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InSb 적외선 감지 소자용 $Si_3N_4$, $SiO_2$ 절연막 계면 특성 연구

  • Park, Se-Hun;Lee, Jae-Yeol;Kim, Jeong-Seop;Kim, Su-Jin;Seok, Cheol-Gyun;Yang, Chang-Jae;Park, Jin-Seop;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.163-163
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    • 2010
  • 중적외선 영역 ($3{\sim}5\;{\mu}m$)은 공기 중에 존재하는 이산화탄소나 수증기에 의해 흡수가 일어나지 않기 때문에 군사적으로 중요한 파장 영역이며, 야간에 적을 탐지하는데 응용되고 있다. InSb는 77 K에서 중적외선 파장 흡수에 적합한 밴드갭 에너지 (0.228 eV)를 갖고 있으며, 다른 화합물 반도체와 달리 전하 수송자 이동도 (전자: $10^6\;cm^2/Vs$, 정공: $10^4\;cm^2/Vs$)가 매우 빠르기 때문에 적외선 화상 감지기 재료로 매우 적합하다. 또한 현재 중적외선 영역대에서 널리 사용되는 HgCdTe (MCT)와 대등한 소자 성능을 나타냄과 동시에 낮은 기판 가격, 소자의 제작 용이성 때문에 MCT를 대체할 물질로 주목 받고 있다. 하지만, 기판과 절연막의 계면에 존재하는 결함 때문에 에너지 밴드갭 내에 에너지 준위를 형성하여 높은 누설 전류 특성을 보인다. 따라서 InSb 적외선 소자의 구현을 위하여 고품질의 절연막의 연구가 필수적이라고 할 수 있겠다. 절연막의 특성을 알아보기 위해, n형 InSb 기판에 플라즈마 화학 기상 증착법 (PECVD)을 이용하여 $SiO_2$, $Si_3N_4$를 증착하였으며, 증착 온도를 $120^{\circ}C$에서 $240^{\circ}C$까지 $40^{\circ}C$ 간격으로 변화하여 증착온도가 미치는 영향에 대하여 알아보았다. 절연막과 기판의 계면 특성을 분석하기 위하여 77 K에서 커패시턴스-전압 (C-V) 분석을 하였으며, 계면 트랩 밀도는 Terman method를 이용하여 계산하였다 [1]. $Si_3N_4$를 증착하였을 경우, $120{\sim}240^{\circ}C$의 증착 온도에서 $2.4{\sim}4.9{\times}10^{12}\;cm^{-2}eV^{-1}$의 계면 트랩 밀도를 가졌으며, 증착 온도가 증가할수록 계면 트랩 밀도가 증가하는 경향을 보였다. 또한 모든 증착 온도에서 flat band voltage가 음의 전압으로 이동하였다. $SiO_2$의 경우 $120{\sim}200^{\circ}C$의 증착온도에서 $7.1{\sim}7.3{\times}10^{11}\;cm^{-2}eV^{-1}$의 계면 트랩 밀도 값을 보였으나, $240^{\circ}C$ 이상에서 계면 트랩밀도가 $12{\times}10^{11}\;cm^{-2}eV^{-1}$로 크게 증가하였다. $SiO_2$ 절연막을 사용함으로써, $Si_3N_4$ 대비 약 25% 정도 낮은 계면 트랩 밀도를 얻을 수 있었으며, 모든 증착 온도에서 양의 전압으로 flat band voltage가 이동하였다. 두 절연막에 대한 계면 트랩의 원인을 분석하기 위하여 XPS 측정을 진행하였으며, 깊이에 따른 조성 분석을 하였다. 본 실험에서 최적화된 $SiO_2$ 절연막을 이용하여 InSb 소자의 pn 접합 연구를 진행하였다. Be+ 이온 주입을 진행하고, 급속열처리(RTA) 공정을 통하여 p층을 형성하였다. -0.1 V에서 16 nA의 누설 전류 값을 보였으며, $2.6{\times}10^3\;{\Omega}\;cm^2$의 RoA (zero bias resistance area)를 얻을 수 있었다.

