• 제목/요약/키워드: 공압능동제어

검색결과 11건 처리시간 0.049초

공압능동제어를 이용한 저주파 영역에서의 공압제진대 제진성능 개선에 대한 연구 (Performance Enhancement of Pneumatic Vibration Isolation Tables in Low Frequency by Active Control)

  • 신윤호;오기용;이정훈;김광준
    • 한국소음진동공학회논문집
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    • 제17권1호
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    • pp.72-79
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    • 2007
  • 정밀 장비 운전시 지반진동 절연을 목적으로 널리 사용되는 공압제진대는 정밀 장비에서 요구하는 지반진동 규제의 강화에 따라 보다 개선된 절연성능을 요구받는다. 수동형 공압제진대의 경우, 제진대의 설계 변수들을 이용하여 그 성능을 개선하고 있으나, 제진대의 고유진동수 및 그 부근에서의 절연 성능 향상에는 한계가 있다. 이 연구에서는 진폭 의존성 등의 비선형성을 가지는 공압제진대에 대하여 비선형 강인성 능동제어이론인 시간지연 제어 기법을 적용하여 고유진동수 및 그 부근에서의 절연성능을 향상시키고자 한다. 공압제진대에 시간지연 제어기법을 적용하는 과정 및 능동제어 이론 적용에 따른 절연 성능 향상에 대한 모사실험 결과를 기술하고자 하며, 실험을 통하여 그 유효성 보이고자 한다.

반도체 생산에서 진동 제어를 위한 전자기 에어 스프링 (An Electro-magnetic Air Spring for Vibration Control in Semiconductor Manufacturing)

  • 김형태;김철호;이강원;이규섭;손성완
    • 한국소음진동공학회논문집
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    • 제20권12호
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    • pp.1128-1138
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    • 2010
  • 정밀 방진에서 전형적인 문제로 고하중으로 인한 저주파 공진 특성이 있다. 전자기 에어 스프징은 진동 제어 장치이자 능동형 방진 장치이다. 이 연구에서 전자기 에어 스프링은 반도체 생산을 위한 저주파 공진을 제거하는 것을 목적으로 한다. 능동형 방진 장치로 기계 및 전가 부분은 2.5톤의 하 중에 작동되도록 설계하였다. 전자기 스프링은 탄성 공압 챔버 내에 공기압을 이용하여 띄우고, 전자기 된 시스템에 의하면 공진 주파수 영역에서 제어 시간 및 최고 피크가 상당히 줄어들었고, 그 결과 피동형 시스템 상의 고유 진동에 의해 발생되는 공진을 피할 수 있음을 보였다.

공압능동제어를 이용한 저주파 영역에서의 공압제진대 제진성능 개선에 대한 연구 (Performance Enhancement of Pneumatic Vibration Isolation Tables in Low Frequency by Active Control)

  • 오기용;이정훈;김광준;신윤호
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2006년도 추계학술대회논문집
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    • pp.903-908
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    • 2006
  • As environmental vibration requirements on precision equipment become more stringent. use of pneumatic isolators has become more popular and their performance is subsequently required to be further improved. Dynamic performance of passive pneumatic isolators is related to various design parameters in a complicated manner and, hence, is very limited especially in low frequency range by volume of chambers. In this study, an active control technique, so called time delay control which is considered to be adequate for a low frequency or nonlinear system, is applied to a single chamber pneumatic isolator. The procedure of applying the time delay control law to the pneumatic isolator is presented and its effectiveness in enhancement of transmissibility performance is shown based on simulation and experiment. Comparison between passive and active pneumatic isolators is also presented.

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이동 질량을 포함하는 능동형 공압제진대에 대한 시간지연제어기법의 적용 검토 (Examination on Active Pneumatic Vibration Isolation Table with Moving Masses on It by Time Delay Control)

  • 신윤호;문석준;정정훈;김병현
    • 한국소음진동공학회논문집
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    • 제21권9호
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    • pp.858-867
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    • 2011
  • As applying an active control technique to a pneumatic vibration isolation system, the settling time for the payload excitation could be remarkably reduced as well as the improvement of isolation performance for the ground vibration. Some previous researches were dealt with the settling time through the simulation or experiment but, the discussion on the simulation or experimental results including moving parts, such as a XY-stage, on the isolation table rarely exists. As considering the moving part, the dynamic model could be time varying system and in such a case the force imposed on pneumatic vibration isolation table could be described by inertial forces of moving parts according to Newton's 3rd law, the action and reaction law. In this paper, the simulation procedure of the 3-DOF active pneumatic vibration isolation system including moving parts by TDC(time delay control) technique is proposed and the effectiveness through simulation results are also shown.

공압식 능동형 엔진마운트시스템의 최적 제어매개변수 식별 (Identification of Optimal Control Parameters for a Pneumatic Active Engine Mount System)

  • 김일조;이재천;최재용;김정훈
    • 한국자동차공학회논문집
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    • 제20권2호
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    • pp.30-37
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    • 2012
  • Pneumatic Active Engine Mount(PAEM) with open-loop control system has been developed to reduce the transmission of the idle-shake vibration induced by engine effectively and economically. A solenoid valve installed between PAEM and vacuum tank is on-off switched by the Pulse Width Modulate(PWM) control signal to decrease the dynamic stiffness of the engine mount. This paper presents the methodology to identify the optimal values of control parameters of a PAEM, i.e, turn-on timing and duty ratio of PWM signal for 6 different idle driving conditions. A scanning algorithm was first applied to the vehicle test to obtain the approximate optimal control parameters minimizing the vibration at front seat rail and at steering wheel. Then the PAEM system identification was fulfilled to find accurate optimal control parameters by using multi-layer neural networks of Levenberg-Marquardt algorithm with vehicle test data.

면취 공정의 능동 제어를 위한 공압식 자동 강재 면취기와 센서 시스템의 제작 및 실험 (Fabrication and Experiment of Pneumatic Steel Plate Chamfering Machine and Sensor System for Active Control of Chamfering)

  • 나영민;이현석;김민효;박종규
    • 한국기계가공학회지
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    • 제19권12호
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    • pp.80-86
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    • 2020
  • With the exception of welding activities, it is forbidden to use electricity in shipyards, owing to safety concerns such as the possibility of fire, explosions, and short circuits. In this paper, an automatic chamfering machine using pneumatics is proposed for use in such environments. Customers specify their requirements and the machine derives the corresponding theoretical design conditions. The proposed machine was used to perform 3D modeling, and its suitability and performance were confirmed via cutting experiments of the manufactured device. Two types of sensors may be used in this system: contact and non-contact. In the case of the contact type, an end-stop switch that can recognize the end of the material is installed, and when the machine reaches the end of the material, the end-stop switch is operated to cut off the air pressure. In the non-contact type, four sensors were used: photonic, ultrasonic, metal detection, and encoder. The use of the four sensors was repeated 30 times, and the average error determined. Thus, the optimum sensor was identified.

공기스프링을 이용한 방진테이블의 능동 제어 (Active Control of Vibration Isolation Table Using Air-spring)

  • 안채헌;임광혁;진경복;임경화
    • 한국소음진동공학회논문집
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    • 제17권7호
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    • pp.565-571
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    • 2007
  • In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

공기스프링을 이용한 방진 테이블의 능동 제어 (Active Control of Vibration Isolation Table Using Air-spring)

  • 안채헌;임광혁;권혁진;정진훈;배윤화;진경복;임경화
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2006년도 춘계학술대회논문집
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    • pp.831-836
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    • 2006
  • In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.

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