• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.284-284
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.320-320
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• 2004

반도체용 노광장비나 검사장비, 초정밀 광학렌즈, 비구면 렌즈 가공 등의 핵심이 되는 것은 초정밀결정기술이다. 서브미크론의 정밀도를 갖는 장비는 한치의 오차도 허용치 야고 계획된 경로대로 정확하게 목표지점에 도달해야 초정밀 가공을 기대 할 수 있다 초정밀 공기정압 스테이지는 저마찰 특성과 높은 운동정밀도, 청정환경유지가 가능하여 반도체 노광장비에서 PDP 나 LCD검사장비, 초정밀가공 가공기 등 다양한 정밀장비에서 활용된다.(중략)

• 한국산학기술학회논문지
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• 제21권11호
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• pp.554-560
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• 2020

평판 디스플레이 제조 공정에서 대상물의 위치 결정을 위해 고정밀 평면 모션 스테이지를 사용한다. 이 유형의 스테이지는 일반적으로 마찰이 없는 선형 모터와 에어 베어링을 사용하며, 고정밀 위치 센서로 레이저 간섭계를 사용한다. 스테이지의 불가피한 기생 운동에 의해 야기되는 요 모션 오차는 위치 결정 대상체의 향 변화를 의미하므로, 스테이지의 성능과 공정 정밀도 향상을 위해 요 모션 오차의 실시간 동적 보정은 매우 중요하다. 요 모션 오차 보상에는 갠트리 제어가 일반적이며, 이 방법을 공기베어링 가이드를 사용하는 스테이지에 적용하기 위해서 회전 모션을 허용하는 유연기구가 스테이지에 적용된다. 본 논문은 공기베어링과 유연기구를 갖춘 H형 XY 스테이지의 정속 구동 성능을 개선하는 방법을 제안한다. 유연기구를 포함한 스테이지의 갠트리 제어 시 선형 모터로부터 발생하는 상호 리플의 발생 원인을 분석하고, 이러한 상호 리플을 보상하는 방안으로 적응 학습 제어를 제시한다. 제시 방안의 검증을 위해 시뮬레이션을 수행하여, 보상 제어를 통해 속도 리플이 약 22 % 수준으로 감소함을 확인하였다. 그리고 요 모션 오차가 발생하는 스테이지 상태를 가정하여 리플 저감 효과를 검증하였다.

• 한국정밀공학회지
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• 제26권8호
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• pp.112-118
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• 2009

A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure rise was caused by additional leakage resulting from stage velocity, along with adsorption and outgassing of gas molecules from the guide rail surface. Though tilting of the stage due to acceleration and deceleration reached several micrometers, it had a negligible effect on pressure rise because the tilting time was very short. Therefore, a rotary air bearing stage showed much less pressure rise than a linear stage because the rotary stage theoretically has nothing to do with the above causes. Additional leakage caused by stage velocity was inevitable if the stage had movements, but pressure rise caused by adsorption and outgassing could be suppressed by improving the surface quality to reduce real surface area, and by coating the guide rail surface with titanium nitride (TiN) which has less adhesion probability of gas molecules. The results also indicate that the pressure rise increased when the air bearing stage operated under high vacuum conditions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• 한국정밀공학회지
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• 제24권8호통권197호
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• pp.89-96
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• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.

• 한국정밀공학회지
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• 제27권6호
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• pp.39-46
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• 2010

Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.73-74
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• 2009