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청색과 녹색 GaN계 LED 및 LD소자를 이용한 자발 발광 시 효율 감소 현상에 대한 연구

  • Jeong, Gyu-Jae;Lee, Jae-Hwan;Han, Sang-Hyeon;Lee, Seong-Nam
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.311-311
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    • 2014
  • III-N계 물질로 이루어진 GaN 기반의 광 반도체는 직접 천이형 넓은 밴드갭 구조를 갖고 있기 때문에 적외선부터 가시광선 및 자외선까지를 포함한 폭 넓은 발광파장 조절이 가능하여 조명 및 디스플레이 관련 차세대 광원으로 많은 관심을 받고 있다. 하지만, GaN기반의 발광 다이오드는 많은 연구기관들의 오랜 연구에도 불구하고 고출력을 내는데 있어 여전히 많은 문제들이 존재한다. 그 중, 주입전류 증가에 따른 효율감소 현상은 출력을 저해하는 대표적인 요소로 알려져 있는데, 이전의 연구 결과에서 알려진 효율감소 현상의 원인으로 결정결함에 의한 누설전류, Auger 재결합, 이송자 넘침 현상 그리고 p-n접합부의 온도 상승 등의 현상이 알려져 있다 [1-2]. 하지만 여전히 주입 전류 증가에 따른 효율 감소 현상의 원인에 대해 명확한 해답은 없으며 아직도 많은 논의가 이루어 지고 있다. 따라서, 본 연구에서는 GaN기반의 청색 및 녹색 LD와 LED소자를 이용하여 주입전류 밀도의 변화에 따른 자발 발광 영역에서의 효율감소 현상의 원인을 규명하고 한다. 유기금속화학증착법(MOCVD)를 이용하여 c면 사파이어 위에 서로 다른 발광파장을 가지는 InGaN/GaN 다중양자우물구조의 질화물계 LED와 LD 박막을 제작하였으며 성장 구조에 의한 특성으로 인해 발생하는 효율 저하 현상을 방지하고자 InGaN/GaN으로 이루어진 다중양자우물층의 조성만 제어하여 청색과 녹색으로 발광하도록 하였다. 청색 및 녹색 LD 웨이퍼들을 이용하여 주입전류 증가에 따른 발광특성을 조사하기 위해 LD와 LED는 표준 팹 공정에 의해 제작되었다. 전계 발광 측정을 위해 상온에서 직류 전류를 주입하여 GaN계 청색 및 녹색 LED와 LD에 각 5 mA/cm2에서 50 mA/cm2까지 전류밀도를 증가시킴에 따라 LD 및 LED칩 형태에 상관없이 청색 LD와 LED의 파장은 약 465nm에서 약 458nm로 감소하였고 녹색 LD와 LED의 파장은 약 521nm에서 약 511~513 nm까지 단파장화가 발생했다. 이는 동일한 웨이퍼에 동일한 전류 밀도를 주입하였기 때문에 발생하는 것으로 판단된다. 그러나, 청색 LED의 효율은 50 mA/cm2에서 약 70%정도로 감소하고 반면 녹색 LED의 경우 동일한 전류밀도 하에 약 52%정도로 감소하였지만, 청색과 녹색 LD의 경우 동일한 전류 밀도의 범위 내에서 더욱 낮은 효율저하 현상을 나타내었다. 또한, 접합 온도를 측정한 바 청색소자가 녹색 소자에 비하여 낮은 접합 온도를 나타낼 뿐아니라, 청색 및 녹색 LD의 경우 LED 보다 낮은 접합 온도를 나타내고 있었다. 이는 InGaN 활성층의 In 조성이 증가할수록 비발광 센터에 의한 접합온도 상승 뿐 아니라, LD ridge 구조에서 더 많은 열이 방출되어 접합 온도가 감소될 수 있는 것으로 판단된다. 우리는 동일한 웨이퍼에 LED와 LD를 제작하였고, 동일한 전류 주입밀도를 인가하였기 때문에 LD와 LED의 효율 감소 현상의 차이는 이송자 넘침 현상, 결정 결함, 오제 재결합 등이 원인보다 활성층의 접합 온도 상승이 가장 큰 영향이 될 수 있을 것으로 판단된다.

