• Title/Summary/Keyword: 고속 처리

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A Study on Batch-Type Remote Plasma Dry Cleaning Process for Native Oxide Removal (배치식 플라즈마 세정 설비를 이용한 자연산화막 제거 공정)

  • Park, Jae-Young;Yi, Wook-Yeol;Hyung, Yong-Woo;Nam, Seok-Woo;Lee, Hyeon-Deok;Song, Chang-Lyong;Kang, Ho-Kyu;Roh, Yong-Han
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.247-251
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    • 2004
  • 반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

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A 0.31pJ/conv-step 13b 100MS/s 0.13um CMOS ADC for 3G Communication Systems (3G 통신 시스템 응용을 위한 0.31pJ/conv-step의 13비트 100MS/s 0.13um CMOS A/D 변환기)

  • Lee, Dong-Suk;Lee, Myung-Hwan;Kwon, Yi-Gi;Lee, Seung-Hoon
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.3
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    • pp.75-85
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    • 2009
  • This work proposes a 13b 100MS/s 0.13um CMOS ADC for 3G communication systems such as two-carrier W-CDMA applications simultaneously requiring high resolution, low power, and small size at high speed. The proposed ADC employs a four-step pipeline architecture to optimize power consumption and chip area at the target resolution and sampling rate. Area-efficient high-speed high-resolution gate-bootstrapping circuits are implemented at the sampling switches of the input SHA to maintain signal linearity over the Nyquist rate even at a 1.0V supply operation. The cascode compensation technique on a low-impedance path implemented in the two-stage amplifiers of the SHA and MDAC simultaneously achieves the required operation speed and phase margin with more reduced power consumption than the Miller compensation technique. Low-glitch dynamic latches in sub-ranging flash ADCs reduce kickback-noise referred to the differential input stage of the comparator by isolating the input stage from output nodes to improve system accuracy. The proposed low-noise current and voltage references based on triple negative T.C. circuits are employed on chip with optional off-chip reference voltages. The prototype ADC in a 0.13um 1P8M CMOS technology demonstrates the measured DNL and INL within 0.70LSB and 1.79LSB, respectively. The ADC shows a maximum SNDR of 64.5dB and a maximum SFDR of 78.0dB at 100MS/s, respectively. The ABC with an active die area of $1.22mm^2$ consumes 42.0mW at 100MS/s and a 1.2V supply, corresponding to a FOM of 0.31pJ/conv-step.

Investigation of the Correlation between Seoul Neuropsychological Screening Battery Scores and the Gray Matter Volume after Correction of Covariates of the Age, Gender, and Genotypes in Patients with AD and MCI (알츠하이머 치매 및 경도인지기능장애 환자에서 나이, 성별, 유전자형을 고려한 뇌 회백질 부피와 표준신경심리검사와의 상관관계 연구)

  • Lee, Seung-Yeon;Yoon, Soo-Young;Kim, Min-Ji;Rhee, Hak Young;Ryu, Chang-Woo;Jahng, Geon-Ho
    • Investigative Magnetic Resonance Imaging
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    • v.17 no.4
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    • pp.294-307
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    • 2013
  • Purpose : To investigate the correlations between Seoul Neuropsychological Screening Battery (SNSB) scores and the gray matter volumes (GMV) in patients with Alzheimer's disease (AD) and mild cognitive impairment (MCI) and cognitively normal (CN) elderly subjects with correcting the genotypes. Materials and Methods: Total 75 subjects were enrolled with 25 subjects for each group. The apolipoprotein E (APOE) epsilon genotypes, SNSB scores, and the 3D T1-weighted images were obtained from all subjects. Correlations between SNSB scores and GMV were investigated with the multiple regression method for each subject group using both voxel-based and region-of-interest-based analyses with covariates of age, gender, and the genotype. Results: In the AD group, Rey Complex Figure Test (RCFT) delayed recall scores were positively correlated with GMV. In the MCI group, Seoul Verbal Learning Test (SVLT) scores were positively correlated with GMV. In the CN group, GMV negatively correlated with Boston Naming Test (K-BNT) scores and Mini-Mental State Examimation (K-MMSE) scores, but positively correlated with RCFT scores. Conclusion: When we used covariates of age, gender, and the genotype, we found statistically significant correlations between some SNSB scores and GMV at some brain regions. It may be necessary to further investigate a longitudinal study to understand the correlation.

