The Fabrication of the $ZrO_2$ Thin Film by Chemical Vapor Deposition and the Effect of the Reaction Parameters on the Deposition Characteristics
(화학증착법에 의한 $ZrO_2$ 박막의 제조 및 반응변수에 따른 증착특성)
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- Journal of the Korean Ceramic Society
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- v.28 no.1
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- pp.1-10
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- 1991