• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1724-1729
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• 2007

Smaller size and higher integration of electronic systems make narrower interconnect pitch not only in chip-level but also in package-level. Moreover electronic systems are required to operate in harsher conditions, that is, higher current / voltage, elevated temperature/humidity, and complex chemical contaminants. Under these severe circumstances, electronic components respond to applied voltages by electrochemically ionization of metals and conducting filament forms between anode and cathode across a nonmetallic medium. This phenomenon is called as the Electrochemical migration

• Korean Chemical Engineering Research
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• v.50 no.4
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• pp.749-753
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• 2012

In present work, anode support for micro-tubular SOFC was fabricated with outer diameter of 3 mm and characterized with microstructure, mechanical properties and gas permeability. The microstructure of surface and cross section of a porous anode support were analyzed by using SEM (Scanning Electron Microscope) image. The gas permeability and the mechanical strength of anode support was measured and analysed by using differential pressure at the flow rates of 50, 100, 150 cc/min. and using universal testing machine respectively. The unit cell composed of NiO-YSZ, YSZ, YSZ-LSM/LSM/LSCF was fabricated and operated with reaction temperature and fuel flow rate and showed maximum power density of $1095mW/cm^2$ on the condition of $800^{\circ}C$. The performance of single cell for micro-tubular SOFC increased with the increasing the reaction temperature due to the decrement of ohmic resistance of cell by the increment of the ionic conductivity of electrolyte through the evaluation of electrochemical impedance analysis for single cell with reaction temperature.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.9
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• pp.897-902
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• 2011

Chemical reactions occurring in a PEMFC are dominated by the physical conditions and interface properties, and the reactions are expressed in terms of impedance. The performance of a PEMFC can be simply diagnosed by examining the impedance because impedance characteristics can be expressed by an equivalent electrical circuit. In this study, the characteristics of a PEMFC are assessed using the AC impedance and various equivalent circuits such as a simple equivalent circuit, equivalent circuit with a CPE, equivalent circuit with two RCs, and equivalent circuit with two CPEs. It was found in this study that the characteristics of a PEMFC could be assessed using impedance and an equivalent circuit, and the accuracy was highest for an equivalent circuit with two CPEs.

• Composites Research
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• v.19 no.5
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• pp.7-11
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• 2006

The improved SWNTs/PANi composite actuator films applicable to an artificial muscle were fabricated successfully using a new process of manufacture that consists of 90% pure single-walled carbon nanotubes (SWNT) and chemical polymerization. PANi is electrically conducting polyaniline polymer. The conductivities of the composite SWNTs/PANi film-type actuators and the pure PANi films fabricated were measured as 56.15 S/cm and 17.38 S/cm, respectively, by the 4-prove method. The conductivity of the composite actuator is 3.2 times higher than the pure PANi film. The fabricated composite actuator showed higher conductivity than any other similar ones. The quality of samples was investigated by an electron scanning microscope (SEM). To measure the actuating strains, a specially designed beam balance apparatus was developed and strains of the composite actuators was measured by a laser displacement sensor subjected to electric currents. During the operation, the sample was soaked in the $NaNO_3$ solution and the sine-wave voltage in the range of $+1V{\sim}-1V$ was applied. The length of the composite actuator changed from $l_0=12.690$ mm to $l_1=12.733$ so that the change of length was l=0.043 mm and the strain was 0.34 %. This is a very high strain for this kind of a composite actuator. Other result reported by Tahhan showed 0.23 % strain, so that the present result is improved by 48%.

