• The Journal of the Acoustical Society of Korea
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• v.26 no.2
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• pp.80-86
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• 2007

We have investigated on the development of 2-2 type piezocomposites that have better piezoelectric activity and lower acoustic impedance than those of conventional piezoceramics. In this study, we have investigated the piezoelectric and acoustic properties of 2-2 type piezocomposites sensor which was fabricated using dice-and-fill technique for the different volume fraction of PZT. The specific acoustic impedance of 2-2 type piezocomposites decreased linearly when PZT volume fraction was decreased. The resonance characteristics measured by an impedance analyzer(HP4194A) were similar to the analysis of finite element method (FEM). The resonance characteristics and the electromechanical coupling factor were the best when the volume fraction PZT was 0.6. It also showed the highest result from the standpoint of sensitivity, bandwidth and ring-down property and so on at the same condition. The specific characteristics show that the 2-2 type piezocomposites turned out to be superior to the ultrasonic sensor composed by single phase PZT.

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.2
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• pp.83-88
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• 2015

In this paper, $2mm{\times}2mm$ sized piezoresistive accelerometers were designed and fabricated. Two kinds of accelerometers with different spring structure are designed. One is an accelerometer with 4 beam spring located in the center of the mass, the other is an accelerometer with 8 beam spring located in the vertices of the mass. The modal analysis of the accelerometers and the structural analysis were performed using ANSYS program. The former has the superior sensitivity characteristics of $21.38{\mu}V/V/g$ and the lower offset drift of $154.45ppm/^{\circ}C$ than the latter.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.123-123
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• 2013

OCT (Optical Coherence Tomography)는 의료용 생체조직의 단층 영상을 레이저 빛을 이용하여 구현하는 첨단 의료기술이다. Time-domain과 Fourier-domain을 기반으로 다양한 광간섭 신호의 획득이 연구되고 있으며, 영상획득 속도의 향상을 위한 경쟁이 세계적으로 치열한 상황이다. 최근 초고속 파장훑음 광원(Wavelength-swept source)의 개발을 통하여 초당 300 frame 이상의 단층 영상이 구현되고 있다. 본 발표에서는 초고속 파장훑음 레이저 광원(Wavelength swept laser)이 능동형 모드잠금(Active mode locking) 외부공진 반도체 공진 구조를 기반으로 새롭게 구현된 연구 성과를 포함한다. 분산에 의한 모드 잠금에 의하여 발진 파장이 결정되어 가변하므로 1 MHz 급 이상의 초고속 반복이 가능하며, 특히 의료용 산업용 분야의 다양한 광센서 및 광영상 응용에 활발히 응용되고 있다.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1767-1772
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• 2008

A microcantilever is a well-known MEMS structure for sensing bio-chemical molecules. When bio-chemical molecules are adsorbed on the microcantilever's surface, resonance frequency shift is generated. There are two issues in this phenomena. The first one is which one between mass change and surface stress change effects is more dominant on the resonance frequency shift. The second one is what will be the performance change when the boundary condition is changed from cantilevers to double clamped beams. We have studied the effect of surface stress change and compared it with that of mass change by using FEM analysis. Furthermore, for microstructures having different boundary conditions, we have studied Q-factor, which determines the detection limit of micro/nano mechanical sensors.

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.1-8
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• 2001

Conventional microgyroscopes of vibrating type require resonant frequency tuning of the driving and sensing modes to achieve high sensitivity. These tuning conditions depend on each fabricated microgyroscopes, even though the microgyroscopes are identically designed. A new micromachined resonator, which is applicable to microgyroscopes with self-toning characteristics, is presented. Since the laterally driven two degrees of freedom (2DOF) resonator was designed as a symmetric structure with identical stiffness in two orthogonal axes, the resonator is applicable to vibrating microgyroscopes, which do not need mode tuning. A dynamic model of the resonator was derived considering gyroscopic application. The dynamic model was evaluated by experimental comparison with fabricated resonators. The microgyroscopes were fabricated using a simple 2-mask-process of a single polysilicon layer deposited on an insulator layer. The feasibility of the resonator as a vibrating microgyroscopes with self-tuning capability is discussed. The fabricated resonators of a particular design have process-induced non-uniformities that cause different resonant frequencies. For several resonators, the standard deviations of the driving and sensing frequencies were as high as 1232Hz and 1214Hz, whereas the experimental average detuning frequency was 91.75Hz. The minimum detuned frequency was 68Hz with $0.034mVsec/^{\circ}$ sensitivity. The sensitivity of the microgyroscopes was low due to process-induced non-uniformity; the angular rate bandwidth, however, was wide. This resonator could be successfully applicable to a vibrating microgyroscopes with high sensitivity, if improvements in uniformity of the fabrication process are achieved. Further developments in improved integrated circuits are expected to lower the noise level even more.