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A Study on Manufacturing Cokes for Ferroalloy Using Domestic Anthracite and Waste Plastic (국산(國産) 무연탄(無煙炭)과 폐플라스틱을 사용(使用)하는 합금철용(合金鐵用) 코크스의 제조(製造)에 관한 연구(硏究))

  • Lee, Gye-Seung;Song, Young-Jun;Seo, Bong-Won;Lee, Dae-Young;Lee, Sung-Riong;Yoon, Si-Nae;Kim, Youn-Che
    • Resources Recycling
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    • v.17 no.4
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    • pp.47-56
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    • 2008
  • The aim of this study is to produce cokes which can be used for the production of ferroalloy, for this purpose, domestic anthracite mixed with plastic was sintered at various condition. The combustion and physical properties of anthracite and plastic, coal separation, and the influence of factors on the strength of coke were investigated. The results of this study are as follows: 1. The three kinds of anthracite from the Samcheok region contained 25 to 30% ash of $100{\mu}m$ over size, and have the caloric value of 5,205 cal/g(TaeAn), 4,893 cal/g(JangSung), 4,873cal/g(KyongDong). 2. The recommendable conditions for heavy-fluid separation of the Samcheok coal are to set the specific gravity of heavy fluid to 2.4 and control the size of coal to $35{\sim}140mesh$. 3. It is concluded that phenolic resin powder, liquefied phenolic resin, SAN, and melamine resin can be used as a binder for the anthracite cokes, from the thermal analysis of various plastics. Especially, the liquefied phenolic resin was considered as the most suitable binder as it would simplify the process.

Study on Temperature Characteristics of Friction Stir Welding Process by Numerical Analysis (수치해석을 활용한 마찰교반용접 공정의 온도 특성 분석 연구)

  • Kim, Moosun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.12
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    • pp.513-518
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    • 2019
  • Friction Stir Welding is a welding technique for metal materials that utilizes the heat generated by friction between the material to be welded and the welding tool that rotates at high speed. In this study, a numerical analysis method was used to analyze the change in the internal temperature of the welded material during friction stir welding. As the welding target material, AZ31 magnesium alloy was applied and the welding phenomenon was considered a flow characteristic, in which a melting-pool was formed. FLUENT was used as the numerical tool to perform the flow analysis. For flow analysis of the welding process, the welding material was assumed to be a high viscosity Newtonian fluid, and the boundary condition of the welding tool and the material was considered to be the condition that friction and slippage occur simultaneously. Analyses were carried out for various rotational speeds and the translational moving speed of the welding tool as variables. The analysis results showed that the higher the rotational speed of the welding tool and the slower the welding tool movement speed, the higher the maximum temperature in the material increases. Moreover, the difference in the rotational speed of the welding tool has a greater effect on the temperature change.

Effects of the SDS Dosage on the Paraffin Wax Micro-Capsulation by the Interfacial Polymerization (계면중합법에 의한 파라핀왁스의 마이크로캡슐화에 있어서 SDS 첨가량이 미치는 영향)

