• Title/Summary/Keyword: $TiO_2

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A Study on the Seed Step-coverage Enhancement Process (SSEP) of High Aspect Ratio Through Silicon Via (TSV) Using Pd/Cu/PVP Colloids (Pd/Cu/PVP 콜로이드를 이용한 고종횡비 실리콘 관통전극 내 구리씨앗층의 단차피복도 개선에 관한 연구)

  • Lee, Dongryul;Lee, Yugin;Kim, Hyung-Jong;Lee, Min Hyung
    • Journal of Surface Science and Engineering
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    • v.47 no.2
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    • pp.68-74
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    • 2014
  • The seed step-coverage enhancement process (SSEP) using Pd/Cu/PVP colloids was investigated for the filling of through silicon via (TSV) without void. TEM analysis showed that the Pd/Cu nano-particles were well dispersed in aqueous solution with the average diameter of 6.18 nm. This Pd/Cu nano-particles were uniformly deposited on the substrate of Si/$SiO_2$/Ti wafer using electrophoresis with the high frequency Alternating Current (AC). After electroless Cu deposition on the substrate treated with Pd/Cu/PVP colloids, the adhesive property between deposited Cu layer and substrate was evaluated. The Cu deposit obtained by SSEP with Pd/Cu/PVP colloids showed superior adhesion property to that on Pd ion catalyst-treated substrate. Finally, by implementing the SSEP using Pd/Cu/PVP colloids, we achieved 700% improvement of step coverage of Cu seed layer compared to PVD process, resulting in void-free filling in high aspect ratio TSV.

Observation of an Ellerman bomb and its associated surge with the 1.6 meter New Solar Telescope at Big Bear Solar Observatory

  • Yang, Heesu;Chae, Jongchul;Park, Hyungmin;Maurya, Ram Ajor;Cho, Kyuhyun;Kim, Yeon-Han;Cho, Il-Hyun;Lim, Eun-Kyung
    • The Bulletin of The Korean Astronomical Society
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    • v.37 no.2
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    • pp.111.2-111.2
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    • 2012
  • We observed an Ellerman bomb(EB) and its associated surge using the Fast Imaging Solar Spectrograph(FISS) and the broadband TiO filter of the 1.6 meter New Solar Telescope at Big Bear Solar Observatory. As is well-known, the EB appears as a feature that is very bright at the far wings of the H alpha line. The lambdameter method applied to these wings indicates that the EB is blue-shifted up to 6km/s in velocity. In the photospheric level below the EB, we see rapidly growing "granule-like" feature. The transverse velocity of the dark lane at the edge of the "granule" increased with time as reached a peak of 6km/s, at the time of the EB's occurrence. The surge was seen in absorption and varied rapidly both in the H alpha and the Ca II 8542 line. It originated from the Ellerman bomb, and was impulsively accelerated to 20km/s toward us(blueshift). Then the velocity of the surge gradually changed from blueshift of 20km/s to redshift of 40km/s. By adopting the cloud model, we estimated the temperature of the surge material at about 27000K and the non-thermal velocity at about 10km/s. Our results shed light on the conventional idea that an EB results from the magnetic reconnection of an emerging flux tube and pre-existing field line.

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The Effects of PZT Ratio and Sr Doping on the Piezoelectric Properties in PZN-PNN-PZT (PZN-PNN-PZT계 압전 조성에서 PZN 함량과 Sr Doping이 압전 특성에 미치는 영향)

  • Choi, Jeoung Sik;Lee, Chang Hyun;Shin, Hyo Soon;Yeo, Dong Hun;Lee, Joon Hyung
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.1
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    • pp.19-23
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    • 2018
  • In a Pb-included piezoelectric composition, $Sr_yPb_{1-y}[(Zn_{1/3}Nb_{2/3})_x-(Ni_{1/3}Nb_{2/3})_{0.2}-(Zr_{0.46}Ti_{0.54})_{0.8-x}]O_3$ was selected in order to attain high piezoelectric properties. According to the PZN ratio (x) and the amount of Sr doping (y), the crystal structure, microstructure and piezoelectric properties were measured and evaluated. In the case of Sr 4 mol% doping, the piezoelectric properties were the highest for a PZN ratio of 0.1. In this condition, the grain size was larger and the intensity was higher. With the PZN ratio fixed and varying the Sr doping, the piezoelectric properties increased until 10 mol% doping and then decreased for over 12 mol% doping. In the case of x=0.1 and y=10 mol%, the best piezoelectric properties were obtained, i.e., $d_{33}=660pC/N$ and $k_p=68.5%$, and these values seem to be related to the grain size and crystal structure.