• Applied Chemistry for Engineering
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• v.35 no.4
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• pp.273-283
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• 2024

As the adverse environmental impacts due to plastic waste become more severe, there is an increasing demand for developing a sustainable ecosystem using biodegradable polymers. Biodegradable polymers are those that can be biochemically decomposed through the enzymatic activity of microorganisms. Currently, a variety of biodegradable polymers with varying properties is being investigated. In particular, polymer blends with an aim to control the biodegradation rate and mechanical properties are under active research. The biodegradable polymer industry, which has not yet reached economies of scale, does not have a cost advantage compared to petroleum-derived polymers. To overcome this challenge, there is an urgent need to expand its application fields to various high-value industries (separators, electronic materials, and medical fields). This review summarizes the current state-of-the-art biodegradable polymers, polymer blends, and recent research trends in new niche applications.

• Journal of the Korea Society for Simulation
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• v.22 no.4
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• pp.93-98
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• 2013

In this paper, the proposed shallow trench isolation structures for high threshold voltage for very large scale and ultra high voltage integrated circuits MOSFET were simulated. Physically based models of hot-carrier stress and dielectric enhanced field of thermal damage have been incorporated into a TCAD tool with the aim of investigating the electrical degradation in integrated devices over an extended range of stress biases and ambient temperatures. As a simulation results, shallow trench structure were intended to be electric functions of passive, as device dimensions shrink, the electrical characteristics influence of proposed STI structures on the transistor applications become stronger the potential difference electric field and saturation threshold voltage.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.375.2-375.2
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• 2016

그래핀(Graphene)은 원자 한 층 두께의 얇은 특성에 기인하여 우수한 투과도(~97.3%)를 나타내며, 높은 전자 이동도($200,000cm^2V^{-1}s^{-1}$)로 인하여 전기 전도도가 우수한 2차원 전자소재이다. 또한 유연하고 우수한 기계적 물성을 가지고 있어 실제로 다양한 소자에서 활용되고 있다. 그래핀을 이용하여 다양한 소자로 응용하기 위한 과정 중 하나인 포토리소그래피 공정(Photolithography process)은 원하는 패턴을 만들기 위해 제작하고자 하는 기판 위에 포토레지스트(Photoresist)를 코팅하는 과정을 거치게 된다. 하지만 이러한 과정은 소자 제작에 있어서 포토레지스트 잔여물을 남기게 된다. 그래핀 위에 남은 포토레지스트 잔여물은 그래핀의 우수한 전기적 특성을 저하시켜 소자특성에 불이익을 주게 된다. 본 연구에서는 수소 플라즈마를 이용하여 그래핀 위에 남은 중합체(Polymer) 잔여물을 제거한다. 사용한 그래핀은 화학 기상 증착법(Chemical vapor deposition)을 이용하여 성장시켰으며, PMMA(Poly(methyl methacrylate))를 이용하여 이산화규소(silicon dioxide) 기판에 전사하였다. 그래핀의 손상 없이 중합체 잔여물을 제거하기 위해 플라즈마 처리시간을 15초부터 1분까지 늘려가며 연구를 진행하였으며, 플라즈마 처리 시간에 따른 중합체 잔여물의 제거 정도와 그래핀의 보존 여부를 확인하기 위해 라만 분광법(Raman spectroscopy)과 원자간력현미경(Atomic force microscopy)을 사용하였다. 본 연구 결과를 통해 간단한 플라즈마 처리로 보다 나은 특성의 그래핀 소자를 얻게 됨으로써, 향상된 특성을 가진 그래핀 소자로 산업적 응용 가능성을 높일 수 있을 것이라 생각된다.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.107-108
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• 2006

In this work, we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interface. $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ (BLT) ferroelectric film was fabricated by the sol-gel method. However, there have been serious problems in CMP in terms of repeatability and defects in patterned wafer. Especially, dishing & erosion defects increase the resistance because they decrease the interconnect section area, and ultimately reduce the lifetime of the semiconductor. Cross-sections of the wafer before and after CMP were examined by Scanning electron microscope(SEM). Process characteristics of non-dishing and erosion were investigated.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.615-615
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• 2013