Static and Dynamic Analysis for Railway Tunnel according to Filling Materials for overbroken tunnel bottom (철도터널 하부 여굴처리 방법에 대한 정적 및 동적 안정성 검토)

  • Seo, Jae-Won;Cho, Kook-Hwan
    • Journal of the Korean Society for Railway
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    • v.20 no.5
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    • pp.668-682
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    • 2017
  • Alignments of railways recently constructed in Korea have been straightened due to the advent of high-speed rail, which means increasing the numbers of tunnels and bridges. Overbreak during tunnel construction may be unavoidable, and is very influential on overall stability. Over-excavation in tunneling is also one of the most important factors in construction costs. Overbreak problems around crown areas have decreased with improvements of excavation methods, but overbreak problems around bottom areas have not decreased because those areas are not very influential on tunnel stability compared with crown areas. The filling costs of 10 cm thickness of overbreak at the bottom of a tunnel are covered under construction costs by Korea Railway Authority regulations, but filling costs for more than the covered thickness are considered losses of construction cost. The filling material for overbreak bottoms of tunnels should be concrete, but concrete and mixed granular materials with fractured rock are also used for some sites. Tunnels in which granular materials with fractured rock are used may have a discontinuous section under the concrete slab track. The discontinuous section influences the propagation of waves generated from train operation. When the bottom of a tunnel is filled with only concrete material, the bottom of the tunnel can be considered as a continuous section, in which the waves generated from a train may propagate without reflection waves. However, a discontinuous section filled with mixed granular materials may reflect waves, which can cause resonance of vibration. The filled materials and vibration propagation characteristics are studied in this research. Tunnel bottom filling materials that have ratios of granular material to concrete of 5.0 %, 11.5 %, and 18.0 % are investigated. Samples were made and tested to determine their material properties. Static numerical analyses were performed using the FEM program under train operation load; test results were found to satisfy the stability requirements. However, dynamic analysis results show that some mixed ratios may generate resonance vibration from train operation at certain speeds.

A Real-Time Head Tracking Algorithm Using Mean-Shift Color Convergence and Shape Based Refinement (Mean-Shift의 색 수렴성과 모양 기반의 재조정을 이용한 실시간 머리 추적 알고리즘)

  • Jeong Dong-Gil;Kang Dong-Goo;Yang Yu Kyung;Ra Jong Beom
    • Journal of the Institute of Electronics Engineers of Korea SP
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    • v.42 no.6
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    • pp.1-8
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    • 2005
  • In this paper, we propose a two-stage head tracking algorithm adequate for real-time active camera system having pan-tilt-zoom functions. In the color convergence stage, we first assume that the shape of a head is an ellipse and its model color histogram is acquired in advance. Then, the min-shift method is applied to roughly estimate a target position by examining the histogram similarity of the model and a candidate ellipse. To reflect the temporal change of object color and enhance the reliability of mean-shift based tracking, the target histogram obtained in the previous frame is considered to update the model histogram. In the updating process, to alleviate error-accumulation due to outliers in the target ellipse of the previous frame, the target histogram in the previous frame is obtained within an ellipse adaptively shrunken on the basis of the model histogram. In addition, to enhance tracking reliability further, we set the initial position closer to the true position by compensating the global motion, which is rapidly estimated on the basis of two 1-D projection datasets. In the subsequent stage, we refine the position and size of the ellipse obtained in the first stage by using shape information. Here, we define a robust shape-similarity function based on the gradient direction. Extensive experimental results proved that the proposed algorithm performs head hacking well, even when a person moves fast, the head size changes drastically, or the background has many clusters and distracting colors. Also, the propose algorithm can perform tracking with the processing speed of about 30 fps on a standard PC.

Development of Analysis Method of Caffeine and Content Survey in Commercial Foods by HPLC (HPLC를 이용한 카페인의 분석법 개발 및 시판 식품중 함유량 조사)

  • Kim, Hee-Yun;Lee, Young-Ja;Hong, Ki-Hyoung;Lee, Chul-Won;Kim, Kil-Saeng;Ha, Sang-Chul
    • Korean Journal of Food Science and Technology
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    • v.31 no.6
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    • pp.1471-1476
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    • 1999
  • A simple and practical method for determination of caffeine in foods was developed. The analysis of caffeine was performed by reverse phase high performance liquid chromatography using a ${\mu}-Bondapak\;C_{18}$ column at isocratic condition with methanol-acetic acid-water(20 : 1 : 79) on UV detector at 280 nm. The clean-up and extraction of caffeine in samples were based on a simple pretreatment using a Sep-Pak $C_{18}$ cartridge. Recovery rates obtained with this method for cider, candy, cookie, milk, ice cream and persimmon leaf tea were 99.23%, 99.50%, 99.17%, 99.37%, 98.93% and 99.10% respectively. And the detection limit of caffeine was $0.1\;{\mu}g/mL$. With this method, the range of caffeine contents extracted from coffee, green tea, black tea, Oolong tea(tea bag), soft drinks, ice cream, milk and commercial confectionery were $3.38{\sim}37.50\;mg/g,\;16.30{\sim}26.10\;mg/g,\;10.80{\sim}16.65\;mg/g,\;11.25\;mg/g,\;0.06{\sim}0.11\;mg/g,\;0.04{\sim}0.44\;mg/g,\;0.04{\sim}0.39\;mg/g\;and\;0.10{\sim}1.80\;mg/g$, respectively. But caffeine was not detected in the other tea such as Acanthopanax sessiliflorum tea, Angelica gigas tea, Angelica tea, Arrow root tea, Duchu'ng tea, Dunggulle tea, Ganoerma lucidum tea, Ginger tea powder, Persimmon leaf tea, Ssanghwa tea and Cocoa mix powder.

