• Journal of the Microelectronics and Packaging Society
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• v.25 no.3
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• pp.61-66
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• 2018

This research scrutinizes the self-annealing characteristics of copper used to metal interconnection for application of DRAM fabrication process. As the time goes after the copper deposited, the grain of copper is growing. It is called self-annealing. We use the electroplating method for copper deposition and estimate two kinds of electroplating chemicals having different organic additives. As the time of self-annealing is elapsed, sheet resistance decreases with logarithmic dependence of time and is finally saturated. The improvement of sheet resistance is approximately 20%. The saturation time of experimental sample is shorter than that of reference sample. We can find that self-annealing is highly efficient in grain growth of copper through the measurement of TEM analysis. The structure of copper grain is similar to the bamboo type useful for current flow. The results of thermal excursion characteristics show that the reliability of self-annealed sample is better than that of sample annealed at higher temperature. The self-annealed sample is not contained in hillock. The self-annealed samples grow until $2{\mu}m$ and develop in [100] direction more favorable for reliability.

• Journal of the Korean Chemical Society
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• v.38 no.1
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• pp.55-60
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• 1994

Molecular orbital calculations at the extended Huckel level have been carried out for $Cp_2TiSiHPh(1),\;[Cp_2Ti]_2[{\mu}-HSi(HPh)][{\mu}-H] (2),\;and\;[Cp_2TiSiH_2Ph]_2$ (3) complexes which are important intermediates in organosilane polymerization. Stable geometry of complex 1 is not $C_{2V}$, but Cs symmetry and the rotational energy barrier of $SiH_2$ unit is computed to be 14 kcal/mol. The orbital interaction diagrams are studied to characterize the chemical bonding for the electron deficient systems, 2 and 3. It is possible for Si-H to be coordinated to the Ti metal using $\sigma$ bonding.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.140-146
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• 2010

This paper addresses recent status and trends of carbon dioxide capture technologies using dry sorbents in the flue gas. The advantages of dry sorbent $CO_2$ capture technology are broader operating temperature range, less energy loss, less waste water, less corrosion problem, and natural properties of solid wastes. Recently, U.S.A. and Korea have been developing processes capturing $CO_2$ from real coal flue gas as well as sorbents improving sorption capacity to decrease total $CO_2$ capture cost. New class of dry sorbents have been developed such as chemisorbents with alkali metals of which material cost is low, amines physically adsorbed on silica supports, amines covalently tethered to the silica support, carbon-supported amines, polymer-supported amines, amine-containing solid organic resins and metal-organic framework. The breakthrough is needed in the materials on dry sorbents to decrease capture cost.

• Electrical & Electronic Materials
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• v.5 no.4
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• pp.361-373
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• 1992

이온이나 플라즈마를 사용해서 박막형성이나 MBE진공증착법에 비해서 분자배열이나 고차구조의 제어 및 그의 다양성에 있어서 LB법에 대한 기대가 크다. 특히 습식법인 점에서 생체기능을 짜넣을 수 있는 분자소자의 개발에는 불가능하다. 역으로 생체분자의 자기조직화나 정보전달기능을 분자 Level로 이해하는 점에서도 LB법은 중요하다고 본다. 또 저차원자성체 전도체 여기자등 물리량에 의한 차원성을 고찰하는 점에서도 LB막의 거동이 주목되고 있다. 또 자발분극된 강유전성의 고분자 즉 Poly등의 박막에 광조사를 하면 광생성된 캐리어가 내부전계에 따라서 이동하고 ~$10^{4}$V 정도의 높은 광기전력을 발생시키는 것도 나타났다. 얻어진 전류는 단지 초전효과를 상회하고 광전류라고 할 수 있다. 쇼트키형 소자의 금속-반도체의 절연막층을 MIS형이라고 하며 특성이 향상된다. SnO$_{2}$/NiPc/Polyethylene막/Al형 광전지가 만들어졌다. 광전변환막이 다양한 목적에 사용되리라 사료되며 지금은 초기 연구단계이나 실용화하는데는 많은 시간이 소요되나 간단한 디바이스 등과 같은 것은 제작이 가능할 것이며 광에너지로 힌한 화학, 전기, 역학 에너지로 변환되는 데는 시간 문제인것 같다. 1년간 일본 동경공업대학 생명이공학부에서 연구한 내용을 정리하여 보았으며 이에 협조하여 주신 문교부 학술진흥재단에 감사드리며 또 등평연구실에 감사드린다.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.485-492
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• 2006

