• Title/Summary/Keyword: 각도의존특성

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Improvement of Depth Profiling Analysis in $Hf_xO_y/Al_xO_y/Hf_xO_y$ structure with Sub 10 nm by Using Low Energy SIMS

  • Lee, Jong-Pil;Park, Sang-Won;Choe, Geun-Yeong;Park, Yun-Baek;Kim, Ho-Jeong;Kim, Chang-Yeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.162-162
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    • 2012
  • Sub 100 nm의 Complementary Metal-Oxide-Semiconductor (CMOS) 소자를 구동하기 위해서는 2.0 nm 이하의 $SiO_2$ oxide에 해당하는 전기적 특성이 요구된다. 그러나 2.0 nm 이하의 $SiO_2$에서는 누설 전류가 너무 크기 때문에 이를 대체하기 위해서 유전 상수 (dielectric permittivity)가 높은 $HfO_2$ (${\varepsilon}=25$), $Al_2O_3$, $HfO_2/Al_2O_3$ laminate 등의 high-k dielectric 물질들이 연구되고 있다[1]. High-k dielectric 물질의 전기적 특성은 박막 조성, 두께 및 전극과의 계면에 생성되는 계면 층이나 불순물(Impurity) 거동에 크게 의존하므로 High-k dielectric/전극(Metal or Si) 구조에서 조성 및 불순물의 거동에 대한 정확한 평가가 주요 쟁점으로 부각되고 있다. 이를 평가하기 위해 일반적으로 $Ar^+$ ion에 의한 depth profiling 분석이 진행되나 Oxygen 원자의 선택적 식각에 기인된 분석 깊이 분해능(Depth Resolution) 왜곡으로 계면 층의 형성이나 불순물의 거동을 정확하게 평가할 수 없다. 이러한 예로는 $Ta_2O_5$$SrBi_2Ta_2O_9$와 같은 다 성분 계 산화막에 $Ar^+$ ion 주사 시 발생하는 선택적인 식각(Preferential Sputtering) 때문에 박막의 실제 조성 및 거동을 평가하는 것은 어렵다고 보고된 바 있다[2,3]. 본 연구에서는 $90{\AA}$인 적층 $Hf_xO_y/Al_xO_y/Hf_xO_y$ 구조에서의 불순물 거동 분석 능력 확보 상 주요 인자인 깊이 분해능 개선을 Secondary Ion Mass Spectroscopy(SIMS)의 primary ion 종, impact energy 및 주사 각도를 변화시켜 ~1 nm 수준까지 구현하였다. 이러한 분석 깊이 분해능의 개선은 Low Impact Energy, 입사 이온의 glancing angle 및 Cluster ion 적용에 의존하며 이들 요인의 효과에 대해 비교/고찰하고자 한다.

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Beam Pattern Analysis of LED Reflector Design and Simplification of the Functional Design (조명용 LED 반사컵의 설계변수 의존도 분석 및 기능성 설계의 단순화 기법)

  • Yim, Hae-Dong;Lee, Dong-Jin;Kim, Yang Gyeom;O, Beom-Hoan
    • Korean Journal of Optics and Photonics
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    • v.23 no.5
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    • pp.222-226
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    • 2012
  • The design methods of the reflecting cup employed in an LED lamp are presented. The beam patterns of an LED lamp can be adjusted by functional segmentation of the reflector height. Thus, the reflecting angle of slope was designed according to the height. The analysis of the designed reflecting cup shows that precise adjustable beam patterns can be achieved.

Physical Characteristics Comparison of Virtual Wedge Device with Physical Wedge (가상쐐기와 기존쐐기의 물리적 특성 비교)

