• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.49-54
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• 2010

The cryogenic ball milling was performed on carbon nanotubes (CNTs) at an extremely low temperature to increase the dispersion of CNTs. The effects of milling speed and time on the deagglomeration and structural changes of CNTs were studied. FESEM was used to analyze the dispersion and the change of particle size before and after milling process. Transmission electron microscopic (TEM) analysis was also investigated the effect of cryogenic ball milling on the morphological characteristics of CNTs. The structural changes by the cryogenic ball milling process were further confirmed by x-ray diffraction (XRD) and Raman spectroscopic analysis. The results showed that the agglomeration of CNTs was significantly reduced and amorphous structure was observed at high milling speed. However, the milling time has no great effect on the dispersion property and structural change of CNTs compared with milling speed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.927-928
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.26 no.12
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• pp.32-40
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• 전자공학회논문지 IE
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• v.43 no.2
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• pp.11-15
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• 2006

In this paper characteristics of polycrystalline silicon crystallized by excimer laser on plastic substrate under 150$^{\circ}C$ is investigated. Amorphous silicon is deposited by rf-magnetron sputter in atmosphere of Ar and He for preventing depletion effect by dehydrogenation as deposition by PECVD. After annealing by 308 nm, 30 Hz, double pulse type XeCl excimer laser, p-chnnel low temperature polycrystalline silicon TFT which maximum mobility is $64cm^2/V{\cdot}s$ at $344mJ/cm^2$ is fabricate.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.12-12
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• 2010

첨단 공정이 필요한 반도체와 LCD, PDP, LED 등의 디스플레이 및 IT 부품을 제조하는데 필요한 장비의 고성능화와 작업환경의 고청정화에 따른 초고진공펌프의 수요 확대와 앞으로 전개될 한-미 FTA에 따른 시장 확대로 인해 크라이오펌프의 국산화가 시급한 실정이다. 고성능 크라이오펌프를 만들기 위해서는 냉각판을 극저온으로 냉각하기 위한 극저온 냉동기 개발도 중요하지만 냉각판(cryoarray)에 최대한 많은 분자를 포획시키는 것 또한 최우선적으로 고려되어야 할 사항 중 하나이다. 이에 본 논문은 크라이오펌프용 냉각판의 분자포획능력에 대하여 연구하였다. 해석에 이용한 냉각판은 현재 상용화된 모델들 중 원형 중앙판에 $45^{\circ}$ 하향 skirt가 달린 형태이며 8장의 냉각판이 일정한 간격을 두고 아래쪽으로 적층되어 있다. 냉각판의 분자포획능력의 해석은 형상계 수법(view factor method)을 이용해 수행하였다. 형상계수법은 크라이오펌프를 n개의 미소면적으로 구성된 밀폐된 공간으로 가정하고 각 미소면적요소의 온도와 흡착계수, 표면조건 그리고 분자유속이 일정하다는 조건을 이용해 분자유속에 관해 n개의 대수연립방정식을 얻고 이 대수연립방정식을 풀어 냉각판의 분자포획능력을 구한다. 해석에 이용한 냉각판의 기체분자포획능력이 구속된 형상에서 얼마나 우수한 가를 알아보기 위해 중앙판의 직경, 입구와 냉각판 사이의 거리, 그리고 각 냉각판 사이의 거리를 변화시켜가며 해석을 수행하고 그 결과를 비교, 분석하였다.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.381-383
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• 2005

This paper is concerned with the prediction of micro structural changes of Al alloys during cryogenic rolling using an Eulerian finite element analysis. The main objective of cryogenic rolling is to obtain ultra-fine grains by severe plastic deformation at the extremely low temperature. Thereby, this simulation focuses on micro structural developments - the texture development and the changes in the size and shape of grains. The former one may be modeled using a crystal plasticity theory while the other can be predicted by a streamline technique. Applications to three pass rolling are given.

• Transactions of the KSME C: Technology and Education
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• v.1 no.1
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• pp.99-105
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• 2013

In this paper, we carried out the basic design of 36 MTD natural gas BOG re-liquefaction system to recover the generated natural gas during performance test of LNG pump and natural gas compressor. The re-liquefaction process of natural gas is designed to have 1500 kg/h of liquefaction rate with reverse Brayton refrigeration cycle. With the designed process, the variation of liquefaction rate is calculated for various inlet conditions of feed gas. From results, the liquefaction rate is more sensitive for inlet temperature than gas composition. The specifications of equipments such as gas blower, natural gas compressor, cryogenic heat exchanger and nitrogen compander are determined on the basis of the designed process. The requirement of power consumption and cooling water are also determined through the basic design.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.12
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• pp.59-65
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• 2004

A stable reference voltage generator is necessary to the infrared image signal readout circuit(ROIC) to improve noise characteristics of signal originated from infrared devices, that is, to gain good images. In this paper, bandgap circuit operating at cryogenic temperature of 77K for Infrared image ROIC(readout integrated circuit) was first made. It demonstrates practical use possibility through taking measurements and estimations. Bandgap circuit is a representative voltage reference circuit. Most of bandgap reference circuits which are presented so far operate at room temperature, and their characteristic are not suitable for infrared image ROIC operating at liquid nitrogen temperature, 77K. To design bandgap circuit operating at cryogenic temperature, suitable circuit is selected and the parameter characteristics of used devices as temperature change are seen by a theoretical study and fitted at liquid temperature with considering such characteristics. This circuit has been fabricated in the Hynix 0.6um standard CMOS process, and the output voltage measured shows that the stability is 1.042±0.0015V over the temperature range of 60K to 110K and is better than bandgap circuits operated at room temperature.

• Clean Technology
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• v.20 no.3
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• pp.314-320
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• 2014

The purpose of this work is to optimize composition of mixture refrigerants used in the C3MR (Propane & Mixed Refrigerants) process by a statistical optimization technique. C3MR studied in this work is one of widely used commercial natural gas liquefaction processes with high efficiency. Process simulation was performed in a commercial process simulator and methane ($C_1$), ethane ($C_2$), propane ($C_3$), and nitrogen ($N_2$) were selected as mixed refrigerants. Using the process model, optimum composition of refrigerants mixture was determined via mixture design and central composite design to produce minimum energy consumption. As a result, it was confirmed that energy consumption is reduced down to 11.3% comparing to existing design. It was also compared with heat effectiveness through temperature profile of MCHE (main cryogenic heat exchanger).