The development of ultra high-speed metal film deposition system and process technology for a heat sink in digital devices (디지털 소자용 방열판 제작을 위한 초고속 금속필름 증착장치 및 공정기술 개발)
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- Journal of the Korea Academia-Industrial cooperation Society
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- v.18 no.7
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- pp.17-25
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- 2017