• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.33-33
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• 2010

플라즈마를 이용한 건식식각공정은 현 반도체, 디스플레이, 태양광 산업에 널리 적용되는 공정으로며 일부공정은 플라즈마 없이는 식각공정이 불가능할 정도로 매우 중요한 공정이다. 건식식각공정은 크게 플라즈마의 이온에 의한 물리적인 프로세스와 라디칼에 의한 화학적인 프로세스로 나눌 수 있으며, 최근 들어, 화학적인 식각프로세스가 매우 중요함이 알려지게 되었다. 본 발표에서는 화학적 식각프로세스에서 가장 중요한 역할을 하는 플라즈마 라디칼을 챔버가 공정에 제한받지 않고 널리 쓰일 수 있는 데이터 베이스로 생산하는 아이디어 전략을 소개하는 시간을 통해 건식식각물성데이터 센터의 소개와 참조표준 데이터베이스의 중요성을 알리고자 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.321-321
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• 2014

GaN는 LED, 태양전지, 그리고 전자소자 등에 쓰이는 물질로, 관련 연구가 활발히 진행되고 있으며, 이와 더불어 top-down방식을 활용한 소자제작 방법 또한 발달되고 있다. 하지만, top-down공정 시 발생 되는 건식 식각에 의한 소자의 손상이 발생되고, 이로 인하여 누설전류가 발생하는 등 여러 가지 문제점이 발생하고 있다. 특히, top-down에서 널리 사용하는 건식식각을 통한 GaN 식각의 경우, nonpolar 면이 아닌, semipolar 면이 드러나게 되며, 이 면은 건식 식각시 발생하는 손상을 포함하고 있다. 본 연구에서는 이러한 문제를 해결하기 위해서, 약 $2{\mu}m$ 크기의 diameter를 갖는 micro-sized column LED를 제작하고, 건식 식각 이후, KOH surface treatment를 통해 손상된 면을 제거함과 동시에 nonpolar면을 드러내는 실험을 실시하였으며, 더불어 column의 diameter를 줄이는 방법을 논하고자 한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.53-53
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• 2003

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2003.11a
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• pp.614-620
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• 2003

KAERI has developed DUPIC nuclear fuel with the refabrication of spent PWR fuel discharged from domestic nuclear power plant by a dry process at M6 hot-cell in IMEF To verify the performance of DUPIC nuclear fuel, irradiation test at the operating conditions of commercial power plant is essential. Since the HANARO research reactor of KAERI does not have fuel test loop(FTL) for irradiating nuclear fuel under high temperature and high pressure conditions, DUPIC fuel cannot be irradiated in the FTL of HANARO. In the 13-th PRM among Korea, Canada, USA and IAEA, AECL proposed that KAERI fabricated DUPIC fuel can be irradiated in the FTL of the NRU research reactor without charge of neutrons. The transportation quantity of DUPIC fuel to Canada is 10 elements(about 6kg). This transportation package is classified as the 7-th class according to "recommendation on the transport of dangerous goods" made by the United Nations. In case of air shipment, until now, there is no proper air transportation cask for DUPIC fuel. In case of sea transportation is possible but requires very high cost.high cost.

• Resources Recycling
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• v.25 no.5
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• pp.14-27
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• 2016

Theoretical reviews of integrated gasification combined cycle one of the clean coal technologies and trends in the study and technology development for high temperature desulfurization sorbents were investigated. Reactivity, durability and abrasion resistance is an important key for development of high temperature desulfurization sorbents, the kind of things include calcium, zinc, manganese, iron and copper-based sorbents. Current status of high temperature desulfurization sorbents, manufacturing techniques of zinc-based sorbent in advanced countries has commercialized. In case of Korea, various research studies are underway to commercialize the Zn and non Zn-based high temperature desulfurization sorbents to cheaper and superior capability using various supports.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.106.2-106.2
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• 2013

본 논문은 반도체 및 평판 디스플레이 생산공정에서 가동되고 있는 건식 진공펌프들의 정밀 상태진단 및 예지 보수를 위한 pump monitoring system (PMS)의 제품화에 필요한 프로그램의 개발 내용을 소개한다. 본 연구에서 소개하는 건식 진공펌프들의 정밀 상태진단 및 예지보수기법은 PCT 특허 2 건으로 이미 등록된 내용이며, 본 논문은 이들 기법의 실제 구현에서 직면하는 기술적 문제점과 극복 방안을 제시한다. 본 논문에서는 현재 반도체 공정에 사용되고 있는 건식 진공펌프들로부터 측정하는 다중 상태변수들의 조사 결과를 소개한다. 이들 상태변수 측정치들이 갖는 개략적 특성을 통계적 분포함수로 분석한 결과를 우선 보인다. 특히 펌프 구동모터들의 소비 전류신호는 두 평균값에 대한 분포 즉 두 종의 분포함수를, 그리고 온도, purge gas 유량, 배기구 압력 등은 정상적 평균값에 대한 한나의 분포를 보였다. 따라서 구동모터들의 소비전류의 분포 즉 두 상하 수준('low and high' current level)에 따라 batch data를 구분하는 방법의 개발이 필요하였다. 본 연구에서는 step 함수형 eigenvector를 적용하여 소비전류 신호의 상하수준 천이 영역과 방향을 동시에 인식할 수 있는 기법을 개발 적용하였으며, 3300회의 배출가스 부하에 변화에 대한 천이 영역과 방향을 인식에 하나의 실패도 보이지 않음을 확인하였다. 기존의 측정 상태변수에는 회전기계류의 정밀 상태진단 및 예지보수에 핵심적인 기계진동 측정용 진동센서를 포함하고 있지 않은 기술적 문제점이 발견되었다. 기존 진동센서들의 높은 가격 뿐 아니라 진동센서의 출력신호를 저/중/고역 주파수 대역의 실효치로 환산하는 기술적 한계 때문에 진공펌프 상태진단에 아직 사용하고 있지 않고 있다. 본 연구에서는 진동선서 비용의 저감화 방안뿐 아니라 로터 회전 대역(250Hz 이하 저주파 영역), 베어링 진동 대역(250 Hz~2.5 kHz의 중간 주파수 영역), 그리고 기어 진동 대역(2.5 kHz~10 kHz 주파수 영역)별 실효치를 실 시간 측정할 수 있는 진동측정 모듈의 제품화 모델을 개발하였다. 개발 제품의 성능 뿐 아니라 현장 시험결과를 소개한다. 마지막으로 본 연구팀이 개발한 PCT 특허 2 건에 포함된 건식 진공펌프들의 정밀 상태진단 및 예지보수기법에 대한 현장 시험결과를 간략히 소개한다.

