• Korean Journal of Optics and Photonics
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• v.6 no.3
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• pp.233-238
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• 1995

'#65279;We made $P_2O_5-SiO_2$ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS(tetraethylorthosilicate), TMPite(trimethylphosphite) and phosphine($PH_3$). And We studied and compared between TMPite and PH, as a dopant of P in PSG films in the aspect of the de,position characteristics. Deposition rate of TMPate-PSG films was $55 \AA/min$ which was smaller than 90 A/min , that of $PH_3-PSG$ films. Thickness deviation of TMPate-PSG films was 2% and that of PH3-PSG was 4.5%. So TMPate-PSG films had a good quality in thickness uniformity. The range of refractive index was controlled from 1.445 to 1.468 at 633 nm in TMPate-PSG films and it was controlled from 1.456 to 1.476 in $PH_3-PSG$ films.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.40 no.1
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• pp.53-63
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• 2016

Wheel dynamometers are used to measure dynamic load that is conveyed from the road to a vehicle while driving. In this paper, two types of six-component wheel dynamometers utilizing shear deformation and bending deformation were designed and evaluated. Prior to designing the shear and bending type wheel dynamometers, the shear and bending deformation behaviors of the basic structure of the wheel dynamometer itself were analyzed using finite element analysis. Strain analysis was performed repeatedly in order to obtain a similar output sensing strain for each load component. The design was modified with a bridge circuit in order to minimize coupling strain. The results indicated that the shear type dynamometer was expected to obtain stable characteristics due to uniform strain distribution while the bending type dynamometer was expected to obtain high-quality sensitivity performance due to consistent output sensitivity.

• Journal of the Korean Society of Hazard Mitigation
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• v.9 no.2
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• pp.11-15
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• 2009

This paper is concerned with the elastic buckling of thin-walled arches that are subjected to uniform bending. Nonlinear strain-displacement relations with the initial curvature are substituted into the second variation of the total potential energy to obtain the energy equation including initial curvature effects. The approximation for initial curvature effects that the bending normal strain distribution is linear across the cross section is applied consistently in the derivation process. The closed form solution is obtained for flexural-torsional buckling of arches under uniform bending and, it is compared with the previous theoretical results.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.213-213
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• 2016

현재 반도체 산업에서는 디바이스의 고 집적화, 고 수율을 목적으로 패턴의 미세화 및 웨이퍼의 대면적화와 같은 이슈가 크게 부각되고 있다. 다중 패터닝(multiple patterning) 기술을 통하여 고 집적 패턴을 구현이 가능해졌으며, 이와 같은 상황에서 각 패턴의 임계치수(critical dimension) 변화는 패턴의 위치 및 품질에 큰 영향을 끼치기 때문에 포토마스크의 임계치수 균일도(critical dimension uniformity, CDU)가 제작 공정에서 주요 파라미터로 인식되고 있다. 반도체 광 리소그래피 공정에서 크롬(Cr) 박막은 사용되는 포토 마스크의 재료로 널리 사용되고 있으며, 이러한 포토마스크는 fused silica, chrome, PR의 박막 층으로 이루어져 있다. 포토마스크의 패턴은 플라즈마 식각 장비를 이용하여 형성하게 되므로, 식각 공정의 플라즈마 균일도를 계측하고 관리 하는 것은 공정 결과물 관리에 필수적이며 전체 반도체 공정 수율에도 큰 영향을 미친다. 흔히, 포토마스크 임계치수는 플라즈마 공정에서의 라디칼 농도 및 식각 선택비에 의해 크게 영향을 받는 것으로 알려져 왔다. 본 연구에서는 Cr 포토마스크 에칭 공정에서의 Cl2/O2 공정 플라즈마에 대해 O2 가스 주입량에 따른 식각 선택비(etch selectivity) 변화를 계측하여 선택비 제어를 통한 Cr 포토마스크 임계치수 균일도 향상을 실험적으로 입증하였다. 연구에서 사용한 플라즈마 계측 방법인 발광분광법(OES)과 optical actinometry의 적합성을 확인하기 위해서 Cl2 가스 주입량에 따른 actinometer 기체(Ar)에 대한 atomic Cl 농도비를 계측하였고, actinometry 이론에 근거하여 linear regression error 1.9%을 보였다. 다음으로, O2 가스 주입비에 따른 Cr 및 PR의 식각률(etch rate)을 계측함으로써 식각 선택비(etch selectivity)의 변화율이 적은 O2 가스 농도 범위(8-14%)를 확인하였고, 이 구간에서 임계치수 균일도가 가장 좋을 것으로 예상할 수 있었다. (그림 1) 또한, spatially resolvable optical emission spectrometer(SROES)를 사용하여 플라즈마 챔버 내부의 O atom 및 Cl radical의 공간 농도 분포를 확인하였다. 포토마스크의 임계치수 균일도(CDU)는 챔버 내부의 식각 선택비의 변화율에 강하게 영향을 받을 것으로 예상하였고, 이를 입증하기 위해 각각 다른 O2 농도 환경에서 포토마스크 임계치수 값을 확인하였다. (표1) O2 11%에서 측정된 임계치수 균일도는 1.3nm, 그 외의 O2 가스 주입량에 대해서는 임계치수 균일도 ~1.7nm의 범위를 보이며, 이는 25% 임계치수 균일도 향상을 의미함을 보인다.

