• Title/Summary/Keyword: (110) silicon

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Insulation Method and Performance Evaluation for Fastening Unit of ALC Pannel-Curtain wall (ALC 패널 커튼월의 패스닝 유닛의 단열 방법과 성능 평가)

  • Kim, Bongl-Joo;Kim, Kyeong-A;Park, Je-Min
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2011.05a
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    • pp.107-110
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    • 2011
  • In this study is to improve insulation performance that are the most weak insulation part of fastening unit of the curtain wall. It was produced that thought out to minimize mullion and connecting part, and evaluated performance that make a layer of insulation in the middle by using vibration-proof rubber or silicon. Vibration-proof rubber insulation is 2.6℃~4.0℃ higher and silicon insulation is 2.4℃ higher than non-insulation. Therefore the insulating layer of fastening unit is necessary.

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Selective etch of silicon nitride, and silicon dioxide upon $O_2$ dilution of $CF_4$ plasmas ($CF_4$$O_2$혼합가스를 이용한 산화막과 질화막의 선택적 식각에 관한 연구)

  • 김주민;원태영
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.90-94
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    • 1995
  • Reactive Ion Etching(RIE) of Si$_{3}$N$_{4}$ in a CF$_{4}$/O$_{2}$ gas plasma exhibits such good anisotropic etching properties that it is widely employed in current VLSI technology. However, the RIE process can cause serious damage to the silicon surface under the Si$_{3}$N$_{4}$ layer. When an atmospheric pressure chemical vapor deposited(APCVD) SiO$_{2}$ layer is used as a etch-stop material for Si$_{3}$N$_{4}$, it seems inevitable to get a good etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$. Therefore, we have undertaken thorough study of the dependence of the etch rate of Si$_{3}$N$_{4}$ plasmas on $O_{2}$ dilution, RF power, and chamber pressure. The etch selectivity of Si$_{3}$N$_{4}$ with respect to SiO$_{2}$ has been obtained its value of 2.13 at the RF power of 150 W and the pressure of 110 mTorr in CF$_{4}$ gas plasma diluted with 25% $O_{2}$ by flow rate.

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Properties of metal-ferroelectric thin film-silicon(MFS) structure using BaMgF$_{4}$ (BaMgF$_{4}$ 를 이용한 금속-강유전체박막-실리콘(MFS) 구조의 특성)

  • 김광호;김제덕;유병곤
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.5
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    • pp.102-107
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    • 1996
  • Use of a rapid thermal annealing (RTA) technique is shown to improve the properties of metal-ferroelectric BaMgF$_{4}$-silicon structures. The fluoride film was deposited in an ultra-high vacuum system at asubstrate temperature of 300$^{\circ}C$. A post-deposition annelaing was conducted for 10 seconds at 600.deg. C in a vacuum of 0.1 Torr, using a home-made RTA apparatus. The results showed that the resistivity of the ferroelectric BaMgF$_{4}$ film from a typical value of 1-2${\times}10^{11}{\Omega}{\cdot}cm$ before the annealing to about 5${\times}10^{13}{\Omega}{\cdot}cm$ and reduce the interface state density of the BaMgF$_{4}$/Si interface to about 8${\times}10^{10}cm^{2}{\cdot}$eV. Ferroelectric hysteresis measurements using a sawyer-tower circuit yielded remanent polarization and coercive field values of about 0.5$\mu$C/cm$^{2}$ and 80 kV/cm, respectively. the typical remanent polarization of the BaMgF$_{4}$ films ont he (100) and (111) oreientated silicon wafers were 0.5 - 0.6 $\mu$C/cm$^{2}$ and that of th efilms on the (110) wafers was 1.2$^{\circ}C$/cm$^{2}$.