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DIFFERENCE IN BOND STRENGTH ACCORDING TO FILLING TECHNIQUES AND CAVITY WALLS IN BOX-TYPE OCCLUSAL COMPOSITE RESIN RESTORATION (박스 형태의 복합레진 수복시 충전법 및 와동벽에 따른 결합력 차이에 관한 연구)

  • Ko, Eun-Joo;Shin, Dong-Hoon
    • Restorative Dentistry and Endodontics
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    • v.34 no.4
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    • pp.350-355
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    • 2009
  • Bond strength depends on characteristics of bonding surface and restorative technique. The majority of studies dealing with dentin bond strength were carried out on flat bonding surface, therefore, difference of bond strength between axial wall and pulpal wall is not clear yet. This study evaluated bonding difference between cavity walls in class I composite resin restoration with different filling techniques. Twenty extracted caries-free human third molars were used. Cavities were prepared in 6 ${\times}$4 ${\times}$3 mm box-type and divided into four groups according to filling technique and bonding surface: Group I; bulk filling - pulpal wall, Group II; bulk filling - axial wall, Group III; incremental filling - pulpal wall, Group IV; incremental filling - axial wall. Cavities were filled with Filtek $Z250^{(R)}$(3M/ESPE., USA) and Clearfill SE $bond^{(R)}$(Kuraray, Japan). After 24 hour-storage in $37^{\circ}C$water, the resin bonded teeth were sectioned bucco-lingualy at the center of cavity. Specimens were vertically sectioned into 1.0 ${\times}$1.0 mm thick serial sticks perpendicular to the bond surface using a low-speed diamond saw (Accutom 50, Struers, Copenhagen, Denmark) under water cooling. The trimmed specimens were then attached to the testing device and in turn, was placed in a universal testing machine (EZ test, Shimadzu Co., Kyoto, Japan) for micro-tensile testing at a cross-head speed of 1 mm/min. The results obtained were statistically analyzed using 2-way ANOVA and t-test at a significance level of 95%. The results were as follows: 1. There was no significant difference between bulk filling and incremental filling. 2. There was no significant difference between pulpal wall and axial wall, either. Within the limit of this study, it was concluded that microtensile bond strength was not affected by the filling technique and the site of cavity walls.

A study on the emission characteristics of greenhouse gases according to the vehicle technology, fuel oil type and test mode (차량기술, 연료 유종 및 시험모드 특성에 따른 온실가스의 배출특성 연구)

  • Lee, Jung-Cheon;Lee, Min-Ho;Kim, Ki-Ho;Park, An-Young
    • Journal of the Korean Applied Science and Technology
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    • v.34 no.4
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    • pp.962-973
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    • 2017
  • Concerns about an air pollution are gradually increasing at home and abroad. The automotive and fuel researchers are trying to reduce emissions and greenhouse gases of vehicles through a research on new engine designs and innovative after-treatment systems using clean fuels (eco-alternative fuel) and fuel quality improvements. In this paper, we stduy the emission characteristics of greenhouse gases on seven vehicles using gasoline, diesel, and LPG by legal test mode in domestic and abroad.(Urban mode, Highway mode, rapidly acceleration and deceleration, using air conditioner, low temperature condition) Regardless of fuels, most of the greenhouse gases tend to show the worst results in cold FTP-75 mode. In the case of A vehicles (2.0 MPI) and B vehicles (2.4 GDI) using a gasoline fuel, the factors that increase greenhouse gases are in order of a rapidly acceleration and deceleration, using air conditioner, low temperature condition. But G vehicles(LPLi) have different emission characteristics from another vehicles. In the case of A vehicles (2.0 w/o DPF) and B vehicles (2.2 with DPF) using a diesel fuel, the factors that increase greenhouse gases are in order of a rapidly acceleration and deceleration, using air conditioner, low temperature condition. However, the factor of F vehicles are in order of low temperature condition, using air conditioner, rapidly acceleration and deceleration. In conclusion, it will be an effective method to apply different technologies of emission reduction for each fuel.

