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http://dx.doi.org/10.5050/KSNVE.2010.20.12.1128

An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing  

Kim, Hyung-Tae (한국생산기술연구원)
Kim, Cheol-Ho (한국생산기술연구원 생산시스템연구부)
Lee, Kang-Won (한국생산기술연구원)
Lee, Gyu-Seop (알엠에스테크놀러지(주))
Son, Sung-Wan (알엠에스테크놀러지(주))
Publication Information
Transactions of the Korean Society for Noise and Vibration Engineering / v.20, no.12, 2010 , pp. 1128-1138 More about this Journal
Abstract
One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.
Keywords
Active Vibration Control; Electro Magnetic Levitation; Air Spring; Pneumatic Isolator; Resonance Frequency; Semiconductor Manufacturing Environment;
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