• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2003.05a
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• pp.497-502
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• 2003

청정석탄이용기술개발의(CCT : Clean Coal Technology) 일환으로 차세대 발전방식으로 유력시되고 있는 기술인 석탄가스화발전기술(IGCC), 석탄가스화 연료전지(IGFC)등에서 고온건식탈황은 필수요소기술이다. 고온건식탈황기술의 핵심기술은 탈황제개발고 공정기술개발로 나누어 볼 수 있다. 탈황제개발은 국내고유 탈황제개발 연구가 진행 중에 있고 유동층과 고속유동층에 적합한 탈황제를 kg단위로 성형하여 공정개발에서 반응특성 실험을 하였다.(중략)

• Electronics and Telecommunications Trends
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• v.4 no.2
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• pp.76-109
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• 1989

본 연구에서는 초고집적 반도체소자의 제작을 위한 건식 식각장비의 기술동향 분석과 식각공정에 대한 요구조건 추출 및 실제의 공정예를 검토함으로써 submicron급의 초미세형상을 가공하는데 이방성과 저손상의 중요한 특성을 갖는 ECR 플라즈마, 특히 저온의 식각방식이 차세대의 건식 식각장치의 주류가 될 것임을 예측하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.584-584
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• 2012

결정형 실리콘 태양전지 공정 중 표면 texturing 공정은 표면에 요철을 형성시켜 반사되는 빛 손실을 줄여서, 증가된 빛 흡수 양에 의해 단락전류(Isc)를 증가시키는데 그 목적이 있다. 표면 texturing 공정은 습식 식각과 건식 식각에 의한 방법으로 나눌 수 있다. 습식 식각은 KOH, TMAH, HNA 등의 실리콘 식각 용액을 사용하여 공정상의 위험도가 크고, 사용 후 용액의 폐기물에 의한 환경오염 문제가 있다. 건식 식각은 습식 식각과 달리 폐기물의 처리가 없고 미량의 가스를 이용한다. 그리고 다결정 실리콘 웨이퍼처럼 불규칙적인 결정방향에도 영향을 받지 않는 장점을 가지고 있어서 건식 식각을 이용한 표면 texturing 공정에 관한 많은 연구가 진행되고 있으며, 특히 RIE(reactive ion etching)를 이용한 태양전지 texturing 공정이 가장 주목을 받고 있다. 하지만 기존의 RIE를 이용하여 표면 texturing 공정을 하게 되면 500 nm 이하의 needle-like 구조의 표면이 만들어진다. Needle-like 구조의 표면은 전극을 형성할 때에 접촉 면적이 좁기 때문에 adhesion이 좋지 않은 것과 단파장 대역에서 광 손실이 많다는 단점이 있다. 본 논문에서는 기존의 RIE texturing의 단점을 보완하기 위해 챔버 내부에 metal-mesh를 장착한 후 RIE를 이용하여 $1{\mu}m$의 피라미드 구조를 형성하였고, RIE 공정 시 ion bombardment에 의한 표면 손상을 제거(RIE damage remove etching)하기 위하여 10초간 TMAH(Tetramethyl -ammonium hydroxide, 25 %) 식각 공정을 하였다.

• Textile Coloration and Finishing
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• v.3 no.4
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• pp.29-38
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• 1991

섬유에 대한 plasma 처리의 process상 특징은, 첫째 건식공정 둘째 간략화된 가공, 이라고 하는 두 가지 특징을 들 수 있다. 일반적인 섬유가공에서는 처리시에 대량의 물이라든지, 증기를 사용하고, 또 다량의 열 energy를 표하기 때문에, plasma 처리와 같은 기상처리기술에 대한 기대가 그 무엇보다 크다. 만약, 종래의 습식공정에 의한 섬유가공공정의 전부나, 일부를, 이 건식방법인 plasma공정으로 바꿀 수만 있다면 절수라든지, energy절약에도 크게 이바지하여, 경제적인 효과가 클 뿐아니라, 염료와 염색조제들을 위시한, 가공처리제 등의 사용량도 크게 줄일 수 있어서, 공해의 미연방지에도 크게 이바지하게 될 것이다.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.934-937
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• 1999

