• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.1 s.118
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• pp.72-79
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• 2007

As environmental vibration requirements on precision equipment become more stringent, use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the tine delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.497-498
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• 2010

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.12
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• pp.1128-1138
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• 2010

One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.903-908
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• 2006

As environmental vibration requirements on precision equipment become more stringent. use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the time delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.9
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• pp.858-867
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• 2011

As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

• Transactions of the Korean Society of Automotive Engineers
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• v.20 no.2
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• pp.30-37
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• 2012

Pneumatic Active Engine Mount(PAEM) with open-loop control system has been developed to reduce the transmission of the idle-shake vibration induced by engine effectively and economically. A solenoid valve installed between PAEM and vacuum tank is on-off switched by the Pulse Width Modulate(PWM) control signal to decrease the dynamic stiffness of the engine mount. This paper presents the methodology to identify the optimal values of control parameters of a PAEM, i.e, turn-on timing and duty ratio of PWM signal for 6 different idle driving conditions. A scanning algorithm was first applied to the vehicle test to obtain the approximate optimal control parameters minimizing the vibration at front seat rail and at steering wheel. Then the PAEM system identification was fulfilled to find accurate optimal control parameters by using multi-layer neural networks of Levenberg-Marquardt algorithm with vehicle test data.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.12
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• pp.80-86
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• 2020

With the exception of welding activities, it is forbidden to use electricity in shipyards, owing to safety concerns such as the possibility of fire, explosions, and short circuits. In this paper, an automatic chamfering machine using pneumatics is proposed for use in such environments. Customers specify their requirements and the machine derives the corresponding theoretical design conditions. The proposed machine was used to perform 3D modeling, and its suitability and performance were confirmed via cutting experiments of the manufactured device. Two types of sensors may be used in this system: contact and non-contact. In the case of the contact type, an end-stop switch that can recognize the end of the material is installed, and when the machine reaches the end of the material, the end-stop switch is operated to cut off the air pressure. In the non-contact type, four sensors were used: photonic, ultrasonic, metal detection, and encoder. The use of the four sensors was repeated 30 times, and the average error determined. Thus, the optimum sensor was identified.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.04a
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• pp.450-451
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• 2009

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.7 s.124
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.831-836
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.