  • Choi Dong-Rak;Shin Kyung Hwan;Lee Kyu Chan;Kim Dae Yong;Ahn Yong Chan;Lim Do Hoon;Kim Moon Kyun;Huh Seung Jae
    • Radiation Oncology Journal
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    • v.17 no.1
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    • pp.78-83
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    • 1999
  • Purpose : We have compared the characteristics of Siemens virtual wedge device with physical wedges for clinical application. Materials and Methods : We investigated the characteristics of virtual and physical wedges for various wedge angles (15, 30, 45, and 60$^{\circ}$) using 6- and 15MV photon beams. Wedge factors were measured in water using an ion chamber for various field sizes and depths. In case of virtual wedge device, as upper jaw moves during irradiation, wedge angles were estimated by accumulated doses. These measurements were performed at off-axis points perpendicular to the beam central axis in water for a 15cm${\times}$20cm radiation field size at the depth of loom. Surface doses without and with virtual or physical wedges were measured using a parallel plate ion chamber at surface. Field size was 15cm H20cm and a polystyrene phantom was used. Results : For various field sizes, virtual and physical wedge factors were changed by maximum 2.1% and 3.9%) , respectively. For various depths, virtual and physical wedge factors were changed by maximum 1.9% and 2.9%, respectively. No major difference was found between the virtual and physical wedge angles and the difference was within 0.5$^{\circ}$ . Suface dose with physical wedge was reduced by maximum 20% (x-ray beam :6 MV, wedge angle:45$^{\circ}$, 550: 80 cm) relative to one with virtual wedge or without wedge. Conclusions : Comparison of the characteristics of Siemens virtual wedge device with physical wedges was performed. Depth dependence of virtual wedge factor was smaller than that of physical wedge factor. Virtual and physical wedge factors were nearly independent of field sizes. The accuracy of virtual and physical wedge angles was excellent. Surface dose was found to be reduced using physical wedge.

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Preliminary Study on Applicability of Accumulate Personal Neutron Dosimeter for Cosmic-ray Exposure of Aviators (운항승무원의 우주방사선 피폭 평가에 있어 누적형 개인 중성자 선량계의 적용가능성 예비 연구)

  • Kim, Hyeong-Jin;Chang, Byung-Uck;Byun, Jong-In;Song, Myeong Han;Kim, Jung-Ho
    • Journal of Radiation Protection and Research
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    • v.38 no.1
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    • pp.44-51
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    • 2013
  • ICRP recommended that cosmic ray exposure to the pilot and cabin crew would be considered as an occupational exposure due to their relatively high exposure. Since 2012 with the Act No. 10908 (Natural radiation management), the guideline of cosmic ray exposure to the pilot was established in Korea. The applicability of the solid-state nuclear track detector for personal dose assessment of pilot and cabin crew was evaluated. Dose linearity and angle dependence of dosimeters to the neutron were evaluated by $^{252}Cf$ neutron emitting source. The track density has a good agreement with the dose ($r^2$=0.99) and highly dependent on the degree of an angular of the dosimeter to the neutron source. In addition, the dosimeters (SSNTD) were exposed to cosmic ray in an aircraft during its cruising for more than two months in collaboration with Airline Pilots Association of Korea. Although the correlation between the track density from aircraft cruising altitude and expected neutron dose is low, however RSNS dosimeter could be used for personal neutron dosimeter. For application of RSNS as a personal dosimeter for pilot and cabin crew, additional studies are required.

Structure Analysis of Solid Surfaces by Impact Collision Ion Scattering Spectroscopy (1): Basic Principles (직충돌 이온산란 분광법(ICISS)에 의한 고체 표면구조의 해석(1): 기본 원리)

  • Hwang, Yeon
    • Korean Journal of Crystallography
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    • v.17 no.2
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    • pp.60-65
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    • 2006
  • 표면 및 계면층의 결정구조, 결함구조, 불순물 편석, 표면의 전자 구조, 원자 진동 등과 같은 산화물의 표면물성은 촉매, 센서, 소결, 마찰, 부식 등과 같은 분야에서 그 특성을 좌우한다. 고체 표면의 결정구조 해석 수단으로 저에너지 이온산란 분광법이 유용한 도구로 알려져 있는데, 이 방법의 뛰어난 표면민감성은 표면에서의 효과적인 이온 중성화 과정에 기인한다. $He^+$, $Ne^+$, $Ar^+$ 등과 같은 이온은 Auger 중성화 과정에 의하여 쉽게 중성원자화 되고, 중성화 확율의 타겟에 대한 의존성이 낮기 때문에 이온빔으로서 종종 사용된다. 산란각도를 180$^{\circ}$로 고정하여 산란이온 검출기를 설치한 직충돌 이온산란 분광법의 경우는 산란된 이온의 궤적이 입사궤도와 거의 동일하기 때문에 산란궤적의 계산이 간단해지고, 수 층 깊이의 원자구조의 해석이 가능해진다. 본 고에서는 고체 표면의 원자구조를 실공간에서 해석할 수 있는 직충돌 이온산란 분광법에 대하여 측정의 기본원리, 측정장치, 간단한 분석 예 등에 관하여 기술하고자 하며, 다음 편에서는 복잡한 표면구조를 가지는 반도체 표면에서 직충돌 이온산란분광법의 이용하여 해석한 예를 중심으로 기술하고자 한다.