탄소나노튜브(carbon nanotubes; CNT)는 강철보다 10~100배 견고할 뿐만 아니라 영률과 탄성률 은 각각 1.8 TPa, 1.3 TPa에 달하는 매우 우수한 기계적 강도를 지니고 있으며, 구리보다 좋은 전기 전도도와 다이아몬드의 2배에 이르는 열전도도를 지닌 물질이다. 이러한 탄소나노튜브의 우수한 특성을 이용하여 나노섬유, 고분자-탄소나노튜브의 고기능 복합체, 나노소자, 전계방출원(field emitter), 가스센서 등 다양한 분야로의 활용을 위한 연구가 진행되고 있다. 특히, 수백 ${\mu}m$ 이상의 길이로 수직 성장된 탄소나노튜브(VA-CNTs)의 합성은 길이 대 직경의 비(aspect ratio)가 비약적으로 증가하여 앞서 언급한 분야로의 활용이 더욱 유리하며, 그 중에서도 대량 생산, 나노섬유 및 나노복합체로서의 활용에 극히 유용하다. 최근에는 열 화학기상증착(thermal chemical vapor deposition; TCVD)법을 이용하여 탄소나노튜브의 구조를 제어하는 연구들이 많이 보고되고 있다. 열 화학기상증착을 이용한 수직 정렬된 탄소나노튜브의 합성에서 합성조건의 변화는 탄소나노튜브의 길이, 벽의 수, 직경, 결정성 등 구조에 큰 영향을 미친다. 탄소나노튜브는 이러한 구조에 따 라 물리적 특성이 달라지기 때문에 다양한 분야로의 응용을 위해서는 합성에 대한 근본적인 이해 가 절실히 요구된다. 본 연구에서는 열 화학기상증착법을 이용한 합성에서 성장압력의 변화에 따른 탄소나노튜브의 구조적 특성을 조사하였다. 성장압력의 변화는 탄소나노튜브의 밀도, 길이, 결정성에 큰 영향을 미치는 것을 주사전자현미경과 라만분광법을 이용하여 확인하였다. 이러한 결과 는 탄소나노튜브 박막(CNT forest)의 가장자리(edge)에 비정질 탄소(amorphous carbon)의 흡착으로 인한 나노튜브사이의 간격(intertube distance)이 좁아짐에 따른 가스공급 차단 효과로 설명이 가능 하다. 또한, 마이크로웨이브 플라즈마 화학기상증착법을 이용하여 탄소나노튜브를 합성하였다. 합성과정 중 산소(O2)를 주입 하였을 경우, 그렇지 않은 경우에 비하여 성장 속도가 증가하여 3시간 합성 시 2 mm가 넘는 수직 정렬된 탄소나노튜브를 합성 할 수 있었다. 이러한 결과는 과잉 공급 되어 탄소나노튜브로 합성되지 못하고 촉매금속의 표면과 탄소나노튜브의 벽에 비정질의 형태로 붙어있는 탄소 원자들을 추가 주입해 준 산소에 의하여 CO 또는 CO2 형태로 제거해 줌으로써 활성화된 촉매금속의 반응 시간을 향상 시켜주어 탄소공급이 원활하게 이루어졌기 때문이라 생각된다.

• Journal of Adhesion and Interface
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• v.23 no.3
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• pp.75-79
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• 2022

Graphene is a two-dimensional carbon allotrope composed of honeycomb sp² hybrid orbital bonds. It shows excellent electrical and mechanical properties and has been spotlighted as a core material for next-generation electronic devices. However, it exhibits low environmental stability due to the easy penetration or adsorption of external impurities from the formation of an unstable interface between the materials in the electronic devices. Therefore, this work aims to improve and investigate the low environmental stability of graphene-based field-effect transistors through direct growth using solid hydrocarbons as a precursor of graphene. Graphene synthesized from direct growth shows high electrical stability through reduction of change in charge mobility and Dirac voltage. Through this, a new approach to utilize graphene as a core material for next-generation electronic devices is presented.