• 제목/요약/키워드: , depth profile

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나노인프로세스 형상계측 및 미세가공용 프로브의 개발 (Development of a New Probe to Realize Nano/Micro Mechanical Machining and In-Process Profile Measurement)

  • 권현규;최성대
    • 한국기계가공학회지
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    • 제2권1호
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    • pp.75-84
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    • 2003
  • In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

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치면 프로파일 모델에 따른 기어 치면 내부의 응력 분포 (Sub­surface Stress Distribution beneath the Contact Surface of the Gear Teeth for Two Profile Models)

  • 구영필;오명석;김형자;김영대
    • Tribology and Lubricants
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    • 제19권6호
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    • pp.357-364
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    • 2003
  • The sub­surface stress field beneath the gear's contact surface caused by the contact pressure in lubricated condition has been calculated. To evaluate the influence of the clearance shape on the stress field, two kinds of tooth profile models were chosen. One is the conventional cylinder contact model and the other is the new numerical model. Love's rectangular patch solution was used to obtain the sub­surface stress field. The analysis results show that the sub­surface stress is quite dependent on both the contact pressure and the profile model. The maximum effective stress of the new model is lower than that of the old model. The depth where the maximum effective stress occurs in the new model is not proportional to the intensity of the external load.

이온교환 평판도파로의 실효굴절율 측정 및 해석 (Analysis and Measurement of Effective Refractive Indices with Ion-exchanged Slab Waveguide)

  • 천석표;박정일;박태성;정홍배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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    • pp.73-76
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    • 1995
  • In this study, the slab waveguide was fabricated using potassium-nitride(KNO$_3$) or silver-nitride (AgNO$_3$) molten sources by ion-exchange process. The effective refractive indices of waveguide were measured by Prism-Coupling method. and The characteristics of waveguide(mode dispersion, effective diffusion depth. surface refractive index, diffusion coefficient, and refractive index profile etc,) were investigated by WKB method, In the case of potassium ion-exchange, the computer calculation showed that the refractive index profile of waveguide followed Gaussian function, the surface refractive index increased with ion-exchange time and the effective diffusion depth increased a little as ion-exchange time increased, while the surface refractive index of silver ion-exchanged waveguide decreased with ion-exchange time because of the ion depletion on the surface of waveguide, and the effective diffusion depth seriously with ion-exchange tim. Double ion-exchanged waveguide was fabricated by performing silver ion-exchange after potassium ion-exchange. Double ion-exchanged waveguide had a tight mode binding force since the surface refractive index was larger than single step ion-exchanged waveguide.

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레이저 유도에칭을 이용한 티타늄 미세채널 제조 (Fabrication of Titanium Microchannels by using Ar+ Laser-assited Wet Etching)

  • 손승우;이민규;정성호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.709-713
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    • 2004
  • Characteristics of laser-assisted wet etching of titanium in phosphoric acid were investigated to examine the feasibility of this method for fabrication of high aspect ratio microchannels. Laser power, number of scans, etchant concentration, position of beam waist and scanning speed were taken into consideration as the major process parameters exerting the temperature distribution and the cross sectional profile of etched channels. Experimental results indicated that laser power influences on both etch width and depth while number of scans and scanning speed mainly affect on the etch depth. At a low etchant concentration, the cross sectional profile of an etched channel becomes a U-shape but it gradually turns into a V-shape as the concentration increases. On the other hand, surface of the laser beam focus with respect to the sample surface is found to be a key factor determining the bubble dynamics and thus the process stability. It is demonstrated that metallic microchannels with different cross sectional profiles can be fabricated by properly controlling the process parameters. Microchannels of aspect ratio up to 8 with the width and depth ranges of 8∼32 m and 50∼300 m, respectively, were fabricated.

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Fabrication of Microgratings and their IR Diffraction Spectra

  • Kim, In Cheol;Choi, Eunwoo;Kim, Seong Kyu;Kang, Young Il;Kim, Taeseong;Bae, Hyo-Wook;Park, Do-Hyun
    • Bulletin of the Korean Chemical Society
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    • 제35권3호
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    • pp.908-912
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    • 2014
  • Microgratings whose diffracted field at a fixed angle generate IR spectra of $SF_6$ or $NH_3$ were fabricated by MEMS techniques for the purpose of IR correlation spectroscopy. Each micrograting was composed of 1441 reflecting lines in the area of $19.2{\times}19.2mm^2$. The depth profile of the line elements was determined with a gradient searching method that was described in our previous publication (J. Mod. Opt. 2013, 60, 324-330), and was discretized into 16 levels between 0 and $6.90{\mu}m$. The diffraction field from a given depth profile was calculated with Fraunhofer equation. The fabricated microgratings showed errors in the depth and the width within acceptable ranges. As the result, the diffracted IR spectrum of each micrograting matched well with its target reference spectrum within spectral resolution of our optical setup.

