The development of ultra high-speed metal film deposition system and process technology for a heat sink in digital devices |
Yoon, Hyo Eun
(Department of Physics & Nano Science, Sun Moon University)
Ahn, Seong Joon (Division of Mechanical and ICT Convergence Engineering, Sun Moon University) Han, Dong Hwan (Department of BT-Convergent Pharmaceutical Engineering, Sun Moon University) Ahn, Seungjoon (Division of Mechanical and ICT Convergence Engineering, Sun Moon University) |
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