• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.423-423
• /
• 2012

ZnO, SnO2, In2O3:Sn와 같은 투명하고 전도성이 있는 박막은 panel display, 전자발광소자, 박막트랜지스터, 태양전지 등의 전극물질로서 폭넓게 사용되고 있다. 이러한 전극 물질을 이용하는 광전자소자의 성능을 개선하기 위해서는 가시광선영역에서 광투과율이 높고, 전기전도도가 좋아야 한다. 최근 ZnO, SnO2, In2O3, MgO, Ga2O3 등으로 이루어진 3원 또는 다원화합물로 제조된 산화물 박막이 새로운 투명한 전도성 박막으로 많은 관심을 끌고 있다. 본 연구에서는 Ga2O3 박막을 radio-frequency magnetron sputtering 방법을 이용하여 증착하였다. 기존에 사용되던 ceramic target을 개선하여 powder target을 사용하였다. 반응가스는 순수하게 Ar 가스만 사용하였고, Sapphire(0001) 기판을 사용하였다. 초기에는 flat한 layered 구조로 증착이 이루어졌으나, 증착시간이 20분이 지나면서부터는 밤송이 모양을 가지는 나노구조체가 생성되기 시작하였고, 이후 나노 밤송이의 밀도가 점차 증가하였다. Ga2O3 나노 밤송이의 특성에 대하여 발표할 예정이다.

• Journal of the Korean Institute of Gas
• /
• v.16 no.2
• /
• pp.1-8
• /
• 2012

According to the last 5 year statistics of KGS, there occurred 22 under ground gas pipe accidents per year in Korea. And about 5 accidents per year were caused from the third party digging. IT recognition technique could reduce such underground gas accidents. Among IT recognition technique, RFID is most poplar. In the air, RFID were applied to various fields including the distribution industry, but underground condition, the research and application cases of RFID were little This research was undertaken to see the applicability of RFID to underground gas pipe safety. By use of 900 MHz RFID reader and commercial metal tag, the stable recognition distance was measured in the similar underground condition of LNG pipe. Stable recognition depth of RFID tag were measured to be 50, 45, 25 cm in the medium of soil, 5 cm-thick-concrete+soil, and water respectively. The measured distances were considered to be the meaningful distance to prevent the gas pipe accidents Also the efficient ways to input the required gas pipe data to the 24 byte metal tag were proposed. Application of RFID to underground LNG supply system will not only reduce the gas accidents due to third party digging but also improve the gas line maintenance efficiency.

• Journal of the Korean Vacuum Society
• /
• v.19 no.4
• /
• pp.287-292
• /
• 2010

We have investigated the effects of oxygen flow ratios on the structural, morphological, and optical properties of AlN thin films grown by using radio-frequency reactive magnetron sputtering. The AlN thin films were deposited at $300^{\circ}C$ of substrate temperature, and the reactive gas were supplied with both nitrogen and oxygen. The oxygen flow ratio was varied by controlling the amount of oxygen with respect to the total mixed gases, 0%, 10%, 15%, 20%, 25%, and 30%. The structural, morphological, and optical properties of the deposited AlN thin films were examined by using X-ray diffractometer, scanning electron microscopy, and ultraviolet-visible spectrophotometer. The AlN thin film grown at 10% of oxygen flow ratio indicated an average transmittance of 91.3% in the wavelength range of 350~1,100 nm and an optical band gap of 4.30 eV. The experimental results suggest that AlN thin films can be deposited optionally by varying the oxygen flow ratio.

• Applied Chemistry for Engineering
• /
• v.16 no.2
• /
• pp.282-287
• /
• 2005

Palladium membranes, which are permselective to hydrogen separation, were used for the hydrogen purification and in membrane reactors for improving conversions by shifting the reaction equilibrium. Palladium/ceramic composite membranes were prepared by electroless plating technique and then etched in titanium chloride ($TiCl_4$) as a post treatment to enhance the membrane's durability. These membranes were used for membrane reactors in water gas shift (WGS) reaction. CO conversions for the membrane reactor were obtained according to experimental parameters and compared to the traditional reactor without a palladium/ceramic membrane. As a result, CO conversion using palladium membrane reactor at an appropriate condition was over 20~25% greater than that without the membrane reactor. The stability in the long-term test of up to 120 h for WGS reaction with the membrane reactor was good without the degredation of CO conversion.

• Membrane Journal
• /
• v.24 no.3
• /
• pp.213-222
• /
• 2014

In this study, 2-stage recirculation membrane process was developed for purification of high purity bio-methane for the vehicle fuel application. Pure gas permeation and mixture gas permeation test were done as a function of methane content and pressure in the feed using polysulfone membrane modules. 2-stage membrane plant was designed, constructed in a food waste treatment cite. Dehumidification, dry desulfurization, and desiloxane plants are installed for the removal of $H_2O$, $H_2S$ and siloxane in the biogas. Permeation test were done with the pre-treated methane mixture in terms of methane purity and recovery by adjusting the ratio of membrane area (1:1, 1:3, 2:2) in the first and second membrane modules in the plant. When membrane area of 2 stage increased to $3m^2$ from $1m^2$ at 1-stage membrane area of $1m^2$, the feed rate and $CH_4$ recovery at 95% methane purity were increased from 47.1% to 92.5% respectively. When the membrane area increased two-fold (1:1 to 2:2), $CH_4$ recovery increased from 47.1% to 88.3%. When the feed flow rate was increased, in 1:3 ratio, final purity of the methane is reduced, the methane recovery is increased. When operating pressure was increased, the feed rate was increased and recovery was slightly decreased. From this result, membrane area, feed pressure and feed rate could be the important factor to the performance of the membrane process.

