• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1999.05a
• /
• pp.211-213
• /
• 1999

In this paper, we documented the controlling oxide removal amount on the pattern wafer using removal rate and removal thickness of blanket wafer. There was the strong correlation relationship for both(correlation factor:0.7109). So, we could confirm the repeatability as applying for STI CMP process from the obtained linear formular. As the result of repeatability test, the difference of calculated polishing time and actual polishing time was 3.48 seconds based on total 50 lots. If this time is converted into the thickness, it is from 104$\AA$ to 167$\AA$. It is possible to be ignored because it is under the process margin.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.113-114
• /
• 2005

Sufficient removal rate with adequate selectivity to realize the pattern mask of tetra-ethyl ortho-silicate (TEOS) film for the vertical sidewall angle were obtained by chemical mechanical polishing (CMP) with commercial silica slurry as a function of pH variation. The changes of X-ray diffraction pattern and dielectric constant by CMP process were negligible.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.07a
• /
• pp.647-648
• /
• 2005

The development of CMP slurry chemistry for Ni that provides good CMP performance is the key for nickel based MEMS device fabrication. In this study, CMP of nickel was performed using different slurry versus oxidizer ratios arid different oxidizers also alumina particles as an abrasive.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.225-225
• /
• 2012

DLC (Diamind-Like Carbon) 코팅은 1970년대 이온주입기술을 통하여 개발된 것이 처음으로 알려져 있으며, 다이아몬드 구조인 SP3 구조와 그라파이트 구조인 SP2 구조가 혼재되어 있으면서 제조 방법에 따라 수소와 Si 및 다양한 금속을 내재시킬 수 있는 코팅 물질이다. DLC는 높은 경도, 내마모성, 윤활성, 표면조도 등 뛰어난 기계적 특성과 전기절연성, 화학적 안정성 그리고 높은 광학적 투과성을 가져 산업적 활용 잠재력이 높은 재료로 평가되고 있으며, 이외에도 낮은 공정 온도에서 증착할 수 있고, 고경도와 낮은 마찰계수를 가지고 있는 장점이 있다. 그러나, DLC가 열적으로 불안정하기 때문에 사용되는 환경이 $500^{\circ}C$ 이상이 되면 DLC는 자체의 성질을 잃고 거의 흑연에 가까운 물질이 되어버리는 문제가 있고, 또한 높은 압축응력과 기재와의 낮은 밀착력이 단점으로 나타나고 있다. 이에 본 연구는 그런 단점을 보완하고자 PECVD (Plasmas Enhanced Chemical Vapor Deposition) 방법으로 DLC박막에 여러 가지 첨가원소(F,Si,0)를 사용하여 증착시킨 후 400, 500, $600^{\circ}C$에서 1시간동안 열처리를 진행하였으며, 그에 따른 내열 특성을 평가하였다. 또한 염수분무 테스트를 통한 박막의 내식 특성을 평가하였다. DLC박막의 구조는 Raman Spectra을 통해, Sp3 (like diamond) peak와 Sp2 (like graphite) peak 의 혼재 여부를 분석하였고, FE-SEM을 이용하여 막의 표면 및 단면을 관찰하였다. 스크래치 테스트를 통해 DLC박막의 밀착력을 측정하였으며, 볼 온 디스크 타입의 Tribo-meter을 이용하여 마찰계수 변화를 관찰하였다. 또한 나노인덴터를 이용하여 미소경도를 측정하였다. 그 결과 일반 DLC 막에 비해 첨가원소가 함유된 DLC 박막에서 내식성 및 내열특성이 향상되었다.

• Applied Chemistry for Engineering
• /
• v.32 no.6
• /
• pp.607-612
• /
• 2021

Silicon (Si) is one of the promising active materials to replace the widely used graphite because of its low electrochemical potential and high theoretical capacity. However, Si anodes still face in problems with the huge volume expansion and continuous decomposition of the electrolyte during repeated charge and discharge processes. To address these issues, a cross-linkable waterborne polyurethane (CWPU) based on a bio-oil, castor oil, was prepared and reacted with Tris(2,3-epoxypropyl) isocyanurate (TGIC) linkers, resulting in the formation of a mechanically robust 3D network structure. Si anodes fabricated with the CWPU-TGIC exhibited stable cycling performances and excellent discharge capacities. The results revealed that the CWPU-TGIC binder efficiently accommodates the large volume change for Si anode during charge and discharge cycles. Overall, the eco-friendly binder shows great promise in improving the electrochemical performances of Si anodes.

• Journal of Adhesion and Interface
• /
• v.24 no.4
• /
• pp.120-123
• /
• 2023

Graphene, with its exceptional mechanical and electrical properties, has gained significant attention from researchers due to its superior characteristics compared to conventional materials. However, the application of graphene in electronic devices requires a crucial transcription and patterning process, which often introduces numerous defects, substantially impairing its properties. To overcome this limitation and unlock the full potential of graphene for commercial use, there have been various efforts to develop integrated processes for transcription and patterning. In this study, we present a novel growth method that simultaneously achieves precise patterning using polymer nanowires as masks, allowing for the direct growth of graphene. This innovative approach holds promise for realizing advanced electronic components based on nanomaterials in the future.

