• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.139-145
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• 2005

In the study, in order to deposit TaN thin film using diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristic of TaN thin films deposited PAALD method, PAALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamlno) tantalum) Precursor and $NH_3$ reaction gas is aware that TaN thin film deposited of high density and amorphous phase with XRD measurement The degree of diffusion and react ion taking place in Cu/TaN(deposited using 150 W PAALD)/$SiO_2$/Si systems with increasing annealing temperature was estimated from MOS capacitor property and the $SiO_2(600\;\AA)$/Si system surface analysis by C-V measurement and secondary ion material spectrometer(SIMS) after Cu/TaN/$SiO_2(400\;\AA)$ system etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to $500^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.77-77
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• 2010

그래핀(Graphene)은 한 겹(layer)의 2차원 판상 구조에 탄소원자들이 육각형의 기본 형태로 배열되어 있는 나노재료로서, 우수한 역학적 강도와 화학적, 열적 안정성 및 흥미로운 전기 전자적 성질을 가지고 있는 것으로 알려져 있다. 최근, 이러한 특징적이고도 우수한 물성으로 인하여 기초물성 연구에서부터 차세대 응용까지 고려한 각종 연구들이 활발하게 진행되고 있다. 일반적으로 그래핀을 얻는 방법에는 물리 화학적 박리, 열화학증기증착법(TCVD), 탄화규소의 흑연화, 흑연산화물의 환원 등의 방법들이 알려져 있다. 그 중 TCVD법이 두께의 균일성이 높은 그래핀을 합성하는데 가장 적절한 것으로 알려져 있다. 그러나 TCVD법은 탄소를 포함하는 원료가스를 분해하기 위하여 고온의 공정을 필요로 하게 되지만, 향후 산업적 응용을 고려한다면 대면적 그래핀의 저온합성법 개발은 풀어야 할 시급한 과제로 인식되고 있다. 현재는 메탄을 원료가스로 사용하여 $900^{\circ}C$ 이상에서 그래핀을 합성하는 추세이고, 최근 아세틸렌등의 활성원료가스를 이용하여 $900^{\circ}C$ 이하에서 저온 합성한 연구결과들도 속속 보고되고 있다. 본 연구에서는 고주파 플라즈마를 이용하여 비교적 저온에서 탄소원료가스를 효율적으로 분해하고, 확산플라즈마 영역에 TCVD 챔버를 결합한 하이브리드 화학증기증착법을 이용하여 그래핀의 저온합성을 도모하였다. 원료가스로는 메탄을 사용하였고, 기판으로는 전자빔증착법으로 증착한 니켈 박막 및 구리포일을 사용하였다. 실험결과, 그래핀은 $600^{\circ}C$ 부근의 저온에서도 수 층으로 이루어진 그래핀이 합성된 것을 확인하였다. 합성한 그래핀은 분석의 용이함 및 향후 다양한 응용을 위하여 실리콘산화막 및 투명고분자 기판 위에 전사(transfer)하였다. 합성된 그래핀의 구조평가를 위해서는 광학현미경과 Raman분광기를 주로 사용하였으며, 원자힘현미경(AFM), 주사전자현미경(SEM), 투과전자현미경(TEM) 등도 이용하였다.

• Journal of the Korea Convergence Society
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• v.12 no.10
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• pp.129-136
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• 2021

Radiation shields used in medical institutions mainly use lead to manufacture products and fitments. Although lead has excellent processability and economic efficiency, its use is being reduced due to environmental issues when it is disposed of. In addition, when used for a long time, there is a limit to using it as a shielding film, shielding wall, medical device parts, etc. due to cracking and sagging due to gravity. To solve this problem, copper, tin, etc. are used, but tungsten is mostly used because there is a difficulty in the manufacturing process to control the shielding performance. However, it is difficult to compare with other shielding materials because the characteristics according to the type of tungsten are not well presented. Therefore, in this study, a medical radiation shielding sheet was manufactured in the same process using pure tungsten, tungsten carbide, and tungsten oxide, and the particle composition and shielding performance of the sheet cross-section were compared.As a result of comparison, it was found that the shielding performance was excellent in the order of pure tungsten, tungsten carbide, and tungsten oxide.