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Improved Optimization of Indirubin Production from Bioreactor Culture of Polygonum tinctorium

  • Chung, Choong Sik;Kim, Kyung Il;Bae, Geun Won;Lee, Youn Hyung;Lee, Hyong Joo;Chae, Young Am;Chung, In Sik
    • Journal of Applied Biological Chemistry
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    • v.43 no.2
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    • pp.109-111
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    • 2000
  • Effect of the two-stage operation and cell concentration on indirubin production was investigated using bioreactor culture of Polygonum tinctorium. Two-stage culture was operated successfully for 110 days without any adverse effects on continuous indirubin production. Maximum indirubin concentration was found to be at 80 mg/bioreactor. Initial cell concentration significantly affected indirubin production. The indirubin production at 29.2% PCV was improved by 845%, compared to that at 5% PCV. For high-density bioreactor culture of P. tinctorium, a maximum production rate of 10.2 mg indirubin/L day was obtained. Indirubin recovery for bioreactor operation was also examined using XAD-2, XAD-4, XAD-7, and solid silicon. XAD-4 was 1.6-fold more effective than that for solid silicon in indirubin recovery.

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Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam (CW 레이저 조사에 의한 실리콘 웨이퍼의 손상 평가)

  • Choi, Sung-Ho;Kim, Chung-Seok;Jhang, Kyung-Young;Shin, Wan-Soon
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.10
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    • pp.1241-1248
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    • 2012
  • The objective of this study is to evaluate the thermal damage characterization of a silicon wafer subjected to a CW laser beam. The variation in temperature and stress during laser beam irradiation has been predicted using a three-dimensional numerical model. The simulation results indicate that the specimen might crack when a 93-$W/cm^2$ laser beam is irradiated on the silicon wafer, and surface melting can occur when a 186-$W/cm^2$ laser beam is irradiated on the silicon wafer. In experiments, straight cracks in the [110] direction were observed for a laser irradiance exceeding 102 $W/cm^2$. Furthermore, surface melting was observed for a laser irradiance exceeding 140 $W/cm^2$. The irradiance for surface melting is less than that in the simulation results because multiple reflections and absorption of the laser beam might occur on the surface cracks, increasing the absorbance of the laser beam.

Low Pressure Chemical Vapor Deposition of Silicon Carbide (탄화규소의 저압 화학증착)

  • 송진수;김영욱;김동주;최두진;이준근
    • Journal of the Korean Ceramic Society
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    • v.31 no.3
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    • pp.257-264
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    • 1994
  • The objectives of this study were to develop the low pressure chemical vapor deposition(LPCVD) process of SiC and to fabricate pure and dense SiC layer onto graphite substrate at low temperature. The deposition experiments were performed using the MTS-H2 system (30 torr) in the deposition temperature ranging from 100$0^{\circ}C$ to 120$0^{\circ}C$. The deposition rate of SiC was increased with the temperature. The rate controlling step can be classified from calculated results of the apparent thermal activation energy as follows; surface reaction below 110$0^{\circ}C$ and gas phase diffusion through a stagnant layer over 110$0^{\circ}C$. The deposited layer was $\beta$-SiC with a preferred orientation of (111) and the strongly faceted SiC deposits were observed over 115$0^{\circ}C$.

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2D Transconductance to Drain Current Ratio Modeling of Dual Material Surrounding Gate Nanoscale SOl MOSFETs

  • Balamurugan, N.B.;Sankaranarayanan, K.;John, M.Fathima
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.9 no.2
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    • pp.110-116
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    • 2009
  • The prominent advantages of Dual Material Surrounding Gate (DMSG) MOSFETs are higher speed, higher current drive, lower power consumption, enhanced short channel immunity and increased packing density, thus promising new opportunities for scaling and advanced design. In this Paper, we present Transconductance-to-drain current ratio and electric field distribution model for dual material surrounding gate (DMSGTs) MOSFETs. Transconductance-to-drain current ratio is a better criterion to access the performance of a device than the transconductance. This proposed model offers the basic designing guidance for dual material surrounding gate MOSFETs.

An Experimental Study on Mechanical Properties of Ultra-High Strength Powder Concrete (압축강도 300MPa 이상의 초고강도 분체콘크리트 개발을 위한 실험적 연구)