• Transactions of the Korean hydrogen and new energy society
• /
• v.10 no.4
• /
• pp.225-232
• /
• 1999

The $Mg_2Ni$ hydrogen storage alloys which have much higher theoretical discharge capacity than $AB_5$ and $AB_2$ type alloys were synthesized by mechanical alloying with some additives and subjected to the electrochemical measurements. Two different processes were employed to the synthesis of $Mg_2Ni$ alloys with using the high energy ball mill SPEX 8000. One was only ball milling, 12 hrs, the Mg and Ni powders for 12 hrs with additives such as $AB_5$, Ni, Co and Cu powders. In the other process the Mg and Ni powders were ball milled for 1 hr first and then heat treated at $300{\sim}400^{\circ}C$ for 1 hr to get $Mg_2Ni$ alloy, and finally the $Mg_2Ni$ alloy powders were ball milled with the additives for 12 hrs. The alloy powders prepared were compacted at room temperature under $7.64tons/cm^2$ into disk type electrodes for the electrochemical measurements. The experimntal results showed that the electrodes prepared with the heat treated alloy powders had a higher discharge capacities than those without heat treatment. The addition of Ni caused an increase of the discharge capacity and the addition of Co improved the cycling characteristics. The electrode prepared by ball milling of $Mg_2Ni$ and 10wt% Ni powders has showed the highest discharge capacity, 546mAh/g.alloy, which was 55% of the theoretical capacity.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2018.06a
• /
• pp.26.2-26.2
• /
• 2018

최근 연구결과에 따르면, 상용 AZ91D 마그네슘합금에 Ca과 Y을 복합 첨가함으로써 마그네슘합금의 문제점인 발화저항성을 크게 향상시키는 동시에 충분한 기계적 특성을 확보할 수 있어 마그네슘합금의 적용분야 확대에 대한 기대가 높아지고 있다. 한편 Ca과 Y을 복합 첨가된 마그네슘합금은 기존의 상용합금에 비해서 매우 우수한 내식성을 나타내는 것으로 알려져 마그네슘합금의 또 하나의 장애물로 여겨졌던 부식 문제 또한 해결할 수 있을 것으로 기대되고 있다. 선행연구결과, 이러한 내식성의 향상은 Ca과 Y의 첨가에 따라 이차상의 조성이 변하게 되면서 상과 기지간의 부식 전위의 차이가 감소하고, 이로 인해 미세 갈바닉 부식 발생이 감소하게 되었기 때문으로 판단된다. 본 연구에서는 이러한 Ca 과 Y의 첨가가 이차상의 부식 전위 뿐 만 아니라 AZ91D 합금의 표면 특성을 어떻게 변화시키고 이러한 특성의 변화가 내식성에 어떠한 영향을 미치는 지에 대하여 평가하였다. 다양한 전기화학적 분석을 통해 각 합금의 표면 특성과 내식성을 평가하였고, 표면 산화층 분석 및 TEM 분석 등을 통해 표면 피막의 구조와 조성을 분석하여 차이를 비교하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.11a
• /
• pp.23-23
• /
• 2007

고체산화물연료전지(SOFC)는 연료가 갖는 화학에너지를 연소과정 없이, 공기와 $H_2$, CO, $CH_4$와 같은 환원성 가스를 공급받아 $700^{\circ}C-850^{\circ}C$에서 전기화학적 반응을 통하여 직접 전기를 얻는 방식이다. SOFC는 여러장의 단위 셀을 적층하여 스택을 구성하는데, 스택 제조시 단전지에 공급되는 산화, 환원 가스의 누출이나 흡입을 막기 위하여 밀봉재를 사용한다. 이러한 밀봉재는 완벽한 밀봉, 열에 대한 안정성, 충격에 견디는 저항성 등의 기계적인 특성 및 구성요소와의 최소한의 열팽창계수차를 가져야 한다. 따라서 본 연구에서는 $SiO_2-R_2O_3$-RO계에서 $R_2O_3$, RO의 변화에 따른 밀봉 특성 및 열팽창계수에 미치는 영향을 조사하였다.

• Clean Technology
• /
• v.28 no.4
• /
• pp.293-300
• /
• 2022

The remarkable mechanical, electrical, and thermal properties of graphene have recently sparked tremendous interest in various research fields. One of the most promising methods to produce large quantities of graphene dispersion is liquid-phase exfoliation (LPE) which utilizes ultrasonic waves or shear stresses to exfoliate bulk graphite into graphene flakes that are a few layers thick. Graphene dispersion produced via LPE can be transformed into graphene ink to further boost graphene's applications, but producing high-quality graphene more economically remains a challenge. To overcome this shortcoming, an advanced LPE process should be developed that uses relatively cheap natural graphite as a graphene source. In this study, a flow-LPE process was used to exfoliate natural graphite to produce graphene that was three times cheaper and seven times larger than synthetic graphite. The optimal exfoliation conditions in the flow-LPE process were determined in order to produce high-quality graphene flakes. In addition, the structural and electrical properties of the flakes were characterized. The electrical properties of the exfoliated graphene were investigated by carrying out an ink formulation process to prepare graphene ink suitable for inkjet printing, and fabricating a printed graphene pattern. By utilizing natural graphite, this study offers a potential protocol for graphene production, ink formulation, and printed graphene devices in a more industrial-comparable manner.