• Applied Chemistry for Engineering
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• v.33 no.6
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• pp.618-623
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• 2022

The bipolar plate is a key component of the polymer electrolyte membrane fuel cell (PEMFC) that transfers reactants and electrons, discharges water and heat as by-products, and serves as a mechanical support for the membrane electrode assembly (MEA). Therefore, the flow field structure of the bipolar plate plays an important role in improving fuel cell performance. In this study, PEMFC performance was investigated with copper foams with different compressibility ratios applied to cathode bipolar plates using a 25 cm² unit cell. The total resistance decreased as the compressibility ratio of the metal foams increased, and, in particular, the charge transfer and mass transfer resistance were significantly improved compared to the serpentine flow field, lowering voltage loss in medium and high current density region. In the case of pressurized air reactant flow with serpentine structure, fuel cell performance was similar to that of a compressed metal foam flow field (S3) up to the medium current density region, but low performance appeared in the high current density region due to flow field structure limitations.

• Journal of the Korean institute of surface engineering
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• v.55 no.3
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• pp.180-186
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• 2022

The production of hydrogen via water electrolysis (i.e., green hydrogen) using renewable energy is key to the development of a sustainable society. However, most current electrocatalysts are based on expensive precious metals and require the use of highly purified water in the electrolyte. We demonstrated the preparation of a non-precious metal catalyst based on CuCo₂O₄ (CCO) via simple electrodeposition. Further, an optimization process for electrodeposition potential, solution concentration and electrodeposition method was develop for a catalyst-substrate integrated electrode, which indicated the highly electrocatalytic performance of the material in electrochemical tests and when applied to an anion exchange membrane water electrolyzer.

• Tuberculosis and Respiratory Diseases
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• v.42 no.2
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• pp.184-205
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• 1995

Background: Pulmonary toxicity by bleomycin has multiple mechanisms including direct tissue toxicity due to oxygen-derived free radicals and indirect toxicity through amplification of pulmonary inflammation. To evaluate the effect of chelators or free radical scavenger to lung damage induced by bleomycin, penicillamine as a copper chelator, deferoxamine as an iron chelator and vitamin E as a free radical scavenger were administered. Methods: Two hundred Wistar rats were divided into five groups: Control, bleomycin treated, bleomycin-penicillamine treated, bleomycin-deferoxamine treated, and bleomycin-vitamin E treated groups. Rats sacrificed on day 1, day 3, day 4, day 7, day 14, and day 28 after treatment. Bronchoalveolar lavage, light microscopic and immunohistologic studies for type I, III, IV collagens, fibronectin, laminin and NBD phallicidin were evaluated. Results: There was a significant increase in the total cell counts of bronchoalveolar lavage on day 1 from all treated animals and vitamin treated group showed an abrupt decrease in total cell counts with decrease of neutrophils on day 3. Bleomycin-vitamin E treated group had the least histologic changes such as pulmonary fibrosis. The alveolar basement membranes were positive for type IV collegen and laminin. Basement membranes of bleomycin, bleomycin-penicillamine, or bleomycin-deferoxamine treated groups were disrupted and fragmented on day 4 or 7. The bleomycin-vitamin E treated group had intact basement membranes until day 28. Conclusion: Bleomycin-induced pulmonary fibrosis was related to the severity of acute injury to oxygen radicals or activation of neutrophils and disruption of basement membrane. Vitamin E seemed to be the most effective antioxidant in the inhibition of bleomycin-induced pulmonary injury and fibrosis.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
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• v.3 no.4
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• pp.249-260
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• 1998

To understand the attachment of micro algae and their subsequent growths on artificial surfaces immersed in seawater, the relationship between attachment of diatoms on the immersed artificial substrates and species pool in the surrounding water was investigated. We used acryl slides for the study of diatom attachment and examined the surrounding water samples collected in Incheon Harbour from July 1995 to February 1997. Variations of species composition and abundances by exposure time in seawater were investigated during the early phase of biofilm formation on various substrates, e.g. glass, acryl, titanium, copper and antifouling paint-treated slides. Immigration rates of diatoms to acryl slides during spring and winter were significantly correlated with the abundance of benthic diatoms in surrounding water ($r^2$=0.78, p<0.01, n=42), suggesting that immigration rates were affected by variations of benthic diatom abundances in surrounding water. Immigration coefficient of monoraphid diatoms was 5 times higher than that of biraphid diatoms, but relative abundance of monoraphid diatoms was 3 times lower than that of biraphid diatoms on acryl slides in spring. In winter, immigration coefficient and relative abundance of centric diatoms were higher compared to other raphe forms. These results suggest that the attachment of diatoms seems to be caused by the abundance and immigration coefficients of benthic diatoms in surrounding water. Pennate diatoms predominantly attached to all artificial surfaces throughout all experimental periods. Interestingly, centric diatoms predominantly attached to all artificial surfaces in winter. Hantzschia virgata, Licmophora abbreviata and Melosira nummuloides appeared dominantly on antifouling paint-treated slides, probably being tolerant of the antifouling paint. During incubations, the abundance of attached diatoms increased exponentially on glass, titanium and acryl slides with exposure time. The maximum abundance was highest on glass slide, followed by acryl, titanium, copper and antifouling paint-treated slides. The growth rates of attached diatom community on all artificial surfaces were higher at temperature of $24-25^{\circ}C$ than that of $2-3^{\circ}C$. The growth rate of attached diatoms on glass slide was generally higher compared to other slides during the study period. Dominant morphotypes of observed species with exposure time in seawater were prostrate form Amphora coffeaeformis, fan shape Synedra tabulata, stalk type Licmophora paradoxa and chain type M. nummuloides. A micro-succession in the attached microalgal community was observed. The composition of dominant species seems to be the result of species-specific response to gradually limited space with development of microalgal film.