• Journal of the Korean Magnetics Society
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• v.17 no.3
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• pp.141-146
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• 2007

A new class of LC-resonator for micro magnetic sensor device was invented and fabricated by means of MEMS technique. The micro LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic microwire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass coated $Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$ microwire fabricated by a glasscoated melt spinning technique. The core materials were annealed at various temperatures $150^{\circ}C,\;200^{\circ}C\;,250^{\circ}C\;,$ and $300^{\circ}C$ for 1 hour in a vacuum to improve soft magnetic properties. The solenoidal micro-inductors fabricated by MEMS technique were $500{\sim}1,000{\mu}m$ in length with $10{\sim}20$ turns. The changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. Since the permeability of ultra soft magnetic microwire is changing rapidly as a function of external magnetic field. The inductance ratio as well as magnetoimpedance ratio (MIR) in a LC-resonator was varied drastically as a function of external magnetic field. The MIR curves can be tuned very precisely to obtain maximum sensitivity. A prototype magnetic sensor device consisting of the developed microinductors with a multivibrator circuit was test successfully.

• Proceedings of the KIPE Conference
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• 2014.11a
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• pp.157-158
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• 2014

단상 계통연계형 인버터에서 전류센서를 통한 상전류 측정시 옵셋 오차는 전류센서와 측정 경로상에 위치한 아날로그 소자의 전압 불균형 및 비선형성으로 인하여 발생하게 된다. 또한 데드타임은 전력용 반도체 스위치를 제어하기 위한 PWM 신호 출력시 필연적으로 발생된다. 본 논문에서는 데드타임으로 인하여 왜곡된 상전류에 포함된 옵셋 오차에 의한 영향을 분석하고 동기좌표계 dq축 전류에 포함된 특정 고조파 성분을 제거하기 위하여 PR 제어기를 사용한 알고리즘이 제안되었다. 데드타임 및 옵셋 오차로 인해 발생된 전류맥동 보상을 위한 기준신호로는 동기좌표계 dq축 전류를 사용하였다. 제안된 알고리즘의 타당성을 시뮬레이션과 실험을 통하여 증명하였다.

• Proceedings of the KIPE Conference
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• 2015.11a
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• pp.75-76
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• 2015

계통연계형 인버터는 출력 전류의 고조파 저감을 위해 L 또는 LCL 필터를 사용된다. L필터에 비해 LCL 필터가 동일 인덕턴스로 높은 고조파 저감 효과를 가지기 때문에 일반적으로 LCL 필터를 이용하지만, 시스템에 공진이 발생하기 때문에, 이를 해결하기 위해 다양한 댐핑 기법과 함께 사용되어왔다. 특히, 능동 댐핑 기법은 추가적인 수동소자가 필요 없기 때문에, 수동 댐핑 기법에 비해 손실이 적다는 장점이 있으나, 추가적인 센싱회로가 필요하다는 단점이 있다. 따라서 본 논문에서는 추가적인 센서가 필요없는 3상 계통연계 인버터용 LCL 필터의 능동 댐핑 기법을 제안한다. 일반적인 계통연계 인버터에서 센싱받는 계통전압과 계통전류를 이용하여 캐패시터 전류를 계산하고, 이를 전류제어 루프에 보상함으로써 가상 저항 능동 댐핑 기법을 구현하고, 시뮬레이션을 통해 검증한다.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.49 no.2
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• pp.1-8
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• 2012

This paper presents the accelerometer which is a key component of TPMS(Tire Pressure Monitoring System). Generally a piezoresistive accelerometer has characteristics of lower cost, better linearity and better immunity about the environmnet noise than a capacitive one. Three types of piezoresistive accelerometers are degined and simulated using ANSYS program. The best one is a piezoresistive sensor which is supported by four beams located at the center of the edge of the mass after comparing the characteristics of resonant frequency of the three types. Considering the sensor size and a simulated maximum stress and maximum displacement, the length of beams is set as $200{\mu}m$. The size of a piezoresistive accelerometer is $3.0mm{\times}3.0mm{\times}0.4mm$. The sensor output is characterized by measuring the output characteristic depending on angle. As a result the offset voltage of the accelerometer is 43.2 mV and its sensitivity is $42.5{\mu}V/V/g$. The temperature bias drift is measured. The shock durability of the sensor is 1500g and the measuring range is 0 ~ 60 g.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.114-120
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• 2012

This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.