• Journal of the Korea Society for Simulation
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• v.20 no.1
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• pp.97-105
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• 2011

In rivers and streams, biofilms are thin layers of greenish-brown slime attached to rocks, plants, and other surfaces. Biofilms play key roles in primary production and cycling of nutrients, water quality remediation, suspended sediment removal, and energy flow to higher trophic levels. In the present study, we developed a two-dimensional cellular automata model to simulate mixed biofilms of toxin-sensitive and toxin-producing species in hydrodynamic flow. The flow was generated by a stochastic process for uniform flow and by using the Navier-Stokes equation for non-uniform flow. Minimized local rules governing reproduction and mortality of the species were executed in the self-organizing processes to elucidate interactions between toxin-producing and toxin-sensitive species in competition over nutrients. We briefly discuss the morphology of the simulated biofilm under different flow conditions.

• Water for future
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• v.29 no.3
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• pp.163-176
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• 1996

When a pipe is deployed on a sloping bed, pumping power required for a discharge can be estimated immediately without any iteration process with an explicit form of a friction factor equation. Pumping power being given, however, traditional method requires an iteration process for the solution of discharge and pipe diameter even for the uniformly-rough pipe. You (1955b) has suggested explicit equations for the estimation of discharge and pipe diameter particularly for the cases of pipe on a slopintg bed without pumping and pipe on a horizontal bed with a pumping power. Based on his approach and previous results, the present researchers have developed explicit equations of discharge and pipe diameter for the general case of pipe on a sloping bed with a pumping power. The equations of boundary criteria are also presented in explicit way which render proper choice of various equations suitable for the flow condition between five characteristics. Verification studies are also carried out by applying the explicit equations to a practical example.

• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.403-404
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• 2007

소자 수율을 향상시키기 위해서는 웨이퍼 전체에 걸쳐 플라즈마 공정특성이 균일하게 분포되어야 한다. 본 연구에서는 Actinomeric 광 반사분광기 (Otical Emission Spectroscopy) 정보를 이용하여 식각률 비균일도에 대한 모델을 개발하였다. 제안된 기법은 Oxide 식각공정에서 수집한 데이터에 적용하였으며, 체계적인 모델링을 위해 공정데이터는 통계적 실험계획 법을 적용하여 수집되었다. 신경망의 예측성능은 유전자 알고리즘을 이용해서 증진시켰다. OES의 차수를 줄이기 위해 주인자 분석을 세 종류의 분산(100, 99, 98%)에 대해서 적용하였다. 개발된 모델은 발표된 이전의 모델에 비해 17% 증진된 예측성능을 보였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.6
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• pp.4131-4136
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• 2015

This paper compares and calculates more precisely the averaged reflectance of antireflection coating with different structure of single and 6 layer assuming the incident angle of light changing from $8^{\circ}$ to $60^{\circ}$ not like normal incidence as usual case. The reflectivity of AR coating of 6 layers with 180 nm thickness having index profile suggested as linear and quintic function and single layer with same thickness having even index are calculated and compared, when the wavelength of incident light ranges from 400 nm to 1200 nm. As the results the AR coating with 6 layers having quintic(linear) function index profile shows the lower reflectance about 11.6 %(14.6 %) than other index profiles, which is approximately 8 % lower reflectance compared with single layer case(about 19.6 %). This results could be applied for the better antireflection coating design applying to optical devices and filters.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.8
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• pp.745-750
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• 2017

Tension tests for copper thin films with thickness of $12{\mu}m$ were performed by using a digital image correlation method based on consecutive digital images. When calculating deformation using digital image correlation, a large deformation causes errors in the calculated result. In this study, the calculation procedure was improved to reduce the error, so that the full field deformation and the strain of the specimen could be accurately and directly measured on its surface. From the calculated result, it can be seen that the strain distribution is not uniform and its variation is severe, unlike the distribution in a common bulk specimen. This might result from the surface roughness introduced in the films during the fabrication process by electro-deposition.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.12
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• pp.1091-1097
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• 2013

In this article, an advanced cooling surface based on micro-post arrays with non-homogeneous configurations is investigated and compared with conventional micro-post arrays with homogeneous configuration. The capillary performance of micro-post arrays are characterized using the capillary rate of rise experiments and numerical simulations which take into account the meniscus curvature. The experimental and numerical results show that that the capillary performance of the micro-post wick can be significantly enhanced, compared with the homogeneous type wick, by employing non-homogeneous configurations. The capillary performance is shown to be primarily a function of the solid fraction and increases linearly with decreasing solid fraction, regardless of the wick configuration, when the solid fraction is larger than 0.25. However, the capillary performance is found to be significantly reduced when the solid fraction falls below approximately 0.25.