• Korean Journal of Microbiology
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• v.49 no.4
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• pp.424-428
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• 2013

To identify risk factors for Legionella contamination, water quality variables routinely measured in examination of natural and city waters were meta-analyzed for significance of correlation to Legionella incidences. For evaluation of abundance of Escherichia coli as a risk factor, which is currently used as an indicator of Legionella contamination in an official guideline in Korea, odds ratio (OR) of above-cutoff total coliform counts for Legionella presence/absence was used as the effect size in the meta-analysis. The OR was estimated as 1.05 (0.36-3.12, 95% CI), and the probability of having identical odds reached 0.92. Also, ORs from individual studies showed significant heterogeneity (P=0.008), which contributed to 63% of total variance of the ORs. In the case of heterotrophic plate count (HPC), the OR for Legionella presence/absence was 2.72 (2.04-3.63) with highly significant deviation from identical odds (P<0.0001). ORs from different studies were seemingly homogeneous ($Q_{df=8}$=12.7, P=0.12). Turbidity and concentrations of chlorine, iron ion and cupper ion were other routine variables that could be considered as risk factors. However, statistical measures from different studies were not uniform enough to develop an appropriate effect size while the number of studies reporting the variables was also small (3-5). In conclusion, HPC appeared to be appropriate as indicator of Legionella contamination, rather than fecal bacteria contamination. HPC may imply abundance of habitats (amoebas and biofilms) of Legionella in water. This result warrants further studies for standardizing protocols and cutoff values to infer Legionella risks from HPC.

• Journal of Conservation Science
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• v.31 no.3
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• pp.287-298
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• 2015

The formaldehyde is damage to the metal are known universally. However, the quantification of the damage level and degree of damage is not clear. This study was conducted to test the following steps using a gas corrosion tester, and then evaluated by the optical, chemical and physical measurement. First, it was confirmed the damage level of the metal specimen(silver, copper, iron, lead, brass) by the formaldehyde(0.5, 1, 10, 100, 500ppm). Second, weighted damage to the metal specimens were tested according to the temperature and humidity conditions under damage levels. Third, the damage of accelerated degradation metal specimens were examined under damage levles. As a result, at 500ppm / day, the optical, chemical and physical damage of lead have been identified, the optical damage of all metals are was observed. The optical damage of some specimens were weighted in $25^{\circ}C-50%$, $30^{\circ}C-50%$. Chemical damage to the lead specimen is 2.8 times, 1.3 times were weighted in $30^{\circ}C-80%$, $25^{\circ}C-80%$. Referring to formate ion concentration of the accelerated degradation metal, corrosion products of iron and brass were actived the reaction of the formaldehyde gas, oxide film of lead was blocked the reaction of formaldehyde gas.

• Membrane Journal
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• v.30 no.3
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• pp.158-172
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• 2020

In the aspect of saving energy and water, facilitating the separation membrane for the water treatment has been rising recently as one of the possible solutions. However, microbial biofouling effect is the biggest obstacle that hinders reaching higher permeability over a prolonged period of nanofiltration operation. To solve this problem and fully utilize the filtration membranes with enhanced performance, largely two kinds of solutions are studied and the first and the most commonly mentioned type is the one using the silver nanoparticles. Since silver nanoparticles are important to be well tailored on membrane surface, various methods have been applied and suggested. Using silver nanoparticles however also has the drawbacks or possible toxicity risks, raising the need for other types of utilizing non silver particles to functionalize the membrane, such as copper, graphene or zinc oxides, and amine moieties. Each attempt included in either kind has produced some notable results in killing, preventing, or repelling the bacteria while at the same time, left some unsolved points to be evaluated. In this review, the effects of metal nanoparticles and other materials on the antifouling properties of water treatment membranes are summarized.