• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.81-82
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• 2005

새로운 고 용량 광 저장 시스템 개발을 위하여 초 미세 개구를 가지는 마이크로 프로브 어레이시스템 완성을 목표로 연구를 진행하였다. 효율적인 초 미세 개구 생성을 위해 기존의 제작된 마이크로 프로브 위에 FIB 공정을 이용하여 40nm 크기를 가지는 어퍼쳐를 만들었다. 나노 어퍼쳐를 가지는 마이크로 프로브 어레이는 곧 마이크로 렌즈와 VCSEL 과 일체화된 광 기록 헤드시스템으로 준비될 예정이다. 멤스 공정을 이용한 이 시스템은 향후 높은 저장 용량과 빠른 전송속도를 달성할 수 있는 차세대 광정보저장기기에 적용 가능한 새로운 광 픽업 시스템을 발전시킬 수 있을 것으로 생각된다.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.3
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• pp.37-41
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• 2018

This paper presents the integrated fluorescent oxygen sensor probe module based on planner lightwave circuits using UV imprint lithography. The oxygen sensor system is consisted of the optical source part, optical detector part and optical sensing probe part to be composed of the planner lightwave circuit and oxygen sensitive thin film layer. Firstly, we optimally designed the planner lightwave circuit with asymmetric $1{\times}2$ beam splitter using beam propagation method. Then, we fabricated the planner lightwave circuits using UV imprint lithography process. This planner lightwave circuits transmitted the optical power with 76% efficiency and the fluorescence signal with 70% efficiency. The oxygen sensitive thin film layer is coated on the end face of planner lightwave circuit. The oxygen sensor system using this sensor probe module with planner lightwave circuit could measure the concentration with 0.3% resolution from 0% to 20% gas range. This optical oxygen sensor probe module make it possible to compact, simple and cheap measurement system.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.5
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• pp.418-424
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• 2014

We propose and experimentally demonstrate a photonic microwave notch filter with a negative coefficient. The negative coefficient is obtained by using cross gain modulation (XGM) in a reflective semiconductor optical amplifier (RSOA). When the RSOA is operated in saturated region, the signal carried on the pump wavelength is inversely copied to the probe wavelength by the XGM effect, showing a negative coefficient. Time delay between pump signal and probe signal is provided by single mode fiber (SMF) with wavelength dependent time delay. The proposed microwave notch filter shows notch dips of more than 35.1 dB and free spectral range (FSR) of about 380.6 MHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.229-229
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• 2011

대기압 플라즈마 제트의 플라즈마 전파 현상을 조사하였다. 바늘침과 유리관으로 구성된 플라즈마 발생장치에 Ar을 주입하여 교류 고전압을 인가하면, 바늘침 전극부에 발생된 플라즈마가 길이방향에 따라 유리관 밖으로 전파된다. ICCD 초고속 카메라로 촬영한 결과, 고압부에 발생한 플라즈마 총알처럼 전파되는 것을 관측 되였다. 전파속도는 ~104 m/s이다. 이는 기체의 유속 ~10m/s 보다 훨씬 큰 값이다. 또한 광 프로브를 이용하여 광신호를 측정하였다. 광 신호가 고압 측부터 유리관 길이방향으로 순차적으로 전파되는 것이 관측 되었다. 전파 속도 ~104m/s으로 ICCD로 측정한 플라즈마 전파 속도와 일치한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.29-34
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• 2005

A optical head unit for nano optical probe away was developed. The optical probe array is generated by Talbot effect. The shape and thickness of microlens array(MLA) were designed to minimize the spot size at the foci of MLA. To increase the optical efficiency of the system and obtain the large tolerance for fabrication, aperture size was theoretically optimized. Then microlens illuminated aperture array(MLIAA) as an optical head unit was fabricated using a ultra violet(UV) molding process on aluminum aperture array. In this process, Al aperture array was fabricated separately using the photolithography and reactive ion etching(RIE) process. Optical properties of the generated optical probes were measured and compared at Talbot distance from the aperture array having a diameter of $1{\mu}m$ and MLIAA.

• Journal of the Korea Society of Computer and Information
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• v.19 no.2
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• pp.101-107
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• 2014

This study is proposed the novel PPG sensor device and the signal processing method to replace the acceleration sensor that is used to reject motion artifacts contained in photoplethysmography(PPG). The proposed method is to reject motion artifacts by an adaptive filter based on the estimated motion artifact by using a blue LED light. To evaluate the performance of the proposed method experimentally, We did design a novel sensor consisted of blue/red LEDs and photo-sensor and implemented, and then rejected the motion artifacts by using an adaptive filter and the implemented sensor. In the results of the experiments, it is shown that the proposed sensor device and signal processing can reconstruct the PPG signal despite the occurrence of motion artifacts, and also that the SNR was 4.5 times of moving average filter. According to the experimental results, the proposed method can be applied to design a low-cost device.

• Korean Journal of Optics and Photonics
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• v.17 no.2
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• pp.143-148
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• 2006

A new method of measuring the Brillouin gain spectrum of optical fiber is proposed and demonstrated. Unlike existing methods, both the pump light and the counter-propagating probe light are generated from a single laser diode whose optical frequency is directly modulated by injection current modulation. The frequency difference between the pump and the probe is scanned continuously through optical frequency chirp occurring when the injection current is modulated with a square wave. The measured Brillouin gain spectrum of telecom single-mode fiber agrees well with that shown in other literature.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.11a
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• pp.192-193
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• 2012

2차 플라즈마를 사용하지 않고도 스퍼터링된 입자의 높은 이온화율을 얻을 수 있는 고전력 마그네트론 스퍼터링 기술은 최대 $MW/cm^2$의 높은 투입 전력을 이용하지만 타겟 재료의 높은 열전도 요구때문에 실제로 사용할 수 있는 재료가 Cu를 비롯한 몇가지 금속에 제한된다. 수 백 $kW/cm^2$의 중간 전력 밀도를 가질 수 있도록 펄스를 다중 부분 세트로 제어하는 modulated pulse plasma 시스템을 구축하고 전자 온도, 밀도를 고속으로 계측할 수 있는 삼중 프로브와 고증폭 CCD를 이용하여 공정 진단을 한 결과 전자 온도는 최고 15.9 eV, 전자 밀도는 $4.25{\times}10^{12}{\sharp}/cm^3$였으며 weak ionization 조건과 strong ionization 조건에서 Ar I (811.5 nm)의 방출광 세기가 6배 증가하는 것으로 분석되었다.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.1 s.307
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• pp.1-6
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• 2006

The noncontact optical sensor using the hologram laser and automatic power controller is developed to measure a thickness of transparent objects and achieve excellent performance. Due to the contact between the tip of the sensor and the surface of objects, the tip is abraded. In addition the casting glass under high temperature results in extending the size of sensor body. The accuracy of the sensor is degraded due to these reasons. In this paper, to overcome these problems, we proposed a low cost non-contact optical sensor that is composed of a hologram laser unit used for optical pickup of CD player and a plastic lens. Therefore the problems caused by the contact sensor are solved by using the noncontact sensor. The noncontact sensor has to move toward the objects and obtain the focus error signal to measure a position of transparent objects. While the internal temperature of the sensor is controlled under ${\pm}0.1^{\circ}$, many trials shows ${\pm}2{\mu}m$ measurement error as excellent performance.