  • Jo, Byung-Wan;Yoon, Kwang-Won;Park, Jung-Hoon;Kim, Heoun
    • Journal of the Korea Concrete Institute
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    • v.22 no.3
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    • pp.287-295
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    • 2010
  • In this study, ordinary Portland cement was used and the air void was minimized by using minute quartz as the filler. In addition, steel fibers were used to mitigate the brittle failure problem associated with high strength concrete. This study is in progress to make an Ultra-high strength powdered concrete (UHSPC) which has compressive strength over 300 MPa. To increase the strength of concrete, we have compared and analyzed the compressive strengths of the concretes with different mix proportions and curing conditions by selecting quartz sand, dolomite, bauxite, ferro silicon which have diameters less than 0.6 mm and can increase the bond strength of the transition zone. Ultra-high strength powdered concrete, which is different from conventional concrete, is highly influenced by the materials in the mix. In the study, the highest compressive strength of the powdered concrete was obtained when it is prepared with ferro silicon, followed in order by Bauxite, Dolomite, and Quartz sand. The amount of ferro silicon, when the highest strength was obtained, was 110%, of the weight of the cement. SEM analysis of the UHSPC showed that significant formation of C-S-H and Tobermorite due to high temperature and pressure curing. Production of Ultrahigh strength powdered concrete which has 28-day compressive strength upto 341MPa has been successfully achieved by the following factors; steel fiber reinforcement, fine particled aggregates, and the filling powder to minimize the void space, and the reactive materials.

Piezo-electrically Actuated Micro Corner Cube Retroreflector (CCR) for Free-space Optical Communication Applications

  • Lee, Duk-Hyun;Park, Jae-Y.
    • Journal of Electrical Engineering and Technology
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    • v.5 no.2
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    • pp.337-341
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    • 2010
  • In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

The optimization of HIT solar cells on crystalline silicon substrates and amorphous silicon layers (HIT 태양전지 결정 실리콘 기판 및 비정질 실리콘 층의 최적조건)

  • Lyou, Jong H.
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.110.2-110.2
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    • 2011
  • 일본 Sanyo 사에 의해서 획기적으로 HIT 태양전지가 개발된 바 있다. 이러한 HIT 태양전지는 기존의 확산-접합 Si 태양전지에 비해서 저비용 고효율의 장점을 갖는다: 22% 이상의 변환효율, $200^{\circ}C$ 이하의 공정온도, 낮은 태양전지 온도 의존도, 높은 개방전압. 한편 Sanyo사의 HIT 태양전지는 n-형 Si 웨이퍼를 이용한 반면에, 최근 미국 National Renewable Energy Laboratory는 p-형 Si 웨이퍼를 이용해서 변환효율 19% 대의 HIT 태양전지를 개발한 바 있다. 그 동안 지속적으로 p-형 Si HIT 태양전지를 고효율화하기(< 22%) 위해서 많은 노력이 진행되어 왔지만 이와 같은 노력에도 불구하고 아직 p-형 HIT는 n-형 HIT 태양전지에 비해서 다소 성능면에서 떨어져 있다. 본 연구는 n- 및 p-형 실리콘 웨이퍼로 구성된 HIT 태양전지의 물리적인 차이점에 초점을 맞추고, 결정 및 비정질 실리콘 층의 역할에 대해서 연구하였다. 특히 태양전지 효율을 향상시키는 요소들로서 결정 실리콘의 불순물 준위(n- 및 p-형) 또는 비저항, 비정질 실리콘으로 구성된 emitter 층, intrinsic 층, 경계면이 고려되었다. 그리고 이러한 요소들이 HIT 태양전지에 미치는 영향을 조사하기 위해서 AMPS-1D 컴퓨터 프로그램을 사용하였고, 이를 통해서 HIT 태양전지의 결정 및 비정질 실리콘 층의 역할을 물리적 정량적으로 분석하였다. 본 연구에 적용되는 HIT는 ITO/a-Si:H(p+)/a-Si:H(i)/c-Si(n)/a-Si:H(i)/a-Si:H(n+) 및 ITO/a-Si:H(n+)/a-Si:H(i)/c-Si(p)/a-Si:H(i)/a-Si:H(p+)의 구조로서 다음과 같은 태양전지 특성을 갖는다: n-형 HIT의 경우, fill factor ~ 0.78, 단락전류밀도 ~ 38.1 $mA/cm^2$, 개방전압 0.74 V, 변환효율 22.3 % (그리고 p-형 HIT의 경우, fill factor ~ 0.76, 단락전류밀도 ~ 36.5 $mA/cm^2$, 개방전압 0.69 V, 변환효율 19.4 %).

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