• Title/Summary/Keyword: 가스채널

Search Result 144, Processing Time 0.029 seconds

RF 마그네트론 스퍼터링법으로 제작된 IGZO 박막의RF Power에 따른 특성

  • ;Hwang, Chang-Su;Kim, Hong-Bae
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.364-364
    • /
    • 2012
  • 평판 디스플레이 분야에 투명 비정질 산화물 반도체는 박막 트렌지스터(Thin film transistor; TFT)소자의 채널층으로 사용할 수 있다. 투명 비정질 산화물 반도체 IGZO (In-Ga-Zn-O)는 다른 비정질 재료에 비해 높은 전하 이동도를 가지기 때문에 우수한 성능의 TFT소자를 제작할 수 있다. 본 연구에서는 RF magnetron sputtering법으로 corning 1737 유리기판 위에 RF 파워의 변화에 따라 증착한 IGZO박막의 광학적 전기적 특성 변화를 연구하였다. 박막 증착 조건은 초기 압력 $2.0{\times}10^{-6}Torr$, 증착 압력 $2.0{\times}10^{-2}Torr$, 반응가스 Ar 25 sccm, 증착 온도는 실온으로 고정하였으며, 공정변수로 RF 파워를 25 w, 50 w, 75 w, 100 w로 변화시키며, IGZO 타겟은 $In_2O_3$, $Ga_2O_3$, ZnO 분말을 각각 1 : 1 : 2mol% 조성비로 혼합하여 소결한 타겟을 사용하였다. 표면분석(AFM)결과 RF 파워가 증가함에 따라 거칠기가 증가하였으며, XRD 분석결과 Bragg's 법칙을 만족하는 피크가 나타나지 않는 비정질 구조임을 확인할 수 있었다. 가시광 영역에서 (450~700 nm) 25 w일 때 85% 이상을 확인하였고, RF 파워가 증가할수록 밴드갭이 감소하는 것을 확인하였다. RF 파워가 100 w인 경우 carrier 밀도는 $7.7{\times}10^{19}cm^{-3}$, Mobility $8.42cm^2V-s$, Resistivity $9.45{\times}10^{-3}{\Omega}-cm$로 투명 전도막의 특성을 보였다.

  • PDF

Equi-spaced multichannel stabilization with a reference frequency from ($^13C_2H_2$) molecules and optical fiber fabry-perot filter (아세칠렌가스($^13C_2H_2$)분자의 흡수선을 이용한 기준 광신호 및 광섬유 파브리-페로 필터에 의한 등간격 다중채널의 안정화)

  • 이현재;류갑열;이동호;박창수
    • Korean Journal of Optics and Photonics
    • /
    • v.8 no.1
    • /
    • pp.68-72
    • /
    • 1997
  • Using one of the absorption lines of $^{13}C_2H_2$ molecules near the zero dispersion wavelength(1549.49nm) of dispersion shifted fiber, we stabilized center frequency of an optical fiber Fabry-Perot filter. The free spectral range of the filter is 100 GHz for 100 GHz channel allocation. For equi-spaced three channel multiplexing, channel locking of three DFB-LDs to transmission peaks of the fiber Fabry-Perot filter was tried. To investigate the effect of dithering current applied to each DFB-LD, the change of DFB-LD linewidth was measured.

  • PDF

Numerical analysis of the gas flow distribution characteristics in the anode flow channel of the molten carbonate fuel cell (MCFC) (용융탄산염 연료전지 anode 유로 채널에서의 가스 유동 분포에 관한 수치해석적 연구)

  • Cho, Jun-Hyun;Ha, Tae-Hun;Kim, Han-Sang;Min, Kyoung-Doug;Park, Jong-Hoon;Chang, In-Gab;Lee, Tae-Won
    • Proceedings of the KSME Conference
    • /
    • 2008.11b
    • /
    • pp.3120-3124
    • /
    • 2008
  • A three-dimensional computational fluid dynamics (CFD) analysis is performed to investigate flow characteristics in the anode channels and manifold of the internal reforming type molten carbonate fuel cell (MCFC). Considering the computational difficulties associated with the size and geometric complexity of the MCFC system, the polyhedral meshes that can reduce mesh connectivity problems at the intersection of the channel and the manifold are adopted and chemical reactions inside the MCFC system are not included. Through this study, the gas flow rate uniformity of the anode channels is mainly analyzed to provide basic insights into improved design parameters for anode flow channel design. Results indicate that the uniformity in flow-rate is in the range of ${\pm}1%$ between the anode channels. Also, the mal-distributed inlet flow-rate conditions and the change in the size of the manifold depth have no significant effect on the flow-rate uniformity of the anode channels.