개방경제하(開放經濟下)의 "거시적 증권정책(巨視的 證券政策)"

  • Kim, Yu-Man;Lee, Il-Gyun
    • The Korean Journal of Financial Management
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    • v.10 no.2
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    • pp.1-51
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    • 1993
  • 본 논문의 목적은 첫째, 자본자유화로 인해 통화공급 구조가 이미 균형에서 이탈하여 심각한 수준의 불균형 상해에 있다는 점을 실증적으로 입증하고자 한다. 둘째, 자본유입에 따른 정책조정 비용을 감안한 통화정책 모형을 통해 주장에 대한 이론적 근거를 제시하고, 정책 조절에 수반되는 손실비용(損失費用)과 Mundell의 $\ulcorner$할당 문제(割當 問題)$\lrcorner$를 다시 조명해 보고자 한다. 세째, 자본유입에 따르는 문제점들을 해결할 수 있는 정책방안들을 Modigliani ar Miller의 명제(命題)에 입각한 새로운 각도에서 합리적 인 증시정책을 모색해 보고자 한다. 분석의 이론적 틀로서는 자본유입에 따라 수반되는 불확실성하의 정책조절 비용을 감안한 손실비용 최소화(loss cost minimization)를 통해, 통화 당국자는 총통화량을 정책적으로 내정된 목표값에 수렴시킨다고 가정하였다. 다른 한편, 자본유입에 따르는 문제점들을 통화시장에만 제한시키는 부분적(部分的) 균형분석(均衡分析) 대신, 이를 증권시장으로 직접 연계시켜 두 시장으로 확장된 틀을 활용하였다. 본 논문의 연구방법은 다음 두가지 측면의 접근식을 따랐다. 첫째, 자본자유화정책의 특성을 살펴보기 위해, 자본자유화 시점을 기준으로 삼아 과거 자본통제 시대의 $\ulcorner$사후적(事後的)인 중화정책(中和政策)$\lrcorner$에 의존하는 $\ulcorner$소극적(消極的)인 증권정책(證券政策)$\lrcorner$과 자본자유화시대의 $\ulcorner$사전적(事前的)인 상살정책(相殺政策)$\lrcorner$에 의한 $\ulcorner$거시적(巨視的)인 증권정책(證券政策)$\lrcorner$을 통해 고찰하는 비교분석론에 입각한 접근식을 택했다. 둘째, 외국자본의 유입동기(流入動機)를 문제해결의 시발점으로 삼아 이를 새로운 개방정책과 직결시켜 문제해결의 실마리를 풀어 보려는 선험적(先驗的) 접근식(接近式)을 택했다.

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Study of Hypervelocity Penetration Characteristics of Segmented Tungsten Penetrator (분절형 텅스텐 관통자의 초고속 관통특성에 관한 연구)

  • Jo, Jong Hyun;Lee, Young Shin;Kim, Jae Hoon;Bae, Yong Woon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.8
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    • pp.953-960
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    • 2013
  • This study aimed to investigate the penetration characteristics of a segmented penetrator with normal and inclined angles. The length to diameter ratio (L/D) of the segmented penetrator was varied as 1.0, 0.5, and 0.25. Moreover, impact velocities of 1.5, 2.0, and 2.5 km/s and inclination angles of $15^{\circ}$, $30^{\circ}$, and $45^{\circ}$ were successively applied. The AUTODYN-3D code was used to simulate the penetration performance of the segmented penetrator. The results show that the penetration performance of the segmented penetrator with steel plates was obviously higher than that of the corresponding continuous penetrator with steel plates. The outstanding penetration performance of the segmented penetrator can be observed when the impact velocity was 2.0 km/s and L/D = 1. In this case, the penetration performance of the segmented penetrator was 7% higher than that of the corresponding continuous penetrator. This trend was attributable to the interaction between the reactive plate and the projectile. The extent of the interaction relies on the relative velocities of the plate and projectiles, inclination angle, and number of segmented penetrators. It was proven that the penetration performance of the segmented penetrator can be improved by increasing the impact velocity, number of segmented penetrators between segments, and penetrator length.