Multiple SL-AVS(Small size & Low power Around View System) Synchronization Maintenance Method (다중 SL-AVS 동기화 유지기법)

  • Park, Hyun-Moon;Park, Soo-Huyn;Seo, Hae-Moon;Park, Woo-Chool
    • Journal of the Korea Society for Simulation
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    • v.18 no.3
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    • pp.73-82
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    • 2009
  • Due to the many advantages including low price, low power consumption, and miniaturization, the CMOS camera has been utilized in many applications, including mobile phones, the automotive industry, medical sciences and sensoring, robotic controls, and research in the security field. In particular, the 360 degree omni-directional camera when utilized in multi-camera applications has displayed issues of software nature, interface communication management, delays, and a complicated image display control. Other issues include energy management problems, and miniaturization of a multi-camera in the hardware field. Traditional CMOS camera systems are comprised of an embedded system that consists of a high-performance MCU enabling a camera to send and receive images and a multi-layer system similar to an individual control system that consists of the camera's high performance Micro Controller Unit. We proposed the SL-AVS (Small Size/Low power Around-View System) to be able to control a camera while collecting image data using a high speed synchronization technique on the foundation of a single layer low performance MCU. It is an initial model of the omni-directional camera that takes images from a 360 view drawing from several CMOS camera utilizing a 110 degree view. We then connected a single MCU with four low-power CMOS cameras and implemented controls that include synchronization, controlling, and transmit/receive functions of individual camera compared with the traditional system. The synchronization of the respective cameras were controlled and then memorized by handling each interrupt through the MCU. We were able to improve the efficiency of data transmission that minimizes re-synchronization amongst a target, the CMOS camera, and the MCU. Further, depending on the choice of users, respective or groups of images divided into 4 domains were then provided with a target. We finally analyzed and compared the performance of the developed camera system including the synchronization and time of data transfer and image data loss, etc.

End to End Model and Delay Performance for V2X in 5G (5G에서 V2X를 위한 End to End 모델 및 지연 성능 평가)

  • Bae, Kyoung Yul;Lee, Hong Woo
    • Journal of Intelligence and Information Systems
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    • v.22 no.1
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    • pp.107-118
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    • 2016
  • The advent of 5G mobile communications, which is expected in 2020, will provide many services such as Internet of Things (IoT) and vehicle-to-infra/vehicle/nomadic (V2X) communication. There are many requirements to realizing these services: reduced latency, high data rate and reliability, and real-time service. In particular, a high level of reliability and delay sensitivity with an increased data rate are very important for M2M, IoT, and Factory 4.0. Around the world, 5G standardization organizations have considered these services and grouped them to finally derive the technical requirements and service scenarios. The first scenario is broadcast services that use a high data rate for multiple cases of sporting events or emergencies. The second scenario is as support for e-Health, car reliability, etc.; the third scenario is related to VR games with delay sensitivity and real-time techniques. Recently, these groups have been forming agreements on the requirements for such scenarios and the target level. Various techniques are being studied to satisfy such requirements and are being discussed in the context of software-defined networking (SDN) as the next-generation network architecture. SDN is being used to standardize ONF and basically refers to a structure that separates signals for the control plane from the packets for the data plane. One of the best examples for low latency and high reliability is an intelligent traffic system (ITS) using V2X. Because a car passes a small cell of the 5G network very rapidly, the messages to be delivered in the event of an emergency have to be transported in a very short time. This is a typical example requiring high delay sensitivity. 5G has to support a high reliability and delay sensitivity requirements for V2X in the field of traffic control. For these reasons, V2X is a major application of critical delay. V2X (vehicle-to-infra/vehicle/nomadic) represents all types of communication methods applicable to road and vehicles. It refers to a connected or networked vehicle. V2X can be divided into three kinds of communications. First is the communication between a vehicle and infrastructure (vehicle-to-infrastructure; V2I). Second is the communication between a vehicle and another vehicle (vehicle-to-vehicle; V2V). Third is the communication between a vehicle and mobile equipment (vehicle-to-nomadic devices; V2N). This will be added in the future in various fields. Because the SDN structure is under consideration as the next-generation network architecture, the SDN architecture is significant. However, the centralized architecture of SDN can be considered as an unfavorable structure for delay-sensitive services because a centralized architecture is needed to communicate with many nodes and provide processing power. Therefore, in the case of emergency V2X communications, delay-related control functions require a tree supporting structure. For such a scenario, the architecture of the network processing the vehicle information is a major variable affecting delay. Because it is difficult to meet the desired level of delay sensitivity with a typical fully centralized SDN structure, research on the optimal size of an SDN for processing information is needed. This study examined the SDN architecture considering the V2X emergency delay requirements of a 5G network in the worst-case scenario and performed a system-level simulation on the speed of the car, radius, and cell tier to derive a range of cells for information transfer in SDN network. In the simulation, because 5G provides a sufficiently high data rate, the information for neighboring vehicle support to the car was assumed to be without errors. Furthermore, the 5G small cell was assumed to have a cell radius of 50-100 m, and the maximum speed of the vehicle was considered to be 30-200 km/h in order to examine the network architecture to minimize the delay.