High Speed Cu Filling into Tapered TSV for 3-dimensional Si Chip Stacking (3차원 Si칩 실장을 위한 경사벽 TSV의 Cu 고속 충전)

  • Kim, In Rak;Hong, Sung Chul;Jung, Jae Pil
    • Korean Journal of Metals and Materials
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    • v.49 no.5
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    • pp.388-394
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    • 2011
  • High speed copper filling into TSV (through-silicon-via) for three dimensional stacking of Si chips was investigated. For this study, a tapered via was prepared on a Si wafer by the DRIE (deep reactive ion etching) process. The via had a diameter of 37${\mu}m$ at the via opening, and 32${\mu}m$ at the via bottom, respectively and a depth of 70${\mu}m$. $SiO_2$, Ti, and Au layers were coated as functional layers on the via wall. In order to increase the filling ratio of Cu into the via, a PPR (periodic pulse reverse) wave current was applied to the Si chip during electroplating, and a PR (pulse reverse) wave current was applied for comparison. After Cu filling, the cross sections of the vias was observed by FE-SEM (field emission scanning electron microscopy). The experimental results show that the tapered via was filled to 100% at -5.85 mA/$cm^2$ for 60 min of plating by PPR wave current. The filling ratio into the tapered via by the PPR current was 2.5 times higher than that of a straight via by PR current. The tapered via by the PPR electroplating process was confirmed to be effective to fill the TSV in a short time.

Evaluation of standardized ileal digestibility of amino acids in fermented soybean meal for nursery pigs using direct and difference procedures

  • Ki Beom, Jang;Sung Woo, Kim
    • Animal Bioscience
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    • v.36 no.2
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    • pp.275-283
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    • 2023
  • Objective: This study was to evaluate standardized ileal digestibility (SID) of amino acids (AA) in fermented soybean meal (FSBM) for nursery pigs using both direct procedure and difference procedure when FSBM was added at 20% in diets. Methods: Forty-eight pigs at 9.2±0.9 kg body weight (BW) were individually housed and allotted to 4 treatments. Treatments included NFD (a semi-purified N free diet), FSD (a diet with 20% FSBM), CBD (corn basal diet), and CFD (corn basal diet:FSBM at 80:20). The FSD was used to measure AA digestibility in FSBM using the direct procedure, whereas CBD and CFD were used in the difference procedure. Pigs were fed for 10 days (0.09×BW0.75 kg per day) and euthanized to collect ileal digesta for TiO2 and AA. Results: Total endogenous AA loss was 12.1 g/kg of dry matter intake. The apparent ileal digestibility (AID) Thr was greater (p<0.05) and AID His (p = 0.073) and Leu (p = 0.052) tended to be greater using the direct procedure compared with the difference procedure. The SID Thr were greater (p<0.05) in FSBM for nursery pigs calculated using a direct procedure compared with a difference procedure. In addition, SID Lys in FSBM was about 83% to 88% for nursery pigs higher than SID Lys described in National Research Council (2012). Conclusion: The SID of AA in FSBM when included at practical levels using the direct procedure were similar to those from the difference procedure. Considering the SID of AA obtained using both direct and difference procedures, FSBM is an effective protein supplement providing highly digestible AA to nursery pigs. The SID of AA from this study was considerably higher than those previous reported. This study also indicates the importance of including the test feedstuffs at practical levels when evaluating digestibility.

Experiment on Reduction of Pollutants in Titanium Dioxide Photocatalytic Ventilation System (이산화티탄 광촉매 환기장치의 오염물질 저감 실험)

  • Song, Yong Woo
    • Land and Housing Review
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    • v.13 no.2
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    • pp.117-123
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    • 2022
  • In this study, titanium dioxide photocatalyst was applied to the ventilation system to reduce particulate matter and nitrogen oxides (NOx), which are representative indoor harmful substances. A reaction device capable of installing an ultraviolet lamp was designed and manufactured so that the pollutant decomposition effect of the titanium dioxide photocatalyst identified through previous studies could be applied indoors. The reaction device was used on the indoor ventilation system and applied to the Mock-Up test. As a result of the Mock-up test, the NOx reduction performance according to the change in air volume once per hour and five times per hour was confirmed. As a result, it was confirmed that as the number of ventilation increases, the NOx reduction time decreases proportionally, and the reduction performance increases.