Regional Distribution of Isotropy Magnetic Property of Dual-type Giant Magnetoresistance-Spin Valve Multilayer (이중구조 거대자기저항-스핀밸브 박막의 자기등방성 영역분포에 관한 연구)

  • Khajidmaa, Purevdorj;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.23 no.6
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    • pp.193-199
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    • 2013
  • The regional distribution of magnetic isotropy depending on the post annealing condition for the dual-type structure GMR-SV (giant magnetoresistance-spin valve) of NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe multilayer was investigated. The rotation of in-plane ferromagnetic layer induced by controlment of the post annealing temperature inside of the vacuum chamber. The magnetoresistive curves of a dual-type IrMn based GMR-SV depending on the direction of the magnetization easy axis of the free layer and the pinned layer are measured by between $0^{\circ}$ and $360^{\circ}$ angles for the applied fields. The optimum annealing temperature having a steady and isotropy magnetic sensitivity of 1.52 %/Oe was $107^{\circ}C$ in the rotational section of $0{\sim}90^{\circ}$. By investigating the switching process of magnetization for an arbitrary measuring direction, the in-plane orthogonal magnetization for the dual-type GMR-SV multilayer can be used by a high sensitive biosensor for detection of magnetized micro-beads.

Exchange Bias Study by FMR Measurment (강자성 공명에 의한 Exchange Bias 연구)

  • Yoo, Yong-Goo;Park, Nam-Seok;Min, Seong-Gi;Yu, Seong-Cho
    • Journal of the Korean Magnetics Society
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    • v.15 no.5
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    • pp.265-269
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    • 2005
  • Exchange bias effect of a various layered thin films were studied by FMR measurment. In plane angular dependence of a resonance field distribution which measured by FMR was analysed as a combined effect of an unidirectional anisotropy and an uniaxial anisotropy. Exchange biased NiFe/IrMn, IrMn/NiFe/IrMn, and NiFe/IrMn/CoFe thin films showed larger unidirectional anisotropy field and uniaxial anisotropy field with compared to that of an unbiased NiFe single thin film. In case of NiFe/Cu/IrMn, the film with thick Cu layer exhibited a similar trend to the unbiased NiFe thin film. NiFe/IrMn/CoFe thin film showed two resonance field distribution due to different ferromagnetic layers. In additon to the resonance field, the line width was also analysed with related to exchange bias effect.

ESR Study on Paramagnetic Defects of the $gamma$-irradiated Ammonium Sulfate Single Crystal (${\gamma}$-선에 조사된 황산 암모늄 단결정의 상자성 결함에 관한 전자스핀공명 연구)

  • Yo Chul Hyun;Kim Eun Ok
    • Journal of the Korean Chemical Society
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    • v.29 no.2
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    • pp.80-87
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    • 1985
  • Radiation damage in a single crystal of ammonium sulfate caused by ${\gamma}$-irradiation at room temperature has given rise to several paramagnetic centers. Electron spin resonance (ESR) spectra of crystal are obtained with the X-band EPR spectrometer at room temperature. An intense and isotropic peak of Gaussian shape at g = 2.0036 is assigned to $SO_3^-$, which shows power saturation effects. Angular dependence of spectra is studied for the rotations about three mutually perpendicular axes a, b and c. The g-values are obtained from the relative distances between isotropic peak of $SO_3^-$ and anisotropic peak of the species. Principal $g^-$values and direction cosines were calculated by diagonalizing the 3${\times}$3 matrix whose elements are the $g^-$values for each species. From the analysis of characteristic principal $g^-$values and direction cosines for ammonium sulfate single crystal, anisotropic peaks corresponding to $SO_4^-,\;SO_2^-$ and defect structure corresponding to electron excess type are identified.

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