  • PDF

Investigation of Water Droplet Behaviour on GDL Surface and in the Air Flow Channel of a PEM Fuel Cell under Flooding Conditions (플러딩 조건 하에서의 고분자전해질형 연료전지 GDL 표면과 공기극 유로 채널에서의 물방울 유동 특성 고찰)

  • kim, Hansang;Min, Kyoungdoug
    • Transactions of the Korean hydrogen and new energy society
    • /
    • v.23 no.5
    • /
    • pp.476-483
    • /
    • 2012
  • Proper water management is crucial for the efficient operation of polymer electrolyte membrane (PEM) fuel cell. Especially, for automotive applications, A novel water management that can avoid both membrane dry-out and flooding is a very important task to achieve good performance and efficiency of PEM fuel cells. The aim of this study is to investigate the liquid water behavior on the gas diffusion layer (GDL) surface and in the cathode flow channel of a PEM unit fuel cell under flooding conditions. For this purpose, a transparent unit fuel cell is devised and fabricated by modifying the conventional PEM fuel cell design. The results of water droplet behavior under flooding conditions are mainly presented. The water distributions in the cathode flow channels with cell operating voltage are also compared and analyzed. Through this work, it is expected that the data obtained from this fundamental study can be effectively used to establish the basic water management strategy in terms of water removal from the flow channels in a PEM fuel cell stack.

The reliability enhancement according to the trench etching profile (트렌치 식각 형상에 따른 신뢰성 향상)

  • Kim, Sang-Gi;Lee, Ju-Wook;Kim, Gwan-Ha;Park, Hoon-Soo;Kim, Bo-Woo;Koo, Jin-Gun;Kang, Jin-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.06a
    • /
    • pp.127-128
    • /
    • 2007
  • 고밀도 트렌치 게이트 전력소자 제조를 위해 HBr. He-$O_2$, $SiF_4$, $CF_4$ 등의 식각 가스를 이용하여 형성한, 트렌치 표면 거칠기 및 손상을 최소화 하여 고밀도 트렌치 게이트 전력소자를 제조하였다. 트렌치 형상 각도가 약 900일 경우 항복전압은 약 29 V인 반면, 트렌치 각도가 $88^{\circ}$일 경우 항복전압이 37V로 트렌치 형상에 따라 약 25%의 항복전압이 높아졌음을 알 수 있었다. n-채널 트렌치 게이트 전력소자의 전압-전류 측정 결과 트렌치 게이트 수가 45.000개일 때 게이트에 10 V를 인가했을 때 전류는 약 46 A로 측정되어 고밀도 트렌치 게이트 전력소자의 특성이 좋음을 알 수 있었다.

  • PDF

Experimental Study on Cooling Performance of Internal Heat Exchanger for CO2 Refrigerant System (이산화탄소 냉매 시스템용 내부 열교환기의 냉방성능에 관한 실험적 연구)

  • Kim, Dae-Hoon;Kwon, Young-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.9 no.3
    • /
    • pp.587-592
    • /
    • 2008
  • In order to investigate the performance of an internal heat exchanger for $CO_2$ refrigerant system, the experiment was performed. Four kinds of internal heat exchangers(IHX) were used. The effects on the IHX length, the number of tube, the operating condition and the type of IHX were investigated. With increasing of the IHX length, the capacity and efficiency increased. The pressure drop of the low-side was larger compared with that of the high-side. As the temperature of the gas cooler increased, the capacity and efficiency increased linearly. The operation condition of evaporator was suggested as two phase region rather than superheat region. The capacity and efficiency of the micro-channel was larger about 90% and 75% than those of the tube. But the pressure drop of the micro-channel was more larger, compared with that of the tube.

Design of sinusoidal shape channel PCHEs for supercritical LNG based on CFD simulation (CFD 시뮬레이션 기반 초임계 LNG용 사인함수 PCHE 설계)

  • Fan, Jinxing;Yeom, Eunseop
    • Journal of the Korean Society of Visualization
    • /
    • v.19 no.3
    • /
    • pp.69-76
    • /
    • 2021
  • Printed circuit heat exchanger (PCHE) is a compact heat exchanger with good heat transfer performance, high structure integrity, and reliability over a wide range of temperatures and pressures. Instead of the traditional zigzag and straight shape channel, the sinusoidal shape channel was adopted in this study to investigate the relation of thermal-hydraulic performance and waviness factors (period and amplitude). The local flow characteristics and the heat flux distribution were compared to verify the effects of period and amplitude on heat transfer performance. As the period of channel becomes shorter, the rapid change of the flow direction can produce high flow separation around the corner leading to the disturbance of the boundary layer opposite wall. The nonuniform distribution of flow velocity appeared around the corner positions can promote fluid mixing and lead to higher thermal performance. An evaluation index was used to compare the comprehensive performance of PCHE considering the Nusselt number and Fanning factor. Based on the simulation results, the optimal design parameters of PCHE channel shape were found that the channel with an equivalent bending angle of 15° offers the highest heat flux capacity.