MMIC 제작을 위한 단일 반도체 공정으로써 PECVD를 이용한 Si₃N₄의 증착, RIE를 이용한 CaAs via-hole건식식각, 그리고 airbridge 공정조건을 위한 실험 및 분석 작업을 수행하였다. Si₃N₄의 증착 실험에서는 굴절률이 2인 조건을, GaAs via-hole 식각 실험에서는 최적화된 thru-via의 모양과 식각률을 갖는 조건을, airbridge 실험에서는 polyimide coating 및 건식 식각 조건과 금 도금 및 습식 식각의 최적 조건들을 찾아내었다.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.14 no.4
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• pp.435-443
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• 2016

This paper describes the development of a dry operation process for PWR spent nuclear fuel, which is currently stored in the domestic NPP's storage pool, using a dual purpose metal cask. Domestic NNPs have had experience with wet type transportation of PWR spent nuclear fuel between neighboring NPPs since the early 1990s, but no experience with dry type operation. For this reason, we developed a specific operation process and also confirmed the safety of the major cask components and its spent nuclear fuel during the dual purpose metal cask operation process. We also describe the short term operation process that was established to be completed within 21 hours and propose the allowable working time for each step (15 hours for wet process, 3 hours for drain process and 3 hours for vacuum drying process).

• Journal of the Korean Recycled Construction Resources Institute
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• v.3 no.1
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• pp.7-14
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• 2015

The aim of this research is suggesting dry processed bottom ash as a new and economical source of lightweight aggregate for mortar and concrete. The dry process of bottom ash is an advance method of water-free and no chloride because only cooled down by double dry conveyer belt systems. Furthermore, because of relatively slow cooling down process helps burning up the remaining carbon in bottom ash. Using this dry process bottom ash, to evaluate the feasibility of using as a lightweight aggregate for mortar and concrete, two-phase of experiments were conducted: 1) improving shape of the bottom ash, and 2) controlling grade of the bottom ash. From the first phase of experiment, additional abrasing process was conducted for round shape bottom ash, hence improved workability and compressive strength was achieved while unit weight was increased comparatively. Based on the better shape of bottom ash, from the second phase, various grades were adopted on cement mortar, standard grade showed the most favorable results on fresh and hardened properties. It is considered that the results of this research contribute on widening sustainable method of using bottom ash based on the dry process and increasing value of bottom ash as a lightweight aggregate for concrete.

• Resources Recycling
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• v.18 no.4
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• pp.14-23
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• 2009

In terms of resources recycling and resolving waste disposal problems, it is very important to recover precious metals like Au, Ag and Pd and valuable metals like Cu, Sn and Ni from the scraps of waste electrical and electronic equipment(WEEE) that consists of detective electrical and electronic parts discarded during manufacturing electrical and electronic equipments and waste electrical and electronic parts generated during disassembling them. In general, the scraps of WEEE are composed of various metals and alloys as well as refractory oxides and plastic components. Precious and valuable metals from the scraps of WEEE can be recovered by gas-phase-volatilization, hydrometallurgical, or pyrometallurgical processes. However, the gas-phase-volatilization and hydrometallurgical processes have been suggested but not yet commercialized. At the present time, most of the commercial plants for recovering precious and valuable metals from the scraps of WEEE adopt pyrometallurgical processes. Therefore, in this paper, the technical and environmental aspects on the important pyrometallurgical processes through literature survey are reviewed, and the scale-up result of a new pyrometallurgical process for recovering the precious and valuable metals contained in the scraps of WEEE using waste copper slag is presented.

• Resources Recycling
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• v.24 no.3
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• pp.11-15
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• 2015

In order to develop a technology for the recovery of pure tin from the Sn containing industrial wastes (SIWs), a process consisted of high temperature reduction and electrorefining was investigated. The tin which exists as oxide in SIWs was successfully reduced by two consecutive high temperature treatments and 92.7% of the tin was recovered. The purity of the tin thus obtained was increased to 99.87% by electrorefining. By applying the results obtained in this work, a commercial process can be developed to produce pure tin metals from domestic spent resources, which can reduce the amount of tin imported from abroad.

• Resources Recycling
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• v.24 no.2
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• pp.23-28
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• 2015

Most of the domestic need for tin rely on imports. In this work, a pyrometallurgical process was investigated to recover pure tin from the tin oxides in tin bath which results from the production of flat glass and LCD panel. From the results on the effect of reaction temperature, the highest recovery percentage of tin was obtained at $1350^{\circ}C$. The recovery percentage of tin was improved to 88% by employing the first and second smelting step. Electrorefining of the crude tin thus obtained led to pure tin with purity higher than 99.9%.