Deposition Pressure Dependent Electric Properties of (Hf,Zr)O2 Thin Films Made by RF Sputtering Deposition Method |
Moon, S.E.
(ICT Materials Research Group, Electronics and Telecommunications Research Institute)
Kim, J.H. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Im, J.P. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Lee, J. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Im, S.Y. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Hong, S.H. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Kang, S.Y. (ICT Materials Research Group, Electronics and Telecommunications Research Institute) Yoon, S.M. (Advanced Materials Engineering for Information & Electronics, Kyung Hee University) |
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