• 제목/요약/키워드: 금속합금

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Electrodeposition for the Fabrication of Copper Interconnection in Semiconductor Devices (반도체 소자용 구리 배선 형성을 위한 전해 도금)

  • Kim, Myung Jun;Kim, Jae Jeong
    • Korean Chemical Engineering Research
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    • v.52 no.1
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    • pp.26-39
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    • 2014
  • Cu interconnection in electronic devices is fabricated via damascene process including Cu electrodeposition. In this review, Cu electrodeposition and superfilling for fabricating Cu interconnection are introduced. Superfilling results from the influences of organic additives in the electrolyte for Cu electrodeposition, and this is enabled by the local enhancement of Cu electrodeposition at the bottom of filling feature formed on the wafer through manipulating the surface coverage of organic additives. The dimension of metal interconnection has been constantly reduced to increase the integrity of electronic devices, and the width of interconnection reaches the range of few tens of nanometer. This size reduction raises the issues, which are the deterioration of electrical property and the reliability of Cu interconnection, and the difficulty of Cu superfilling. The various researches on the development of organic additives for the modification of Cu microstructure, the application of pulse and pulse-reverse electrodeposition, Cu-based alloy superfilling for improvement of reliability, and the enhancement of superfilling phenomenon to overcome the current problems are addressed in this review.

Improvement of Wear Resistance of Aluminum by Metal-Ceramic Particle Composite Layer (알루미늄표면에 금속-세라믹입자 복합첨가에 의한 내마모성개선)

  • ;;;中田一博;松田福久
    • Journal of Welding and Joining
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    • v.15 no.6
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    • pp.96-104
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    • 1997
  • The present study was aimed to correlate the microstructure and the hardness as well as the wear resistance of the metal-ceramic particulated composite layer on the pure Al plate. The composite layers were constructed by the addition of TiC particles on the surface of Al-Cu alloyed layers by PTA overlaying process. Initially, the Al-Cu alloyed layers were achieved by the deposition of Al-(25 ~ 48%) Cu alloys on the pure Al plate by TIG process. It was revealed that TiC particles were uniformly dispersed without any reaction with matrix in the composite layer. The volume fraction of TiC particles (TiC V F) increased from 12% to 55% with increasing the number of pass of composite layer. Hardnesses of (Al-48%Cu + TiC (3&4layers)) composite layer were Hv450 and Hv560, respectively, due to the increase of TiC V/F. Hardnesses of (Al-Cu + TiC) composite layers decreased gradually with insreasing temperature from 100$^{\circ}$C to 400$^{\circ}$C, and hardnesses at 400$^{\circ}$C were then reached to 1/5 - 1/10 of room temperature hardness depending on the construction of composite layers. The Specific wear of (Al + Tic) layer and Al-48%Cu alloyed layer decreased to 1/10 of the of pure Al, while the specific wear of (Al-48%Cu + TiC (4 layers)) composite layer exhibited 1/15 of that of steel such as SS400 and STS304.

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The Processing and Characterization of Sol-Gel Derived Ferroelectric PMN Powders and Thin Films (졸-겔법에 의한 강유전성 PMN 분말 및 박막의 제조와 특성)

  • Hwang, Jin-Myeong;Jang, Jun-Yeong;Eun, Hui-Tae
    • Korean Journal of Materials Research
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    • v.8 no.12
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    • pp.1138-1145
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    • 1998
  • The sliding wear behavior of Ni-base hardfacing alloy, Deloro 50, was investigated at the contact stresses of 15ksi and 30ksi under the various wear environments. In air at room temperature, Deloro 50 showed lower wear resistance than Stellite 6 even at 15ksi due to the occurrence of severe adhesive wear. This seems to be caused by the lower hardness and work- hardening rate of Deloro 50 than those of Stellite 6. In water at room temperature, Deloro 50 showed as good wear resistance as Stellite 6 at 15ksi. It was considered to be due to that water could effectively prevent metal to metal contact through contacting asperities. However, Deloro 50 showed severe adhesive wear at 30ksi in water at room temperature. It seems to be that the water could not suppress adhesion wear at 30ksi. At $300^{\circ}C$ in air, Deloro 50 exhibited higher wear resistance than Stellite 6 even at 30ksi. It was considered that the oxide glaze layers formed on wear surface during sliding, effectively prevented direct metal-to-metal contacts.