Two new copper(I) complexes with organic ligands, $[Cu^I(hfac)]_2(DVTMSO)$ and $[Cu^I(hfac)]_2(HD)$ (hfac=hexafluoroacetylacetonate, DVTMSO=1,2-divinylte-tramethyl-disiloxane, HD=1,5-hexadiene) were synthesized and used for copper metal-organic chemical vapor deposition. In these compounds, two Cu(hfac) fragments are bonded by one neutral ligand forming unusual structure with respect to other Cu(I) complexes. The compounds exhibited relatively high volatility and stability when compared to other copper(I) precursors. By using the reported compounds as precursors, a continuous Cu layer was not formed but the Cu islands were only observed. And the shape and size of Cu islands are significantly changed as a function of the substrate temperature.

• Korean Journal of Materials Research
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• v.7 no.2
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• pp.107-113
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• 1997

$SrBi_{2}Ta_{2}O_{9}(SBT)$ thin films wcre prepared on $Pt/Ti/SiO_{2}/Si$ suhsrrate by pL~snia-enhanced chemical vapor deposition. Sr and Ta huhhling temperatures were kept ,it $120^{\circ}C$ Iron1 X- ray tiiffriict!on. n~icrostruc~ure. and composjrional analysis of SH7' films, respectivels Hi I~ut~t~lmg tempcl.arure was varied SR'I' thin tilrns dcpositcd ar i3i buhbling temperature of $130^{\circ}C$ have dielccrric constanr of 150 anti dissipation factor of 0 02 at IOOkFic. I .eakagc wrrent density of films was ahour $1.0{\times}10^{-8}A/cm^2$ at 20kV/cm. 1.eakage current i11amcrc1istic.s of Sli'l' films nras c.ontrolled by I'oole Frcnkel emission Kenianent polariziit~on and mercivc field oi SR\ulcorner' films annealed at $550^{\circ}C$ were $9{\mu}C/cm^2$ and 70kV/cm, respectively.

• Korean Journal of Materials Research
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• v.5 no.8
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• pp.1045-1049
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• 1995

Thin films of Indium tin oxie (ITO) were prepared by the process of metal organic decomposition. Light transmittance and electrical transport properties of the films were studied with varying the firing temperature and SnO$_2$content. XRD study showed that tin substituted indium in the In$_2$O$_3$lattice. The resistivity had the minimum value of 2.5 ${\times}$ 10$\^$-3/$\Omega$-cm when the content of SnO$_2$was 9wt.%. This value was higher by a factor of 10 than the previously reported results. This difference was attributed to the low mobilities presumably caused by the fine grain size. The transmittance of ITO films in the visible range was over 90%, and the optical energy gap calculated from the absorption edge was in the range of 4.51 and 4.96eV.

• Resources Recycling
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• v.17 no.5
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• pp.52-59
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• 2008

Sol-gel process applied in this study was carried out by chelation of metal ions and citric acid. From the results of thermal gravimetric analysis and XRD analysis of gel powder obtained through sol-gel and heat treatment, gel powders are mostly amorphous, and crystallize completely at $900^{\circ}C$, and the crystalline structure of YAG increases with increasing calcinations temperature. Since YAG prepared by sol-gel & calcinations process was porous, and the sape and size was irregular and nonuniform, the shape and size of YAG powder had to be controlled. Therefore the effects of organic materials such as ethylene glycol and surfactant on the crystalline structure of YAG powder were investigated. Polyesterification of ethylene glycol and citric acid separated reaction area of metal ions in the solution and decreased the size of YAG primary particles. The addition of Igepal 630 as surfactant formed the droplet in the solution, and increased the size of primary particles which forms the aggregate of YAG In order to obtain monodispersed YAG particles of uniform size, gel powder prepared with organic materials had to be milled before calcination. And milling process was very important for obtaining YAG of uniform size.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.152-152
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• 1999