Chemical and Optical Absorption Spectroscopic Study of Colored Tourmalines (유색 전기석의 화학적 및 광학흡수 분광학적 연구)

  • Kim, Hee-Jong;Kim, Soo-Jin
    • Journal of the Mineralogical Society of Korea
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    • v.6 no.1
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    • pp.1-16
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    • 1993
  • The chemical and optical absorption spectroscopic characters of pink and colorless tourmalines from San Diego mine in California, U.S.A., blue/green tourmalines from anonymous mine, Brazil, and brownis black tourmalines from Uncheon and Haksan mines in Korea have been studied using X-ray diffractometer, electron microprobe, optical absorption spectroscopy, and heat treatment. Least-squares refinements give unit cell diminsions : a = 15.96-16.01 ${\AA}$, c = 7.15-7.16 ${\AA}$ for the brownish black tourmalines, a = 15.82 - 15.87 ${\AA}$, c = 7.09 - 7.10 ${\AA}$ for pink tourmalines, and a = 15.88 - 15.94 ${\AA}$, c = 7.12 - 7.15 ${\AA}$ for blue green tourmalines. The colors of tourmalines are responsible for the transition elements. The pink color is attributed to the $Mn^{3+}$ ions, the blue-green to $Fe^{2+}$ and $Mn^{2+}$, bluish green to $Cu^{2+}$, and the brownish black to $Fe^{2+}$, $Fe^{2+}$ - $Fe^{3+}$, and $Fe^{2+}$ - $Ti^{4+}$. The $Mn^{3+}$ ions of pink color tourmalines are stabilized in the Y sites compressed along the O(1)H-O(3)H axis by Jahn-Teller distortion. Heating removes the pink or red component from tourmalines, producing the colorless stones from the pink and red ones. The bluish green samples change into the greenish blue ones and a certain yellowish green samples change into the light green ones by heat treatment. In the elbaite-schorl series, the concentration of Fe and Mn are variable depending on the color zones. The green zone is characterrized by the high content of Fe and Mn are variable depending on the color zones. The green zone is characterized by the high content of Fe, whereas the pink zone by the high content of Mn. Mn increases in deep yellow zone compared with yellow or colorless zones.

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Petrology of Alkali Volcanic Rocks in Northern part of Ulrung Island (울릉도(鬱陵島) 북부(北部) 알칼리 화산암류(火山岩類)에 대(對)한 암석학적(岩石學的) 연구(硏究))

  • Kim, Yoon Kyu;Lee, Dai Sung
    • Economic and Environmental Geology
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    • v.16 no.1
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    • pp.19-36
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    • 1983
  • The study revealed that the sequence of volcanism in Ulrung island can be classified into 5 stages, and the volcanic history is summerized as follow: 1st stage: Eruption of basaltic agglomerates, tuffs and lavas, 2nd stage: Eruption of trachytic and trachyandesitic agglomerates and tuffs, 3rd stage: Eruption of trachyte lavas and their lapilli tuffs, 4th stage: Eruption of trachyte lavas and nepheline phonolites, 5th stage: Eruption of pumice, trachytic ash and lapilli, and plutonic ejecta (fragments of alkali gabbro, monzonite and alkali feldspar syenite) and a subsequent caldera formation. Finally, a small scale eruption of leucite bearing trachyandesite lava in the caldera. Several evidences show that there have been long erosional intervals between the 1st and 2nd stages and between the 4th and 5th stages. A K-Ar age for trachybasalt lava of the 1st stage was determined to be 1.8 Ma, and a $C^{14}$ age, 9300Y. (Machida, 1981) is available for these volcanic events. Therefore, it is considered that volcanic activity of the island above sea level began at least in early Pleistocene, and continued to until 9300 years ago exploding large amount of pumice, prior to pouring out of leucite bearing trachyandesite from the inner caldera. Using solidification index (SI) of Kuno, microscopic texture and mineral composition as criteria of the classification, the volcanic rocks are classified into alkali basalt, trachybasalt, trachyandesite, trachyte and phonolite. These are mostly prophyritic in texture. Main constituent minerals of alkali basalt and trachybasalt are plagioclase, olivine, Ti-augite and magnetite. Principal minerals of trachyandesite are plagioclase, anorthoclase, clinopyroxenes, kaersutite, biotite and magnetite. Trachyte and phonolite consist mainly of anorthoclase, clinopyroxene and magnetite, showing typical trachytic texture in groundmass. In solidification index, alkali basalt ranges from 39 to 27, trachybasalt 17 to 14, trachyandesite 12 to 9 and trachyte 8.15 to 0.72. A trend of compositional variation showing a typical alkali volcanic rock series is revealed on $SiO_2$-oxides and SI-oxides diagrams. In $SiO_2$-total alkali diagram, alkali lime index and An-Ab'-Or diagram, the samples fall into the fields of potassic series of the alkali volcanic rock series, whereas in A-F-M diagram show a trend toward the alkali enrichment with a curve approaching toward the iron apex. In particular, trachybasalt lavas in this island have higher total iron contents which is comparable to alkali rocks in other areas, e. g. as Gough and Tristan volcanic islands located near the Mid-Oceanic ridge in South Atlantic Ocean.

