative packing density, sintering temperature, and sinteriog tim$\xi$ increased. 3. The initial P permeability of NCZF with constant composition is logarithmically proportional to the bulk density of NCZF sintered at $875~925^{\circ}C$ for 0-5h, and strongly depended on the relative packing density of NCZF green body. The empirical equation is as f follows; log $\mu$i=$G1{\times}BD$+$G2{\times}RPD$+b(0);where, G1, G2; gradient, B.D: bulk density, RPD; relative packing density, b(0); intercept.

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Strengthening of Fiber-Reinforced $\gamma$-LiAlO$_2$ Matrixes for Molten Carbonate Fuel Cell by Laminatin (용융탄산염 연료전지용 화이버 강화 $\gamma$-LiAlO$_2$ 매트릭스의 적층에 의한 강도 증진)

  • 현상훈;조성철;홍성안
    • Journal of the Korean Ceramic Society
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    • v.36 no.2
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    • pp.107-115
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    • 1999
  • Microstructural variation and strengthening effects with lamination methods of alumina fiber-reinforced ${\gamma}$-LiAlO2 matrixes for Molten Carbonate Fuel Cell(MCFC) were studied. The porosities of all matrix laminated by hot-pressing of two green sheets under 1 kg/$\textrm{cm}^2$ at 45$^{\circ}C$ for 1 min and by double-casting which the second layer cast on the first green sheet dried for 3.5h were more than 50%. The strength of the Al2O3 fiber-reinforced matrix prepared by lamination was enhanced by 70% in comparison with the non-laminated matrix (115 gf/$\textrm{mm}^2$) and the strength-directionality due to fiber-orientation also could be removed. The strength of matrixes laminated by triple-casting was higher than that of the double-cast matrix, but triple-cast matrix showed the directionality with the casting direction, and furthermore its porosity was less than 50%. Although the strength of matrixes laminated by double-casting (195 gf/$\textrm{mm}^2$) is slightly less than that of matrixes laminated by hot-pressing (212 gf/$\textrm{mm}^2$), the double-casting method was evaluated to be more efficient laminating process in MCFC matrix processing.

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