1Gb급 이상 기억소자의 캐패시터 재료로 주목받고 있는 (Ba,Sr)TiO3 [BST] 박막의 전극재료로는 Pt, Ru, Ir과 같은 금속전극과 RuO2, IrO2와 산화물 전도체가 유망한 것으로 알려져 있다. 그런데, DRAM의 집적도가 증가하게 되면, BST같은 고유전율 박막을 유전재료로 사용한다 하더라도, 3차원적인 구조가 불가피하게 때문에 기존의 sputtering 방법으로는 우수한 단차피복성을 얻기 힘들므로, MOCVD법이 필수적이다. 본 연구에서는 기존에 연구되었던 Pt에 비해 식각특성이 우수하고, 비교적 낮은 비저항을 갖는 Ru 박막증착에 대한 연구를 행하였다. 본 연구에서는 수직형의 반응기와 저항 가열 방식의 susceptor로 구성된 저압 유기금속 화학증착기를 사용하여 최대 6inch 직경을 갖는 기판 위에 Ru박막을 증착하였다. Precursor로는 기존에 연구된 적이 없는 bis-(ethyo-$\pi$-cyclopentadienyl)Ru (Ru(C5H4C2H5)2, [Ru(EtCp)2])를 사용하였으며, bubbler의 온도는 85$^{\circ}C$로 하였다. Si, SiO2/Si를 사용하였으며, 증착온도 25$0^{\circ}C$~40$0^{\circ}C$, 증착압력 3Torr의 조건에서 Ru 박막을 증착하였다. Presursor를 운반하는 수송기체로는 Ar을 사용하였으며, carbon과 같은 불순물의 제거를 위해 O2를 첨가하였다. 증착된 박막은 XRD, SEM, 4-point probe등을 통해 구조적, 전기적 특성을 평가하였으며, 열역학 계산을 위해서는 SOLGASMIX-PV프로그램을 사용하였다. Ru 박막의 증착에 있어서 산소의 첨가는 필수적이었으며, Ru 박막의 증착속도는 30$0^{\circ}C$~40$0^{\circ}C$의 온도 영역에서 200$\AA$/min으로 일정하였으며, 첨가된 산소의 양이 적을수록 더 치밀하고 평탄한 표면형상을 보였으며, 또한 더 낮은 전기 전도도를 보였다. 그리고 증착된 박막은 12~15$\mu$$\Omega$cm 정도의 낮은 비저항 값을 나타냈으며 이것은 기존의 sputtering 법에 의해 증착된 Ru 박막의 비저항 값들과 비교될만하다. 한편, 높은 온도, 높은 산소분압 조건에서 RuO2의 형성을 관찰하였으며, 이것은 열역학적인 계산을 통해서 잘 설명할 수 있었다.

• Membrane Journal
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• v.33 no.5
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• pp.240-247
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• 2023

Even among gas separation methods, CO₂ capture and separation via membranes is an ever-growing field, with many different membrane compositions continually being developed. Ionic liquid (IL) based composite membranes show excellent performance values in separating CO₂. Similarly, various copolymer/IL composite membranes also display improved performance. The addition of fillers such as graphene oxide to these copolymer/IL composite membranes shows a further enhanced version of these fillers, most likely due to the strong interactions that occur between ILs and organic fillers, which consequently improves factors such as the affinity, selectivity, and adsorption of CO₂. Copolymer/IL composite membranes utilizing a metal-organic framework (MOF) showed improved CO₂ permeability. This review discusses the study of various combinations of ionic liquid and copolymer composite membranes for carbon dioxide separation.