Kinetic Study of the Fischer-Tropsch Synthesis and Water Gas Shift Reactions over a Precipitated Iron Catalyst (철 촉매를 이용한 Fischer-Tropsch 합성 반응과 수성 가스 전환 반응에 대한 반응 속도 연구)

  • Yang, Jung-Il;Chun, Dong Hyun;Park, Ji Chan;Jung, Heon
    • Korean Chemical Engineering Research
    • /
    • v.50 no.2
    • /
    • pp.358-364
    • /
    • 2012
  • The kinetics of the Fischer-Tropsch synthesis and water gas shift reactions over a precipitated iron catalyst were studied in a 5 channel fixed-bed reactor. Experimental conditions were changed as follows: synthesis gas $H_2$/CO feed ratios of 0.5~2, reactants flow rate of 60~80 ml/min, and reaction temperature of $255{\sim}275^{\circ}C$ at a constant pressure of 1.5 MPa. The reaction rate of Fischer-Tropsch synthesis was calculated from Eley-Rideal mechanism in which the rate-determining step was the formation of the monomer species (methylene) by hydrogenation of associatively adsorbed CO. Whereas water gas shift reaction rate was determined by the formation of a formate intermediate species as the rate-determining step. As a result, the reaction rates of Fischer-Tropsch synthesis for the hydrocarbon formation and water gas shift for the $CO_2$ production were in good agreement with the experimental values, respectively. Therefore, the reaction rates ($r_{FT}$, $r_{WGS}$, $-r_{CO}$) derived from the reaction mechanisms showed good agreement both with experimental values and with some kinetic models from literature.

The Continuous Measurement of CO2 Efflux from the Forest Soil Surface by Multi-Channel Automated Chamber Systems (다중채널 자동챔버시스템에 의한 삼림토양의 이산화탄소 유출량의 연속측정)

  • Joo, Seung Jin;Yim, Myeong Hui;Ju, Jae-Won;Won, Ho-yeon;Jin, Seon Deok
    • Ecology and Resilient Infrastructure
    • /
    • v.8 no.1
    • /
    • pp.32-43
    • /
    • 2021
  • Multichannel automated chamber systems (MCACs) were developed for the continuous monitoring of soil CO2 efflux in forest ecosystems. The MCACs mainly consisted of four modules: eight soil chambers with lids that automatically open and close, an infrared CO2 analyzer equipped with eight multichannel gas samplers, an electronic controller with time-relay circuits, and a programmable logic datalogger. To examine the stability and reliability of the developed MCACs in the field during all seasons with a high temporal resolution, as well as the effects of temperature and soil water content on soil CO2 efflux rates, we continuously measured the soil CO2 efflux rates and micrometeorological factors at the Nam-san experimental site in a Quercus mongolica forest floor using the MCACs from January to December 2010. The diurnal and seasonal variations in soil CO2 efflux rates markedly followed the patterns of changes in temperature factors. During the entire experimental period, the soil CO2 efflux rates were strongly correlated with the temperature at a soil depth of 5 cm (r2 = 0.92) but were weakly correlated with the soil water content (r2 = 0.27). The annual sensitivity of soil CO2 efflux to temperature (Q10) in this forest ranged from 2.23 to 3.0, which was in agreement with other studies on temperate deciduous forests. The annual mean soil CO2 efflux measured by the MCACs was approximately 11.1 g CO2 m-2 day-1. These results indicate that the MCACs can be used for the continuous long-term measurements of soil CO2 efflux in the field and for simultaneously determining the impacts of micrometeorological factors.

Evaluation of Fine-Particle Removal Performance of Novel ESP with Highly Durable Chargers and Collectors (고내구성 하전 및 집진 방식 전기집진기의 미세입자 제거 특성)

  • Kim, Hak-Joon;Han, Bang-Woo;Hong, Won-Seok;Shin, Wan-Ho;Song, Dong-Keun;Jung, Sang-Hyeon;Kim, Yong-Jin;Oh, Won-Suk;Hwang, Kyu-Dong;Yoo, Seong-Yeon
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.34 no.4
    • /
    • pp.423-428
    • /
    • 2010
  • Electrostatic precipitators (ESPs) used currently in industries for removing fine particles from semiconductors have to be made of expensive anticorrosive metallic materials in order to maintain their particle-removal performance. To satisfy the economical demands of industries, a novel ESP was developed; in this ESP, the charger is made of carbon fibers and collection plates consist of PET films among which an aluminum sheet is inserted. The ESP was evaluated by changing the voltages applied to the chargers and collection plates, flow rates, and number of charging channels. KCl particles with mean diameters of 100 nm were used, and a scanning mobility particle sizer was used to measure the changes in particle number concentrations upstream and downstream of the ESP. The experimental results showed that more than 90% of the particles were removed by using the ESP containing ionizers with nine channels and 65-mm collection plates at $500\;m^3/hr$ when voltages of 7 kV and 10 kV were applied to the ionizers and collection plates, respectively.