Deposition of copper dots with new copper precursors |
Kang, Sang-Woo
(Vacuum Center, Korea Research Institute of Standards and Science)
Seong, Dae-Jin (Vacuum Center, Korea Research Institute of Standards and Science) Shin, Yong-Hyoen (Vacuum Center, Korea Research Institute of Standards and Science) Rhee, Shi-Woo (LAMP, Department of Chemical Engineering, POSTECH) Yun, Ju-Young (Vacuum Center, Korea Research Institute of Standards and Science) |
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