• Membrane Journal
• /
• v.21 no.4
• /
• pp.367-376
• /
• 2011

Huge amount of $CH_4$ mixtures has been emitted from landfills and organic wastes via anaerobic digestion. The recovery of high purity $CH_4$ from these gases has two merits: reduction of green house gases and production of renewable fuels. Membrane technology based on polymeric materials can be used in this application. In this study, asymmetric gas separation hollow fiber membranes were fabricated to develop the membrane-based bio-gas purification process. Polyethersulfone (PES) was chosen as a polymer materials because of high $CO_2$ permeability of 3.4 barrer and $CO_2/CH_4$ selectivity of 50[1]. Acetone was used as a non-solvent additive because of its unique swelling power for PES and highly volatile character. The prepared PES hollow fiber showed excellent separation properties: 36 GPU of $CO_2$ permeance and 46 of $CO_2/CH_4$ selectivity at optimized preparation conditions: 9wt% acetone content, 10cm air-gap and 4wt% PDMS coating processes. With the PES hollow fiber membranes developed, mixed $CO_2/CH_4$ test was done by changing various operating conditions such as pressures and feed compositions to meet the highest recovery of CH4 with 95% purity. High $CH_4$ recovery of 58 wt% was observed at 10 atm feed pressure for the 50 vol% of $CO_2$ in $CO_2/CH_4$ mixture.

• Membrane Journal
• /
• v.20 no.2
• /
• pp.106-112
• /
• 2010

This study deals with the surface fluorination of poly(phenylene oxide) (PPO) with the direct contact of 100 ppm fluorine gas. To characterize the surface fluorinated membranes, the contac angle measurement, X-ray photoelectron microscopy analysis and the gas permeation experiments were performed. As the fluorination time increases, the hydrophobicity of membrane surfaces is increased by the surface characterization. In general, as expected, the overall gas permeability was reduced. Typically, the permeability reduction of 33% for nitrogen, 23% for oxygen and 3% for carbon dioxide were observed when the membranes were exposed in 100 ppm environment for 60 min., meanwhile the selectivity was increased from 3.92 to 4.47 for $O_2/N_2$ and 18.09 to 25.4 for $O_2/N_2$, respectively.

• Membrane Journal
• /
• v.23 no.2
• /
• pp.119-128
• /
• 2013

In this research, PEI/PEBAX composite hollow fiber membrane was used for the removal of water vapor from gases. PEI (Polyetherimide) substrate membrane was spinned by dry-wet phase inversion method and coated with PEBAX (Polyether block amides) 3533 and PEBAX1657. Fabricated fibers typically had an asymmetric structure of a dense top layer supported by a sponge-like substructure through scanning electron microscopy (SEM). $H_2O/N_2$ mixture gas was used to compare the performance of separation according to temperature, pressure and water activity. The results of PEBAX3533 and PEBAX1657 composite membranes respectively showed $H_2O/N_2$ selectivity of 61.7~118.5 and 85.3~175.4 according to operating conditions. PEBAX3533 composite hollow fiber membranes module showed the water vapor removal of 90%.

• Transactions of the Korean hydrogen and new energy society
• /
• v.20 no.5
• /
• pp.424-431
• /
• 2009

Treatment for water repellency on the carbon supports of GDL which composed a part of MEA has been suggested as a solution to prevent flooding. PTFE is a fluoropolymer that has hydrophobic property and a PTFE emulsion was selected as waterproof agent in this investigation. Carbon paper was coated by PTFE emulsion with different particle size of 5~500 nm and 3~$5\;{\mu}m$ as various concentration. PTFE coated carbon paper has difference in weight variation changed proportionally at PTFE concentration and coating times. Then gas permeability of the coated carbon paper with emulsion of 3~$5\;{\mu}m$ PTFE was changed vastly. Characteristics of carbon paper coated with different PTFE emulsion were analyzed by FE-SEM, FT-IR spcetroscopy and were evaluated by weight variations, gas permeability and water contact angle.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.84-84
• /
• 2011

RF magnetron sputtering을 이용하여 산소 유량에 따라 ZnO 박막을 유리기판 위에 제작하고 구조적, 광학적, 전기적 특성을 조사하였다. 박막 증착 조건의 초기 압력은 $1.0{\times}10^{-6}Torr$, RF 파워는 100W, 증착온도는 상온으로 고정하였으며 기판은 Corning 1737 유리 기판을 사용하였다. 공정 변수로 Ar:$O_2$가스 비율을 50:50 sccm, 75:25 sccm, 100:0 sccm으로 변화시켰다. 유리기판 위에 증착된 모든 ZnO 박막에서 (002) 면의 우선배향성이 관찰되었고 85% 이상의 투과율을 나타내었다. 산소유량이 적을수록 ZnO 박막의 결정성은 향상되었고, 광학적 밴드갭은 증가하였다. Hall 측정 결과 산소의 유량이 포함되어 있는 박막에서는 모두 완전한 산화물에 가까운 화학양론적 조성으로 면 저항이 $10^6{\Omega}/{\square}$ 이상인 부도체 특성을 보였으며, 산소가 포함되지 않은 샘플에서는 n타입의 반도체 특성이 확인되었다. 산소가 포함되지 않은 Ar 유량이 100sccm일 때 전기비저항 $3.56{\times}10^{+1}1{\Omega}cm$, 전하의 농도 $2.04{\times}10^{18}cm^{-3}$, 이동도 $8.59cm^2V^{-1}s^{-1}$로 반도체 활성층으로 적합한 전기적 특성을 얻었다. ZnO 박막의 경우 산소가 포함될 경우 결정성이 저하되고, 절연특성을 갖는 것을 확인할 수 있었다.