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http://dx.doi.org/10.5573/ieie.2015.52.2.083

Design and Fabrication of 2mm×2mm sized Piezoresistive Accelerometers  

Jeon, Yeon-Hwa (School of electrical engineering University of Ulsan)
Kim, Hyeon-Cheol (School of electrical engineering University of Ulsan)
Publication Information
Journal of the Institute of Electronics and Information Engineers / v.52, no.2, 2015 , pp. 83-88 More about this Journal
Abstract
In this paper, $2mm{\times}2mm$ sized piezoresistive accelerometers were designed and fabricated. Two kinds of accelerometers with different spring structure are designed. One is an accelerometer with 4 beam spring located in the center of the mass, the other is an accelerometer with 8 beam spring located in the vertices of the mass. The modal analysis of the accelerometers and the structural analysis were performed using ANSYS program. The former has the superior sensitivity characteristics of $21.38{\mu}V/V/g$ and the lower offset drift of $154.45ppm/^{\circ}C$ than the latter.
Keywords
accelerometer; piezoresistive; sensor; sensitivity; offset;
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