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다공성 타이타늄 지지체의 생체적합성에 관한 연구

  • Kim, Seung-Eon;Hyeon, Yong-Taek;Yun, Hui-Suk;Heo, Su-Jin;Lee, Si-U;Sin, Jeong-Uk;Kim, Yeong-Gon
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.49.1-49.1
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    • 2009
  • 최근 손상된 생체조직의 재생 또는 대체를 위하여 다공성의 지지체(scaffold)를 이용하는 연구가 활발히 이루어져 왔다. 지지체 재료는 조직 재생을 목적으로 하는 경우에는 생분해성 고분자, 생흡수성 세라믹스 또는 이들의 복합재료가 사용되고, 조직 대체를 목적으로 하는 경우에는 금속 또는 세라믹스 재료가 단독으로 사용된다. 현재 경조직 대체를 위한 임플란트 재료로 사용되고 있는 금속재료 중 대부분이 타이타늄 또는 타이타늄 합금이다. 타이타늄은 비강도, 내식성이 우수하며, 생체 내 환경에서 부동태피막 재생 속도가 빠르고, 섬유상 결체조직 형성 두께가 얇아 생체의료용 소재로서 각광을 받고 있다. 다공성 타이타늄은 기존 타이타늄 소재의 장점에 다공체의 구조적인 특성을 부가하여 하중을 받는 골 결손부에 사용될 경우 뼈와의 탄성계수 차이에서 기인하는 응력차폐(stress shielding) 효과를 최소화할 수 있고, 다공체 내부로 골조직 성장을 유도할 수 있어 지지체와 골조직이 일체화되는 골융합 효과의 극대화를 기대할 수 있다. 본 연구에서는 기공 구조를 다양하게 제어할 수 있고, 3차원적 연결 기공구조를 만들 수 있는 적층조형(layer manufacturing) 기술을 이용하여 3차원 다공성 타이타늄 지지체를 제조하였으며, 이에 대한 세포독성, 조골세포 증식능 등 in vitro 생체적합성을 평가하고, Rat model 을 이용한 in vivo 생체적합성을 평가하였다. 또한 지지체의 골조직 재생 유도성의 증대를 위한 생체활성처리 영향도 분석 평가하였다.

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A Evaluation of Corrosion Resistance on the Thermal Sprayed Coating Tube and Cladded Tube of the Open Rack Vaporizer (용사코팅튜브와 클래드튜브 기화기에 대한 내식성 평가)

  • Baek Jong-Hyun;Lee Jae-Ho;Kim Yong-Seog;Shin Dong-Hyuck;Kim Woo-Sik
    • Journal of the Korean Institute of Gas
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    • v.2 no.4
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    • pp.67-72
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    • 1998
  • Due to excellent corrosion resistance, in particular against sea water, Al-2wt.$\%$Zn alloys have been used as the sacrifice anode material for tube of the ORV. Al-2wt.$\%$Zn alloys thermal-sprayed coating, however, were spalled on the lower part of ORV due to the lack of bonding strength between base material and coating layer and the dropping energy of sea water, To overcome the problems of the thermal spray coating, we developed the cladded tube manufacturing process by coextrusion of the clad and base metal. The corrosion resistance of cladded tube was improved by two times at least, compared with that of the present thermal spray coated vaporizer tubes.

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SEM/EDS Evaluation of Gold Bonding Agent Applied on Non-precious Alloys and Cast CP-Ti (도재 소부용 비귀금속 합금과 티타늄에 적용한 Gold Bonding Agent의 전자현미경적 평가)

  • Lee, Jung-Hwan;Ahn, Jae-Seok
    • Journal of dental hygiene science
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    • v.9 no.2
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    • pp.153-160
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    • 2009
  • The purposed of this study was to investigate the effect of Gold bonding agent as intermediate layer between metal substrate and ceramic coating. Gold bonding agent used to seal off any surface porosity, to mask the greyish color of the metal, and to provide an underlying bright golden hue to the ceramic coverage. The adhesion between metal substrate and ceramic is related to diffusion of oxygen during ceramic firing. The oxide layer produced on non-precious alloy anti titanium was considered to have a potentially adverse effect on metal-ceramic bonding. The oxidation characteristics of titanium and non-precious alloys are the main problem. Every group were divided into test and control groups. Control groups are carried out process of degassing for product oxide layer. Au coating was applied on each Ni-Cr, Co-Cr alloys and cp-Ti specimens with difference surface condition or degassing. Specimens surfaces and cutting plane was characterized by SEM/EDS. Results suggested that Au coating is effective barriers to protect metal oxidation during ceramic firing.

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Evaluation of Hydrogenation Properties on Ti-Nb-Cr Alloys by Single-Roll Melt Spinning (단롤주조법에 의한 Ti-Nb-Cr 합금의 제조와 수소화 특성 평가)

  • Kim, Kyeong-Il;Hong, Tae-Whan
    • Korean Journal of Metals and Materials
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    • v.47 no.7
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    • pp.433-439
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    • 2009
  • Ti and Ti based hydrogen storage alloys have been thought to be the third generation of alloys with a high hydrogen capacity, which makes it difficult to handle because of high reactivity. In order to solve the problem, the activation of a wide range of hysteresis of hydriding/dehydriding and without degradation of hydrogen capacity due to the hydriding/dehydriding cycle have to be improved in order to be aplied. Ti-Cr alloys have a high capacity about 0.8 wt.% in an ambient atmosphere. When the Ti-Cr alloys are added to Nb and Ta elements, they formed a laves phase in the alloy system. The Nb element was expected to make easy diffuse hydrogen in the Ti-Cr storage alloy, which was a catalytic element. In this study, the Ti-Nb-Cr ternary alloy was prepared by melt spinning. As-received specimens were characterized using XRD (X-ray Diffraction), SEM (Scanning Electron Microscopy) with EDX (Energy Dispersive X-ray) and TG/DSC (Thermo Gravimetric Analysis/Differential Scanning Calorimetry). In order to examine hydrogenation behavior, the PCI (Pressure-Composition-Isotherm) was performed at 293, 323, 373 and 423 K.