  • Shin, Se-Soon;Jung, Jae-Yoon;Kim, Young-Ho;Lim, Myung-Kwan;Choi, Dong-Uk;Lee, Chin-Yong
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.7 no.1
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    • pp.60-68
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    • 2012
  • In this study, the manufacturing process of micro capsulized PCM (phase changing material) for thermal storage performance of latent heat was investigated to save energy during the use of buildings: i.e. use of melamine-type resin as the micro-capsule material and paraffin wax as the inner material that are together used in concrete walls. For the manufacturing process of the micro-capsulized PCM, the amount of SDS addition as surfactant was the key variable and the resulting thermal storage performance depended on the SDS amount. With increasing amount of SDS, the micro capsulation became much easier while the capsule surface became harder. The micro capsules became uniform at an optimum SDS addition. The addition of SDS also affected the thermal capacity: with increasing SDS amount, the heat storage and release tendency at melting point was more clearly manifested. The current investigation is part of a study under progress to explore the use of PCM in concrete walls to save building maintenance cost and energy.

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Determination of Microbial Contamination in the Process of Rice Rolled in Dried Laver and Improvement of Shelf-life by Gamma Irradiation (김밥 제조공정에서의 미생물 오염도 평가 및 감마선 조사를 이용한 김밥의 보존안정성 향상)

  • 김동호;송현파;김재경;김정옥;이현자;변명우
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.32 no.7
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    • pp.991-996
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    • 2003
  • Determination of regional microbial contamination in the process of rice rolled in dried laver (Kimbab) and effects of gamma irradiation on the improvement of hygienic quality and shelf stability were investigated. Total aerobic bacterial distribution of raw materials of Kimbab were; 10$^{6}$ ∼10$^{7}$ CFU/g in dried laver, 10$^3$ CFU/g in cucumber and below 10 CFU/g in steamed rice, ham, fried egg, and salted radish. Total coliform bacteria were 10$^3$ CFU/g in dried laver and detected below detection limit (10 CFU/g) in other raw materials. And it was arithmetically calculated that the levels of total aerobic bacteria and coliform bacteria in Kimbab does not exceed 10$^{5}$ CFU/g and 10$^1$ CFU/g under the aseptic process, respectively. However, microbial contamination levels in just prepared Kimbab in a market were about 10$^{6}$ CFU/g of total aerobic and coliform bacteria. Therefore, it was considered that microbial contamination of Kimbab is mainly originated from environmental uptake during the preparation. The representative media for putrefying bacterial growth were steamed rice. Coliform bacteria were mainly increased in ham and fried egg during storage. The bacteria in dried laver were radio-resistant and survived at 3 kGy of gamma irradiation. Coliform bacteria on EMB agar plate were eliminated at the dose of 2 kGy. The sensory acceptability of 2 kGy irradiated Kimbab was stable and the Kimbab can be preserved for 24 hour at 15$^{\circ}C$. Therefore, it was considered that optimal irradiation dose for radicidation of Kimbab was 2 kGy.

Immobilization of an Enzyme with Chitosan Microbeads (Chitosan Microbeads에 의한 효소고정화)

  • SOHN Heung-Sik;PARK Seong-Min;SON Byung-Yil;CHOI Hyeon-Mee;LEE Keun-Tai
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.32 no.1
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    • pp.83-87
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    • 1999
  • Immobilization of amyloglucosidase (AMG) with chitosan microbead and its possible applications were evaluated. The diameter of chitosan inicrobead was about 1.2 mm and the optimum enzyme concentration for immobilization was 6 mg/ml. The relative activity of the immobilized enzyme was $97.8\%$ at pH 4.2 and $55^{\circ}C$ and the optimum condition for the immobilized enwme was the same to that of free enzyme. In case of temperature above $30^{\circ}C$, the activity of the immobilized enzyme was a little higher than that of free enzyme. The enzyme activities of both free and immobilized were stable for 6 months when stored at $35^{\circ}C$. The optimum temperatures of both enzymes for saccharification of the dextrinized starch were $55^{\circ}C$ while the relative activity of the immobilized enzlme was $62.6\%$.