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Environmental Geophysical Survey of Abandoned Landfills for Contamination Evaluation: A Case Study (불량 매립지 오염평가를 위한 지구물리 탐사 사례연구)

  • Lee, Sung-Soon;Lee, Jin-Yong;Yoon, Hee-Sung;Lee, Kang-Kun;Kim, Chang-Gyun;Yu, Young-Chul
    • Journal of Korean Society of Environmental Engineers
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    • v.28 no.5
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    • pp.463-471
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    • 2006
  • Electrical resistivity surveys were conducted at areas of abandoned landfills in Cheonan and Wonju. Geology and extent of leachate migration around the landfills were evaluated with collected resistivity data by 2-D and 3-D resistivity inverse modeling. The Cheonan landfill is located above the paddy fields and the resistivity survey lines were crossed to examine possible pollution at the paddy fields by leakage of the landfill leachate. In Wonju, the landfill and the downgradient paddy fields are divided by a concrete barrier wall. At the bottom of the landfill, there is a leachate settlement system, which has not been in operation. To evaluate leachate leakage into the paddy fields, a total of 4 survey lines were used. According to the resistivity survey results, the landfill leachate in Cheonan appeared to be restricted only within the interior of the landfill, not to migrate into the subsurface of the paddy fields. These results are well consistent with electrical conductivity values of groundwaters obtained from a periodic analysis of water qualities. In Wonju, however, it was inferred that the leachate emanating from the landfill migrated beneath the abandoned leachate settlement system and the leachate would reach the downgradient paddy fields. Low resistivity area was observed in the old reservoir area and it appeared to be derived from convergence of groundwater flows from the surrounding valley and the moist wet land. In addition, groundwater flow into the paddy fields occurs beneath the old reservoir embankment at depths of $7{\sim}8m$. This paper reports details of the resistivity surveys for the uncontrolled landfills.

그린에너지 소재로서의 에어로젤 나노기공하이브리드 복합소재개발

  • Kim, Chang-Yeol;Jang, A-Reum;Kim, Jong-Hui
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.13.1-13.1
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    • 2009
  • 에어로젤은 인류가 개발한 소재 중에서 가장 가벼운 고체로, 기공률이 90%이상이고 비표면적은 ~1000m2/g, 기공의 크기는 10nm 크기로 이루어진 나노기공 물질이다. 1931년에 Kisley가 물유리로부터 실리카 에어로젤을 합성한 이래로 실리카 에어로젤에 대한 연구가 가장 많이 이루어져왔으며, 단열소재, 흡음재, 체렌코프우주선 디텍터, 반도체의 초저유전소재, 유출된 석유의 정제, 촉매 등에 대한 응용에 대해서도 연구가 많이 이루어져 왔다. 그리고TiO2와 같은 광촉매 에어로젤 소재, 카본 에어로젤 소재등 다양한 나노기공 소재에 대해서도 연구가 이루어지고 있으며, 카본 에어로젤의 경우 나노기공과 비표면적을이용한 전기이중층 커패시터 (EDLC)에 대한 연구도 이루어지고 이다. 본 연구에서는 첫째로, 실리카 에어로젤에 대한 연구결과를 소개하고 이의 단열소재로서의 응용가능성에대하여 언급하고자 한다. 실리카 에어로젤 나노기공 소재의 경우, 기공크기가 10nm크기로 매우 작고 공기의 자유이동길이와 거의 비슷하여서 대류에 의한 열전달을 낮출 수 있으며, 낮은 고체함량으로 인하여 포논에 의한 열전달을 낮출 수 있기 때문에 단열소재로서 최고의 성능을 나타낸다. 하지만, 문제는 높은 기공률로 인한 기계적인 취약성이 문제이다. 따라서 이를 보완하기 위항 섬유로 에어로젤을 보강할 수 있는데, 이를통하여 에어로젤 나노기공소재와 섬유보강에 의한 복합화에 대하여 말하고자 한다. 또 다른 하나의 연구방법은유기-무기 하이브리드 나노기공 소재를 합성하는 것이다. 여기서는하나의 방법으로 MTEOS-TEOS의 하이브리드화와 초임계 건조공정에 의한 나노기공 소재에 대한 연구결과를소개하고자 한다. 마지막으로 카본 에어로젤 나노기공소재의 합성과 나노기공 구조의 제어 및 물성평가에 대한 것을 말하고자하는데, 본 발표에서는 레소시놀과 포름알데히드를 촉매에 의한 중합반응을 통하여 유기 에어로젤 소재를 합성하고 분위기에서탄소화 공정을 통하여 카본에어로젤을 합성하였다. 또한 금속 니켈을 도입하는 것에 의하여 탄소/니켈 복합 하이브리드 에어로젤 소재를 합성하고 슈퍼커패시터 전기화학 특성에 대한 연구결과를 발표하고자 한다.

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