Ti 양극산화 피막에서 Ti 및 O원소의 화학결합 상태 (Chemical Binding States of Ti and O Elements in Anodic Ti Oxide Films)

  • 유창우;오한준;이종호;장재명;지충수
    • 한국표면공학회지
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    • 제35권6호
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    • pp.383-390
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    • 2002
  • To investigate behaviors of Ti and O elements and microstructures of anodic titanium oxide films, the films were prepared by anodizing pure titanium in $H_2$S $O_4$, $H_3$P $O_4$, and $H_2O$$_2$ mixed solution at 180V. The microstructures and chemical states of the elements were analyzed using SEM, X-ray mapping, AFM, XRD, XPS (depth profile). The films formed on a titanium substrate showed porous layers which were composed of pore and wall, And with increasing anodizing time a hexagonal shape of cell structures were dominant and solace roughness increased. From the XRD result the structure of the Ti $O_2$ layer was anatase type of crystal on the whole. In the XPS spectra it was found that Ti and O were chemically binded in forms of Ti $O_2$, TiOH, $Ti_2$ $O_3$ at Ti 2p, and Ti $O_2$, $Ti_2$ $O_3$, $P_2$ $O_{5}$, S $O_4^{2-}$ at O ls respectively. Concentration of Ti $O_2$ decreased as the depth increased from the surface of the oxide film towards the substrate, but to the contrary concentrations of TiOH and $Ti_2$ $O_3$ increased.d.

경기도 네개 골프장의 토양단면의 물리화학적 특성 (Physico-chemical Characteristics of Soil Profile f Four Golf Courses in Kyonggi Province)

  • 최병주;심재성;주영희;유병남
    • 아시안잔디학회지
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    • 제7권2_3호
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    • pp.55-60
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    • 1993
  • Soil profile was well developed into four horizons, $A_1$, $A_3$, $B_2$and C at 100cm-depth in most four golf courses in Kyonggi province. Distribution of root system of Korean lawngrass was abundant in dark yellowish or yellowish brown $A_1$ horizon with low hardness(8~14mm yamanaka scale), moderately in yellowish brown $A_3$ horizon with moderate hardness(16~23mm) rarely in $B_3$horizon(15~60cm depth) and no in C horizon. Optimum soil hardness for good root growth of Korean lawngrass appeared to be less than 16mm mineral nutrient contents. Such as Ca++, Mg++, K+, Mn++ and Fe showed relatively higher concentration in lower horizon indicating the leaching of minerals. The increasing tendency of soil pH with depth seemed to the result of mineral leaching. There was significant positive correlation between Ca+Mg and pH, manganese content appeared to be too high(261~789ppm) in $A_1$ horizon. The contents of organic matter and phosphorus were bight in $A_1$ horizon and greatly varied among golf courses.

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Three-dimensional stability assessment of slopes with spatially varying undrained shear strength

  • Shi, Yunwei;Luo, Xianqi;Wang, Pingfan
    • Geomechanics and Engineering
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    • 제31권4호
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    • pp.375-384
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    • 2022
  • The variation of the undrained shear strength (cu) is an important consideration for assessing slope stability in engineering practice. Previous studies focused on the three-dimensional (3D) stability of slopes in normally consolidated clays generally assume the undrained shear strength increases linearly with depth but does not vary in the horizontal direction. To assess the 3D stability of slopes with spatially varying undrained shear strength, the kinematic approach of limit analysis was adopted to obtain the upper bound solution to the stability number based on a modified failure mechanism. Three types failure mechanism: the toe failure, face failure and below-toe failure were considered. A serious of charts was then presented to illustrate the effect of key parameters on the slope stability and failure geometry. It was found that the stability and failure geometry of slopes are significantly influenced by the gradient of cu in the depth direction. The influence of cu profile inclination on the slope stability was found to be pronounced when the increasing gradient of cu in the depth direction is large. Slopes with larger width-to-height ratio B/H are more sensitive to the variation of cu profile inclination.

Conversion from SIMS depth profiling to compositional depth profiling of multi-layer films

  • Jang, Jong-Shik;Hwang, Hye-Hyen;Kang, Hee-Jae;Kim, Kyung-Joong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.347-347
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    • 2011
  • Secondary ion mass spectrometry (SIMS) was fascinated by a quantitative analysis and a depth profiling and it was convinced of a in-depth analysis of multi-layer films. Precision determination of the interfaces of multi-layer films is important for conversion from the original SIMS depth profiling to the compositional depth profiling and the investigation of structure of multi-layer films. However, the determining of the interface between two kinds of species of the SIMS depth profile is distorted from original structure by the several effects due to sputtering with energetic ions. In this study, the feasibility of 50 atomic % definition for the determination of interface between two kinds of species in SIMS depth profiling of multilayer films was investigated by Si/Ge and Ti/Si multi-layer films. The original SIMS depth profiles were converted into compositional depth profiles by the relative sensitivity factors from Si-Ge and Si-Ti alloy reference films. The atomic compositions of Si-Ge and Si-Ti alloy films determined by Rutherford backscattering spectroscopy (RBS).

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