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The Effect of Pre-treatment on the Anaerobic Digestion of waste Activated Sludge (하수슬러지의 혐기적 소화효율 향상을 위한 전처리 효과)

  • Kang, Chang-Min;Kim, Bong-Keun;Kim, In-Su;Kim, Byung-Tae
    • Journal of the Korea Organic Resources Recycling Association
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    • v.9 no.1
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    • pp.90-98
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    • 2001
  • The slow degradation rate of sewage sludge in anaerobic digesters is due to the rate limiting step of sludge hydrolysis. Therefore, the pre-treatment process had been carried out using acidic(pH 1.5, 3, 4, 5) and alkaline(pH9, 10, 13), thermal(50, 100, 150, $200^{\circ}C$) and ultrasonic treatment(400W, 20kHz, 15, 20, 25, 30, 35, 40, 50, 60min). In the best conditions of each treatment, the SCOD ratio(%) of treated/untreared samples were increased 102% in acid(pH5), 986% in alkali(pH13), 959% in thermal($200^{\circ}C$) and 1123% in ultrasonic(35min) treatment. As the result, the ultrasonic treatment was most effective, followed by alkali, thermal, acidic treatment. In the effects of total gas productivity, the thermal($200^{\circ}C$) pretreatment was the highest, followed by thermal($150^{\circ}C$), ultrasonic(90min), alkaline(pH9) and ultrasonic(50min).

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Poly(arylene ether ketone) block copolymer prepared through sulfonation process for polymer electrolyte membrane fuel cell (술폰화 공정을 통해 제조한 고분자 전해질형 연료전지용 폴리(아릴렌 이서 케톤) 블록 코폴리머)

  • Jang, Hyeri;Nahm, Keesuk;Yoo, Dongjin
    • Journal of Energy Engineering
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    • v.25 no.3
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    • pp.66-72
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    • 2016
  • In this study, a sulfonated poly(arylene ether ketone) block copolymer was prepared from hydrophilic oligomer and hydrophobic oligomer. The structure of the prepared membrane was characterized by $^1H$-NMR, FT-IR and GPC. The $M_w$(weight-average molecular weights) of the polymer was $209,700g\;mol^{-1}$ and the molecular weight distribution($M_w/M_n$) of 1.25 was obtained. The prepared membrane showed excellent thermal stability with gradual weight loss up to $200^{\circ}C$. The proton conductivity of SPAEK block copolymer reached the maximum of $9.0mS\;cm^{-1}$ at $90^{\circ}C$ under 100% relative humidity (RH). From the observed results, it is necessary to do more aggressive attempt to study the possibility of application as an ion-conductive composite electrolyte.

Thrombin Inhibition Activity of Fructus Extract of Crataggus pinnatifida Bunge (산사자 추출물의 트롬빈 저해활성)

  • Ryu, Hee-Young;Kim, Yung-Kwan;Kwun, In-Sook;Kwon, Chong-Suk;Jin, Ing-Nyol;Sohn, Ho-Yong
    • Journal of Life Science
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    • v.17 no.4 s.84
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    • pp.535-539
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    • 2007
  • The fructus of Crataegus pinnatifida Bunge has been used as medicinal and food source in worldwide. In this study, a strong direct thrombin inhibition and antithrombosis activity were identified from the methanol extract of C. pinnatifida Bunge fructus. The solvent fractionation of fructus extract using hexane, ethylacetate, butanol revealed that the butanol fraction has a prominent antithrombin activity. Thrombin time(blood-clot formation time) and activated partial thromboplastin time(aPTT) extended to 835% and 315% by addition of the butanol fraction at concentration of 1.25 mg/mL, whereas thrombin time extended to 287% by addition of aspirin at concentration of 1,25 mg/mL. The butanol fraction showed anthrone-positive and weak ninhydrine-postive reaction. The thrombin inhibitory activity was not related to previously reported flavonoids or polyphenols. The activity was maintained against acid treatment(0.5 N HCl for 120 min), but rapidly lost by heat-treatment($100^{\circ}C$ for 30 min). Our results suggested that fructus of C. pinnatifida Bunge with non-heat treatment process could be developed as a natural source of antithrombosis.