The Effect of Tool Geometry on the Mechanical Properties in a Friction Stir Welded Lap Joint between an Al Alloy and Zn-coated Steel (알루미늄 합금과 아연도금강판의 이종 겹치기 마찰교반접합에서 기계적성질에 미치는 Tool Geometry의 영향)

  • Kim, Nam-Kyu;Kim, Byung-Chul;Jung, Byung-Hoon;Song, Sang-Woo;Nakata, K.;Kang, Chung-Yun
    • Korean Journal of Metals and Materials
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    • v.48 no.6
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    • pp.533-542
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    • 2010
  • The specific motivation for joining an Al alloy and Zn-coated steel arises from the need to save fuel consumption by weight reduction and to enhance the durability of vehicle structures in the automobile industry. In this study, the lap joining A6K31 Al alloy (top) and SGARC340 Zn-coated steel (bottom) sheets with a thickness of 1.0 mm and 0.8 mm, respectively, was carried out using the friction stir weld (FSW) technique. The probe of a tool did not contact the surface of the lower Zn-coated steel sheet. The friction stir welding was carried out at rotation speeds of 1500 rpm and travel speeds of 80~200 mm/min. The effects of tool geometry and welding speed on the mechanical properties and the structure of a joint were investigated. The tensile properties for the joints welded with a larger tool were better than those for the joints done with a smaller tool. A good correlation between the tensile load and area of the welded region were observed. The bond strength using a larger tool (M4 and M3) decreased with an increase in welding speed. Most fractures occurred along the interface between the Zn-coated steel and the Al alloy. However, in certain conditions with a lower welding speed, fractures occurred at the A6K31 Al alloy.

Effects of Surface Modification on Biomimetic Deposition of Apatite in Zr-1Nb (표면변환이 Zr-1Nb합금의 아파타이트 석출에 미치는 효과)

  • Kim, Tae Ho;Cho, Kyu Jin;Hong, Sun Ig
    • Korean Journal of Metals and Materials
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    • v.48 no.6
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    • pp.575-580
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    • 2010
  • Effects of the surface modification on the deposition behaviors of apatite crystals in Zr-1Nb plates were studied. Zr-1Nb alloy plates were polished with abrasive papers to have different roughness and some of them were treated in NaOH or coated with collagen before deposition of apatites in the simulated body fluid (SBF). The weight gain due to the deposition of apatite crystals increased as the surface roughness increased in Zr-1Nb. The size of granular apatite crystals were found to be smaller in Zr-1Nb roughened by $162{\mu}m$ abrasive paper than in Zr-1Nb roughened by $8.4{\mu}m$ paper, suggesting the nucleation rate increased with increase of surface roughness. After, 10 days immersion in a SBF, NaOH-treated Zr-1Nb was completely coated with apatite with the deposited apatite weight comparable to that in Ti-6Al-4V. The deposition rate of Zr-1Nb was not appreciably influenced by NaOH treatment unlike the significant influence of NaOHtreatment on the deposition rate of apatite in Ti-6Al-4V. One significant observation in this study is an appreciable increase of the apatite deposition rate after collagen coating both on Zr-1Nb and Ti-6Al-4V plate, which may be caused by the interaction between collagen and $Ca^{+2}$ ions.

Effects of Alloying Elements and the Cooling Condition on the Microstructure, Tensile Properties, and Charpy Impact Properties of High-Strength Bainitic Steels (베이나이트계 고강도강의 합금원소와 냉각조건이 미세조직, 인장성질, 충격성질에 미치는 영향)

  • Sung, Hyo Kyung;Shin, Sang Yong;Hwang, Byoungchul;Lee, Chang Gil;Kim, Nack J.;Lee, Sunghak
    • Korean Journal of Metals and Materials
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    • v.48 no.9
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    • pp.798-806
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    • 2010
  • The effects of alloying elements and the cooling condition on the microstructure, tensile properties, and Charpy impact properties of high-strength bainitic steel plates fabricated by a controlled rolling process were investigated in the present study. Eight kinds of steel plates were fabricated by varying C, Cr, and Nb additions under two different cooling rates, and their microstructures and tensile and Charpy impact properties were evaluated. The microstructures present in the steels increased in the order of granular bainite, acicular ferrite, bainitic ferrite, and martensite as the carbon equivalent or cooling rate increased, which resulted in a decrease in the ductility and Charpy absorbed energy. The steels containing a considerable amount of bainitic ferrite or martensite showed very high strengths, together with good ductility and Charpy absorbed energy. In order to achieve the best combination of strength, ductility, and Charpy absorbed energy, granular bainite and acicular ferrite were properly included in the high-strength bainitic steels by controlling the carbon equivalent and cooling rate, while about 50 vol.% of bainitic ferrite or martensite was maintained to maintain the high strength.