• Journal of the Korean Society of Food Science and Nutrition
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• v.37 no.7
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• pp.900-907
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• 2008

The physicochemical properties of black rice flours produced from dry and wet milling were carried out to investigate their applications in food processing industry. The dry milled black rice flours showed lower fat, protein, ash, and anthocyanin contents than those of wet milled black rice flours with no effect due to number of millings. Average particle sizes ($379{\sim}288\;{\mu}m$) of dry milled flours were bigger than those ($336{\sim}253\;{\mu}m$) of wet milled flours. Particles with 60 mesh or more increased with increasing milling times. Wet milled flours had higher damaged starch, water solubility index (WSI), and water absorption index (WAI) compared to dry milled flours. Pasting properties measured by rapid visco analyzer (RVA) resulted in higher pasting temperatures in dry milled flours ($62.5{\sim}69.4^{\circ}C$) than wet milled flours ($46.1{\sim}46.4^{\circ}C$). As the number of milling times increased, pasting temperature of wet milled flours were not effected. Dry and wet milling resulted in reduced trough, final viscosity, and consistency with increasing milling times.

• Journal of the Korea Concrete Institute
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• v.17 no.1 s.85
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• pp.69-76
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• 2005

In this study, the high qualify recycled fine aggregate manufacturing system by the drying specific gravity separation method was evaluated. For the evaluation of the performance of the recycled aggregate, the engineering properties and durability of recycled aggregate has been tested. From the test results, the quality of recycled fing aggregates was improved by high quality recycled fine aggregate manufacturing system and satisfied with the quality standards of KS and JASS 5. Also, compressive and tensile strengths of recycled concrete show no critical difference caused by recycled fine aggregate replacement ratio. However, durability such as carbonation depth chloride ion penetration depth and drying shrinkage shows more deterioration than the concrete without recycled fine aggregate

• Korean Journal of Food Science and Technology
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• v.50 no.5
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• pp.492-498
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• 2018

The current study investigated the effect of rice cultivars (Samkwang and Seolgaeng) and milling methods on various characteristics of rice bread. In dry milling, all component characteristics, except the water solubility index, were higher. In terms of the morphology of starch, Samkwang exhibited an angular shape, while Seolgaeng exhibited a round shape. Wet milled flour yielded fine polygonal starch compared to dry milled flour. In regard to the quality characteristics of bread, both wet milled Samkwang and dry milled Seolgaeng showed closely similar specific volumes of 2.90 mL/g and 2.86 mL/g, respectively. Hardness was in the range of 555.50 - 597.29 g for Seolgaeng and 776.78 - 823.06 g for Samkwang. Thus, although the flour characteristics were different, dry milled Seolgaeng, the rice flour of which is economical to produce and has baking characteristics similar to that of wheat flour, appears to be preferable.

• Journal of the Korea Concrete Institute
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• v.18 no.3 s.93
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• pp.415-423
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• 2006

As the shortage of natural & good quality aggregate for concrete, it is needed development of alternative aggregate. At the present time, the crushed sand is widely used among the alternation aggregate, and the usage of crushed sand will be increased more and more. Generally, crushed sud is produced with wet process in domestic, but some manufacturing companies which are handicapped with local restrict are produced by dry process. In this study, analyzing the facilities of dry crushed sand, the quality properties of dry crushed sand was done by Korean Industrial Standards. Based on the quality results of dry crushed sand, the experiment of concrete with the dry crushed sand which is substitute for sea sand was done. As the results of basic qualities, the amount of 0.08 mm sieve passing ratio was over KS criteria, and the fineness modulus was higher than sea sand, and the other physical properties of dry crushed sand was similar to sea sand. The results of concrete experiment, according to the substitutive ratio of dry crushed sand is increased, the slump and air content of concrete was decreased by increase of fine particles of dry crushed sand, and the unit weight content, compressive & tensile strength of concrete were increased on the contrary. The physical properties of concrete used dry crushed sand were showed same tendency without relation to W/B. Consequently, if the fine particle contents of dry crushed sand was lower, it is judged that dry crushed sand is no problem to use for concrete aggregate and the amount of usage will be increased.